Patent US3647447A successfully refreshed from Google Patents.
US3647447A
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US
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Dyed photoresist compositions
Assignee: Eastman Kodak Co
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Filing: 1969-03-03
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Granted: 1972-03-07
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Expires: 1989-03-03
Abstract
Abstract A photosensitive coating composition is described which comprises a photoinsolubilizable polymer, such as a cinnamic acid ester of a hydroxyl-containing polymer, and a dye which is insoluble in the developer solvent and which is essentially transparent to radiation of the wavelength to which the photoinsolubilizable polymer is sensitive. The photosensitive compositions are useful in preparing highly colored photoresists without a loss in photographic speed.
Inventors
- 👤 Richard E Gilson
- 👤 Frederick J Rauner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 10:47
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/105; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/114; Y10S430/116; Y10S430/127
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
12 words
A composition of claim 1 wherein the photosensitive polymer is polyvinyl cinnamate.
Claim 2
Dependent Claim
19 words
imagewise exposing the layer of photosensitive composition to actinic radiation to insolubilize the exposed areas of the layer and
Claim 3
Dependent Claim
32 words
developing a resist image by removing composition from the unexposed areas of the layer with an organic solvent therefor which is a nonsolvent for composition in the exposed areas of the layer.
Claim 4
Dependent Claim
14 words
A composition of claim 2 wherein the dye is Color Index Acid Blue 90.
Claim 5
Dependent Claim
121 words
A photosensitive element for use in the preparation of a photoresist image by a process which includes the step of development with an organic solvent, the element comprising a support bearing a layer of a composition comprising a. a photosensitive polymer obtained by the esterification of a hydroxyl-containing polymer with a cinnamic acid halide and b. a dye which is insoluble in the organic developer solvent and which is substantially transparent to radiation in the region of the spectrum to which the photosensitive polymer is sensitive, the dye being selected from the group consisting of Color Index Acid Blue 1, Color Index Acid Blue 90, Color Index Acid Green 22, Color Index Acid Green 2 and Color Index Direct Blue 162.
Claim 6
Dependent Claim
12 words
An element of claim 4 wherein the photosensitive polymer is polyvinyl cinnamate.
Claim 7
Dependent Claim
14 words
An element of claim 5 wherein the dye is Color Index Acid Blue 90.
Claim 8
Dependent Claim
12 words
A process for preparing a resist image which comprises the steps of
Claim 9
Dependent Claim
12 words
A process of claim 7 wherein the photosensitive polymer is polyvinyl cinnamate.
Claim 10
Dependent Claim
14 words
A process of claim 8 wherein the dye is Color Index Acid Blue 90.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-03-07 | 1975-09-06 | 1976-03-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-03-07 | 1979-09-06 | 1980-03-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-03-07 | 1983-09-06 | 1984-03-07 | $7700.00 | Window Closed / Lapsed |