Patent US3603285A successfully refreshed from Google Patents.
US3603285A
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US
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Vapor deposition apparatus
Assignee: Massachusetts Institute of Technology
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Filing: 1968-11-05
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Granted: 1971-09-07
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Expires: 1988-11-05
Abstract
Abstract Vapor deposition means include at least two crucibles adapted to contain evaporant materials of different volatilities and which are disposed to each form a vapor stream of uniform density and incident upon a common substrate. A chimney member having an exit disposed in the immediate vicinity of the substrate but outside of the vapor stream of the less volatile material is attached to the crucible containing the material of greater volatility.
Inventors
- 👤 William S Nicol
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 16:58
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
35 words
The Apparatus of claim 1 wherein said tube is heated to a temperature below that of the more volatile element evaporation temperature and above that at which the element will condense on the tube walls.
Claim 2
Dependent Claim
22 words
Apparatus as recited in claim 1, wherein the exit of the tube has a diameter smaller than the dimensions of the substrate.
References Cited (Backward Citations)
US2768098A
Cited
US2767682A
Cited
GB766119A
Cited
US2945771A
Cited
GB813252A
Cited
US2938816A
Cited
US3446936A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-09-06 | 1975-03-08 | 1975-09-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-09-06 | 1979-03-08 | 1979-09-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-09-06 | 1983-03-08 | 1983-09-07 | $7700.00 | Window Closed / Lapsed |