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US3479269A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for sputter etching using a high frequency negative pulse train

Assignee: AT&T Inc
•
Filing: 1967-01-04
•
Granted: 1969-11-18
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Expires: 1987-01-04
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Abstract

No abstract record available.

Inventors

  • 👤 Peter A Byrnes Jr
  • 👤 Martin P Lepselter

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 21:32
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; B; B23; B23P; B23P9/00; C08; C08L; C08L25/00; H; H01; H01H; H01H11/00; H01H11/04

Claims Analysis

Total Claims: 0
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References Cited (Backward Citations)

US2163480A Cited
US3021271A Cited
US3282814A Cited
US3210263A Cited
US3271286A Cited
US3287243A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1972-11-17 1973-05-19 1973-11-18 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1976-11-17 1977-05-19 1977-11-18 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1980-11-17 1981-05-19 1981-11-18 $7700.00 Window Closed / Lapsed

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