Patent US3648169A successfully refreshed from Google Patents.
US3648169A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Probe and head assembly
Assignee: Teledyne Inc
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Filing: 1969-05-26
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Granted: 1972-03-07
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Expires: 1989-05-26
Abstract
Abstract A probe and head assembly is provided for use particularly in testing electronically microelectronic devices such as integrated circuit wafers and the like. A very thin probe tip of one piece construction is formed with an integral parallel beam construction and plugs into the head assembly which is adjustable in different coordinate directions.
Inventors
- 👤 Mordechai Wiesler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 07:55
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/06705
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
207 words
A probe assembly for making contact with integrated circuit wafer under test, comprising: a. a unitary body portion, b. a slide portion movably mounted on said unitary body portion, said slide portion being formed with a cutaway section operating to divide said slide portion into two portions, one portion being a resilient hinged portion and the other portion being a relatively fixed portion, said slide portion also formed with a pair of lengthwise slots and a transverse slot; and c. means operatively engaging said lengthwise and transverse slots for selective adjustment of said slide portion with respect to said unitary body portion; and d. a probe mounted on said resilient portion said probe being formed with one opening defining a pair of parallel beam segments extending between a tip portion and the remaining part of said probe, said tip portion extending in a plane substantially perpendicular to said parallel beam segments which operate to deflect said tip portion in a plane perpendicular to the plane of said workpiece when said tip portion and workpiece are engaged whereby said tip portion will deflect with respect to the remaining part of said probe when said remaining part is restrained and said tip portion engages aid integrated circuit under test.
Claim 2
Dependent Claim
207 words
A probe assembly for making contact with integrated circuit wafer under test, comprising: a. a unitary body portion, b. a slide portion movably mounted on said unitary body portion, said slide portion being formed with a cutaway section operating to divide said slide portion into two portions, one portion being a resilient hinged portion and the other portion being a relatively fixed portion, said slide portion also formed with a pair of lengthwise slots and a transverse slot; and c. means operatively engaging said lengthwise and transverse slots for selective adjustment of said slide portion with respect to said unitary body portion; and d. a probe mounted on said resilient portion said probe being formed with one opening defining a pair of parallel beam segments extending between a tip portion and the remaining part of said probe, said tip portion extending in a plane substantially perpendicular to said parallel beam segments which operate to deflect said tip portion in a plane perpendicular to the plane of said workpiece when said tip portion and workpiece are engaged whereby said tip portion will deflect with respect to the remaining part of said probe when said remaining part is restrained and said tip portion engages aid integrated circuit under test.
Claim 3
Dependent Claim
181 words
A holder for probes comprising: a. a relatively fixed body portion; b. a slide portion movably mounted to said body portion; c. means for mounting probes to said slide portion; d. said slide portion being formed with a cutaway section operating to divide said slide portion into two portions, one portion being a resilient hinged portion and the other portion being a relatively fixed portion, said slide portion formed also with a pair of lengthwise slots and a transverse slot; e. a pin extending from said body portion into one of said elongated slots; f. a pair of rotatable cams mounted to said body portion and extending into the other of said slots for selective adjustment of said slide portion with respect to said body portion; g. said probe mounting means carried by said hinged portion; h. an elongated member extending from said fixed portion and engaging said hinged portion; and i. a tapered screw threaded to said fixed portion and extending through a cooperating circular opening formed in said member for selectively moving said member and thereby said hinged portion.
Claim 4
Dependent Claim
181 words
A holder for probes comprising: a. a relatively fixed body portion; b. a slide portion movably mounted to said body portion; c. means for mounting probes to said slide portion; d. said slide portion being formed with a cutaway section operating to divide said slide portion into two portions, one portion being a resilient hinged portion and the other portion being a relatively fixed portion, said slide portion formed also with a pair of lengthwise slots and a transverse slot; e. a pin extending from said body portion into one of said elongated slots; f. a pair of rotatable cams mounted to said body portion and extending into the other of said slots for selective adjustment of said slide portion with respect to said body portion; g. said probe mounting means carried by said hinged portion; h. an elongated member extending from said fixed portion and engaging said hinged portion; and i. a tapered screw threaded to said fixed portion and extending through a cooperating circular opening formed in said member for selectively moving said member and thereby said hinged portion.
Claim 5
Dependent Claim
29 words
A holder according to claim 2 including spring means compressed between said resilient hinged portion and relatively fixed portion, said spring means operating to urge said two portions apart.
Claim 6
Dependent Claim
140 words
A holder for integrated circuit wafer test probes comprising: a. a relatively fixed body portion; b. a slide portion movably mounted to said body portion; c. means for mounting probes to said slide portion; d. said slide portion formed with a cutaway section operating to divide said slide portion into two portions, one portion being a resilient hinged portion and the other portion being a relatively fixed portion, said probe mounting means carried by said hinged portion; e. said slide portion formed also with a pair of lengthwise slots and a transverse slot; f. a pin extending from said body portion into one of said elongated slots; and g. a pair of rotatable cams mounted to said body portion and extending into the other of said slots for selective adjustment of said slide portion with respect to said body portion.
Claim 7
Dependent Claim
140 words
A holder for integrated circuit wafer test probes comprising: a. a relatively fixed body portion; b. a slide portion movably mounted to said body portion; c. means for mounting probes to said slide portion; d. said slide portion formed with a cutaway section operating to divide said slide portion into two portions, one portion being a resilient hinged portion and the other portion being a relatively fixed portion, said probe mounting means carried by said hinged portion; e. said slide portion formed also with a pair of lengthwise slots and a transverse slot; f. a pin extending from said body portion into one of said elongated slots; and g. a pair of rotatable cams mounted to said body portion and extending into the other of said slots for selective adjustment of said slide portion with respect to said body portion.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-03-07 | 1975-09-06 | 1976-03-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-03-07 | 1979-09-06 | 1980-03-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-03-07 | 1983-09-06 | 1984-03-07 | $7700.00 | Window Closed / Lapsed |