Patent US3413157A successfully refreshed from Google Patents.
US3413157A
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Solid state epitaxial growth of silicon by migration from a silicon-aluminum alloy deposit
Assignee: International Business Machines Corp
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Filing: 1965-10-21
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Granted: 1968-11-26
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Expires: 1985-10-21
Abstract
No abstract record available.
Inventors
- 👤 Lubertus L Kuiper
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 19:40
CPC Classifications
H; H10; H10P; H10P95/00; C; C30; C30B; C30B1/00; C30B1/02; C30B19/00; C30B19/02; C30B29/00; C30B29/02; C30B29/06; H10D; H10D99/00; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/32; H10P14/3202; H10P14/3241; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; Y; Y10; Y10S; Y10S148/00; Y10S148/003; Y10S148/026; Y10S148/142; Y10S148/154; Y10S148/166; Y10S148/17
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
59 words
A METHOD OF GROWING A THIN, EPITAXIAL SILICON LAYER UPON A SILICON SUBSTRATE, SAID METHOD COMPRISING DEPOSITING AN ALLOY OF SILICON AND ALUMINUM UPON SAID SUBSTRATE, AND MAINTAINING SAID ALLOY AND SAID SUBSTRATE AT TEMPERATURE BELOW THE EUTECTIC TEMPERATURE OF THE ALLOY TO CAUSE THE GROWTH OF AN EPITAXIAL LAYER AT THE INTERFACE BETWEEN THE ALLOY AND SAID SUBSTRATE.
Claim 2
Independent Claim
59 words
A METHOD OF GROWING A THIN, EPITAXIAL SILICON LAYER UPON A SILICON SUBSTRATE, SAID METHOD COMPRISING DEPOSITING AN ALLOY OF SILICON AND ALUMINUM UPON SAID SUBSTRATE, AND MAINTAINING SAID ALLOY AND SAID SUBSTRATE AT TEMPERATURE BELOW THE EUTECTIC TEMPERATURE OF THE ALLOY TO CAUSE THE GROWTH OF AN EPITAXIAL LAYER AT THE INTERFACE BETWEEN THE ALLOY AND SAID SUBSTRATE.
References Cited (Backward Citations)
US2877147A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1971-11-26 | 1972-05-27 | 1972-11-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1975-11-26 | 1976-05-27 | 1976-11-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1979-11-26 | 1980-05-27 | 1980-11-26 | $7700.00 | Window Closed / Lapsed |