US3194700A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Gas heating and cooling in the manufacture of semiconductor devices
Assignee: US Philips Corp
•
Filing: 1962-07-13
•
Granted: 1965-07-13
•
Expires: 1982-07-13
Abstract
No abstract record available.
Inventors
- 👤 Grimmeiss Hermann Georg
- 👤 Memming Rudiger
- 👤 Koelmans Hein
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 02:41
CPC Classifications
H; H10; H10P; H10P95/00; C; C30; C30B; C30B31/00; C30B31/06; C30B31/12; H10F; H10F99/00; Y; Y10; Y10S; Y10S438/00; Y10S438/935
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
164 words
A METHOD OF MAKING A SEMICONDUCTOR DEVICE COMPRISING PROVIDING A SEMICONDUCTIVE BODY IN SURROUNDINGS AT AN AMBIENT TEMPERATURE, PROVIDING A SOURCE OF GAS AND HEATING MEANS AND COOLING MEANS FOR THE GAS, SAID HEATING MEANS BEING MAINTAINED AT AN ELEVATED TEMPERATURE WELL ABOVE THE AMBIENT TEMPERATURE AND SAID COOLING MEANS BEING MAINTAINED BELOW THE AMBIENT TEMPERATURE, DIRECTING A STREAM OF GAS FROM THE SAID SOURCE THROUGH THE HEATING MANS AND THE RESULTANT GAS HEATED ABOVE THE AMBIENT TEMPERATURE ONTO A RESTRICTED PORTION OF THE SURFACE OF THE SEMICONDUCTIVE BODY IN THE PRESENCE OF AN ACTIVE IMPURITY TO DIFFUSE WITHOUT MELTING THE ACTIVE IMPURITY INTO THE HEATED RESTRICTED SURFACE PORTION ONLY OF THE BODY TO ALTER AN ELECTRICAL PROPERTY THEREOF, AND IMMEDIATELY THEREAFTER DIRECTING A STREAM OF GAS FROM THE SOURCE THROUGH THE COOLING MEANS AND THE RESULTANT GAS COOLED BELOW THE AMBIENT TEMPERATURE ONTO THE SAME SAID RESTRICTED SURFACE PORTION OF THE BODY TO RAPIDLY COOL SAME AND THUS PRESERVE THE ALTERED ELECTRICAL PROPERTY.
Claim 2
Independent Claim
164 words
A METHOD OF MAKING A SEMICONDUCTOR DEVICE COMPRISING PROVIDING A SEMICONDUCTIVE BODY IN SURROUNDINGS AT AN AMBIENT TEMPERATURE, PROVIDING A SOURCE OF GAS AND HEATING MEANS AND COOLING MEANS FOR THE GAS, SAID HEATING MEANS BEING MAINTAINED AT AN ELEVATED TEMPERATURE WELL ABOVE THE AMBIENT TEMPERATURE AND SAID COOLING MEANS BEING MAINTAINED BELOW THE AMBIENT TEMPERATURE, DIRECTING A STREAM OF GAS FROM THE SAID SOURCE THROUGH THE HEATING MANS AND THE RESULTANT GAS HEATED ABOVE THE AMBIENT TEMPERATURE ONTO A RESTRICTED PORTION OF THE SURFACE OF THE SEMICONDUCTIVE BODY IN THE PRESENCE OF AN ACTIVE IMPURITY TO DIFFUSE WITHOUT MELTING THE ACTIVE IMPURITY INTO THE HEATED RESTRICTED SURFACE PORTION ONLY OF THE BODY TO ALTER AN ELECTRICAL PROPERTY THEREOF, AND IMMEDIATELY THEREAFTER DIRECTING A STREAM OF GAS FROM THE SOURCE THROUGH THE COOLING MEANS AND THE RESULTANT GAS COOLED BELOW THE AMBIENT TEMPERATURE ONTO THE SAME SAID RESTRICTED SURFACE PORTION OF THE BODY TO RAPIDLY COOL SAME AND THUS PRESERVE THE ALTERED ELECTRICAL PROPERTY.
References Cited (Backward Citations)
US2849341A
Cited
US2816847A
Cited
US2859141A
Cited
US2820841A
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US2980560A
Cited
US3114663A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1968-07-12 | 1969-01-11 | 1969-07-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1972-07-12 | 1973-01-11 | 1973-07-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1976-07-12 | 1977-01-11 | 1977-07-13 | $7700.00 | Window Closed / Lapsed |