US3333274A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Testing device
Assignee: Micro Tech Mfg Inc
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Filing: 1965-04-21
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Granted: 1967-07-25
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Expires: 1985-04-21
Abstract
No abstract record available.
Inventors
- 👤 Edward C Forcier
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 20:30
CPC Classifications
B; B41; B41F; B41F17/00; G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/06705; G01R1/073; G01R1/07307; G01R1/07342; G01R31/00; G01R31/28; G01R31/316; H; H10; H10P; H10P72/00; H10P72/06; H10P72/0611
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
138 words
A PROBING DEVICE USED FOR SUCCESSIVELY PROBING A PLURALITY OF DICE FORMED ON A SEMI-CONDUCTOR CRYSTAL WAFER, EACH DIE HAVING ONE OR MORE SELECTED PROBING AREAS, COMPRISING: A MEANS FOR HOLDING THE WAFER FOR TEST; PROBE MEANS FOR MAKING CONTACT WITH THE PROBE AREAS OF AN INDIVIDUAL DIE AND UPON CONTACT GENERATE A TEST SIGNAL COMMENSURATE WITH A CONDITION OF THE CONTACTED DIE; A MEANS FOR MOVING THE WAFER RELATIVE TO SAID PROBE MEANS FOR SUCCESSIVELY ALIGNING THE PROBING AREAS OF INDIVIDUAL DICE WITH SAID PROBE MEANS; AND A MARKING MEANS FOR RECORDING THE POSITION OF A DEFECTIVE DIE ON THE WAFER INCLUDING A SEPARATE IMPRESSION RECEIVING SURFACE SPACED FROM THE WAFER AND CONNECTED FOR MOVEMENT WITH SAID WAFER MOVING MEANS, AND AN IMPRESSION FORMING MEANS FOR FORMING IMPRESSIONS ON SAID SURFACE IN RESPONSE TO SAID TEST SIGNAL.
Claim 2
Dependent Claim
138 words
A PROBING DEVICE USED FOR SUCCESSIVELY PROBING A PLURALITY OF DICE FORMED ON A SEMI-CONDUCTOR CRYSTAL WAFER, EACH DIE HAVING ONE OR MORE SELECTED PROBING AREAS, COMPRISING: A MEANS FOR HOLDING THE WAFER FOR TEST; PROBE MEANS FOR MAKING CONTACT WITH THE PROBE AREAS OF AN INDIVIDUAL DIE AND UPON CONTACT GENERATE A TEST SIGNAL COMMENSURATE WITH A CONDITION OF THE CONTACTED DIE; A MEANS FOR MOVING THE WAFER RELATIVE TO SAID PROBE MEANS FOR SUCCESSIVELY ALIGNING THE PROBING AREAS OF INDIVIDUAL DICE WITH SAID PROBE MEANS; AND A MARKING MEANS FOR RECORDING THE POSITION OF A DEFECTIVE DIE ON THE WAFER INCLUDING A SEPARATE IMPRESSION RECEIVING SURFACE SPACED FROM THE WAFER AND CONNECTED FOR MOVEMENT WITH SAID WAFER MOVING MEANS, AND AN IMPRESSION FORMING MEANS FOR FORMING IMPRESSIONS ON SAID SURFACE IN RESPONSE TO SAID TEST SIGNAL.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1970-07-24 | 1971-01-23 | 1971-07-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1974-07-24 | 1975-01-23 | 1975-07-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1978-07-24 | 1979-01-23 | 1979-07-25 | $7700.00 | Window Closed / Lapsed |