US3242007A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Pyrolytic deposition of protective coatings of semiconductor surfaces
Assignee: Texas Instruments Inc
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Filing: 1961-11-15
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Granted: 1966-03-22
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Expires: 1981-11-15
Abstract
No abstract record available.
Inventors
- 👤 Arthur J Jensen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 07:17
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402; H; H10; H10W; H10W74/00; H10W74/40; H10W74/47; Y; Y10; Y10S; Y10S148/00; Y10S148/043
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
80 words
A METHOD OF COATING A SEMICONDUCTOR SLICE COMPRISING THE STEPS OF HEATING A SLICE IN THE PRESENCE OF AN INERT GAS TO A TEMPERATURE SUFFICIENT TO PYROLYTICALLY DECOMPOSE ARYLSILICATES, ALKYLSILICATES AND ALKYLALKOXYSILANES AT THE CARBON-OXYGEN BOND IN AN OTHERWISE INERT AMBIENT, SUBJECTING SAID SLICE AT SAID TEMPERATURE TO A FIRS VAPOR CONTAINING A COMPOUND SELECTED FROM THE GROUP CONSISTING OF ALKYLSILICATES, ARYLSILICATES AND MIXTURES THEREOF, AND THEN SUBJECTING SAID SLICE AT SAID TEMPERATURE TO A SECOND VAPOR CONTAINING AN ALKYLALKOXYSILANE.
Claim 2
Independent Claim
80 words
A METHOD OF COATING A SEMICONDUCTOR SLICE COMPRISING THE STEPS OF HEATING A SLICE IN THE PRESENCE OF AN INERT GAS TO A TEMPERATURE SUFFICIENT TO PYROLYTICALLY DECOMPOSE ARYLSILICATES, ALKYLSILICATES AND ALKYLALKOXYSILANES AT THE CARBON-OXYGEN BOND IN AN OTHERWISE INERT AMBIENT, SUBJECTING SAID SLICE AT SAID TEMPERATURE TO A FIRS VAPOR CONTAINING A COMPOUND SELECTED FROM THE GROUP CONSISTING OF ALKYLSILICATES, ARYLSILICATES AND MIXTURES THEREOF, AND THEN SUBJECTING SAID SLICE AT SAID TEMPERATURE TO A SECOND VAPOR CONTAINING AN ALKYLALKOXYSILANE.
References Cited (Backward Citations)
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US2913358A
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US3086892A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-03-21 | 1969-09-20 | 1970-03-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-03-21 | 1973-09-20 | 1974-03-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-03-21 | 1977-09-20 | 1978-03-22 | $7700.00 | Window Closed / Lapsed |