US2961354A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Surface treatment of semiconductive devices
Assignee: AT&T Inc
•
Filing: 1958-10-28
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Granted: 1960-11-22
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Expires: 1978-10-28
Abstract
No abstract record available.
Inventors
- 👤 Hugh M Cleveland
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 20:17
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/18; H10P70/12; H10P95/00; H10W; H10W74/00; H10W74/10; H10W74/131; Y; Y10; Y10S; Y10S134/00; Y10S134/902; Y10S438/00; Y10S438/906
Claims Analysis
Total Claims: 1
Claim 1
Independent Claim
60 words
THE PROCESS OF CLEANING BEFORE ENCAPSULATION A SEMICONDUCTIVE WAFER IN WHICH THERE HAS PREVIOUSLY BEEN FORMED RECTIFYING JUNCTIONS WHICH INCLUDES THE STEPS OF WASHING THE WAFER IN A WARM ULTRASONICALLY AGITATED AQUEOUS DETERGENT SOLUTION AND THEREAFTER MAINTAINING THE WAFER IN A WARM OXYGEN-OZONE ATMOSPHERE FOR A TIME SUFFICIENT TO OXIDIZE AT LEAST THE OUTER 50 ANGSTROMS OF THE WAFER SURFACE.
References Cited (Backward Citations)
US2633437A
Cited
US2899344A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1963-11-22 | 1964-05-23 | 1964-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1967-11-22 | 1968-05-23 | 1968-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1971-11-22 | 1972-05-23 | 1972-11-22 | $7700.00 | Window Closed / Lapsed |