Patent US3243314A successfully refreshed from Google Patents.
US3243314A
Expired / Lapsed
US
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Silicon oxide film formation
Assignee: International Business Machines Corp
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Filing: 1962-09-14
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Granted: 1966-03-29
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Expires: 1982-09-14
Abstract
No abstract record available.
Inventors
- 👤 Herbert S Lehman
- 👤 William A Pliskin
- 👤 Jr Rudy L Ruggles
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 20:30
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/69215; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402; C23C8/00; C23C8/06; C23C8/08; C23C8/10; C23C8/16; H01; H01B; H01B1/00; H01B1/06; H01B1/08; H01B3/00; H01B3/02; H01B3/10; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/65; H10P14/6516; H10P14/6529; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; Y; Y10; Y10S; Y10S148/00; Y10S148/003; Y10S148/043; Y10S148/117; Y10S148/118; Y10S438/00; Y10S438/958
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
90 words
THE METHOD OF REDUCING MOISTURE AND COMTAMINANT SENSITIVE HYDROXYL GROUPS ON A PYNOLYTIC SILICON OXIDE FILM COMPRISING THE STEPS OF: EXPOSING THE FILM TO A CONTROLLED ATOMOSPHERE OF STEAM MAINTAINED AT A TEMPERATURE IN THE RANGE BETWEEN 800 TO 1000*C. FOR A PERIOD BETWEEN 5 TO 15 MINUTES TO REFORM SAID FILM AS A DENSER STRUCTURE; AND, THEREAFTER, HEATING SAID FILM IN A SECOND CONTROLLED ATMOSPHERE FREE OF WATER VAPOR, WHERE SAID SECOND CONTROLLED ATMOSPHERE IS MAINTGAINED AT A TEMPERATURE ABOVE 800*C. FOR A PERIOD OF AT LEAST 5 MINUTES.
Claim 2
Independent Claim
90 words
THE METHOD OF REDUCING MOISTURE AND COMTAMINANT SENSITIVE HYDROXYL GROUPS ON A PYNOLYTIC SILICON OXIDE FILM COMPRISING THE STEPS OF: EXPOSING THE FILM TO A CONTROLLED ATOMOSPHERE OF STEAM MAINTAINED AT A TEMPERATURE IN THE RANGE BETWEEN 800 TO 1000*C. FOR A PERIOD BETWEEN 5 TO 15 MINUTES TO REFORM SAID FILM AS A DENSER STRUCTURE; AND, THEREAFTER, HEATING SAID FILM IN A SECOND CONTROLLED ATMOSPHERE FREE OF WATER VAPOR, WHERE SAID SECOND CONTROLLED ATMOSPHERE IS MAINTGAINED AT A TEMPERATURE ABOVE 800*C. FOR A PERIOD OF AT LEAST 5 MINUTES.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-03-28 | 1969-09-27 | 1970-03-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-03-28 | 1973-09-27 | 1974-03-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-03-28 | 1977-09-27 | 1978-03-29 | $7700.00 | Window Closed / Lapsed |