Abstract A vacuum-actuated chuck is disclosed for a delicate ceramic package, such as those used for an integrated circuit, in which the package is held firmly in position while the package leads are electrically connected to the bonding pads on the integrated circuit or chip, without, however, distorting the leads extending from the package and without injuring or damaging the package. The chuck comprises a base member having a cavity including support pads for positioning the package and a space for receiving the package leads as well as an additional space for holding a support plate in position. A resilient mat which is impervious to air and which has a hole through the middle portion thereof, fits over the plate and the edge portions of the base member and the edge portions of the package. The hole in the mat exposes the inner ends of the package leads and the bonding pads on the chip so that work may be done thereon.
A vacuum chuck comprising a base member having a first cavity therein of the form to hold a portion of an object having a rim and on which work is to be done, said base member also including a passageway for applying vacuum to said cavity, there being a second cavity in said base member surrounding said first cavity for receiving laterally extending parts of said object that do not fit in said first cavity, a pressure plate having a hole therein which is large enough to clear another portion of said object and is positionaBle on said base member to cover at least a portion of said cavity, and a resilient mat of material which is impervious to air flow, having a hole therein which is smaller than the hole through said plate and positionable upon said plate with said hole approximately centrally located with respect to said first cavity, the inner portions of said mat being adapted to rest on a rim portion of said object.
Claim 2
Dependent Claim
168 words
A vacuum chuck comprising a base member having a first cavity therein of the form to hold a portion of an object having a rim and on which work is to be done, said base member also including a passageway for applying vacuum to said cavity, there being a second cavity in said base member surrounding said first cavity for receiving laterally extending parts of said object that do not fit in said first cavity, a pressure plate having a hole therein which is large enough to clear another portion of said object and is positionaBle on said base member to cover at least a portion of said cavity, and a resilient mat of material which is impervious to air flow, having a hole therein which is smaller than the hole through said plate and positionable upon said plate with said hole approximately centrally located with respect to said first cavity, the inner portions of said mat being adapted to rest on a rim portion of said object.
Claim 3
Dependent Claim
26 words
The invention of claim 1 in which three pads are provided at the bottom of said cavity, the tops of said pads being in a plane.
Claim 4
Dependent Claim
28 words
The invention of claim 2 in which a third cavity is provided in said base member and surrounding said second cavity and shaped to receive said pressure plate.
Claim 5
Dependent Claim
22 words
The invention of claim 1 in which said second cavity is greater in lateral extent and is shallower than said first cavity.