US3294600A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacture of semiconductor elements
Assignee: NEC Corp
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Filing: 1963-11-14
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Granted: 1966-12-27
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Expires: 1983-11-14
Abstract
No abstract record available.
Inventors
- 👤 Yokota Akira
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 01:42
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/60; H10D64/64; H10D1/00; H10D1/40; H10D48/00; H10D48/30; H10D48/38; H10D99/00; H10P; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/051; Y10S148/145
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
80 words
A METHOD FOR MAKING SEMICONDUCTOR ELEMENTS COMPRISING THE STEPS OF PROVIDING A PLURALITY OF MESA SHAPED PORTIONS ON ONE SIDE OF A WATER OF SEMICONDUCTOR MATERIAL, PROVIDING AN OXIDE FILM OF PREDETERMINED THICKNESS ON SAID SIDE OF SAID WATER SO THAT SAID FILM COVERS THE EXPOSED PORTIONS OF SAID SIDE, COATING A PHOTORESISTIVE EMULSION ON SAID SIDE OF SAID WATER SO THAT SAID EMULSION COVERS THE EXPOSED PORTIONS OF SAID SIDE EXCEPT FOR THE TOP SURFACES OF SAID MESA PORTIONS,
Claim 2
Independent Claim
80 words
A METHOD FOR MAKING SEMICONDUCTOR ELEMENTS COMPRISING THE STEPS OF PROVIDING A PLURALITY OF MESA SHAPED PORTIONS ON ONE SIDE OF A WATER OF SEMICONDUCTOR MATERIAL, PROVIDING AN OXIDE FILM OF PREDETERMINED THICKNESS ON SAID SIDE OF SAID WATER SO THAT SAID FILM COVERS THE EXPOSED PORTIONS OF SAID SIDE, COATING A PHOTORESISTIVE EMULSION ON SAID SIDE OF SAID WATER SO THAT SAID EMULSION COVERS THE EXPOSED PORTIONS OF SAID SIDE EXCEPT FOR THE TOP SURFACES OF SAID MESA PORTIONS,
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-12-26 | 1970-06-27 | 1970-12-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-12-26 | 1974-06-27 | 1974-12-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-12-26 | 1978-06-27 | 1978-12-27 | $7700.00 | Window Closed / Lapsed |