Patent US1647349A successfully refreshed from Google Patents.
Patent US3655544A successfully refreshed from Google Patents.
US3655544A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Refractory metal/refractory metal nitride resistor films
Assignee: General Electric Co
•
Filing: 1970-03-02
•
Granted: 1972-04-11
•
Expires: 1990-03-02
Abstract
Abstract Low temperature coefficient of resistance, high resistivity films of a refractory metal/refractory metal nitride are formed by sputtering a tungsten or molybdenum cathode in a chamber containing a mixture of an inert gas and nitrogen wherein nitrogen forms between 0.3 and 3.0 percent of the sputtering chamber pressure. The deposited films characteristically are a mixture of the sputtered metal and at least 5 percent by volume of the metal nitride with films having especially superior electrical characteristics containing the metal nitride in concentrations between approximately 40 and 60 percent by volume of the resistor film.
Inventors
- 👤 John R Rairden
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 17:23
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/14; C23C14/0021; C23C14/0036
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
24 words
A thin film resistor structure according to claim 1 wherein said nitride forms between 40 and 60 percent by volume of said resistor film.
Claim 2
Dependent Claim
37 words
A thin film resistor structure according to claim 1 further including a metallic film selectively deposited along said resistor film to permit electrical energization of said resistor film and an encapsulating layer deposited atop the juxtaposed films.
Claim 3
Dependent Claim
19 words
A thin film resistor structure as set forth in claim 1 wherein said mixture is tungsten and tungsten nitride.
Claim 4
Dependent Claim
19 words
A thin film resistor structure as set forth in claim 1 wherein said mixture of molybdenum and molybdenum nitride.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-04-11 | 1975-10-11 | 1976-04-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-04-11 | 1979-10-11 | 1980-04-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-04-11 | 1983-10-11 | 1984-04-11 | $7700.00 | Window Closed / Lapsed |