Patent US3088852A successfully refreshed from Google Patents.
US3088852A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Masking and fabrication technique
Assignee: Texas Instruments Inc
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Filing: 1959-10-20
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Granted: 1963-05-07
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Expires: 1979-10-20
Abstract
No abstract record available.
Inventors
- 👤 Cornelison Boyd
- 👤 Jr Elmer A Wolff
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 12:05
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/10; H05K3/12; H05K3/1241; E; E03; E03B; E03B3/00; E03B3/06; E03B3/08; E03B3/12; H10; H10P; H10P95/00; H05K2203/00; H05K2203/01; H05K2203/0104; H05K2203/0126; Y; Y02; Y02A; Y02A20/00; Y10; Y10S; Y10S148/00; Y10S148/068; Y10S148/106; Y10S438/00; Y10S438/942; Y10S438/943; Y10S438/945; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12528
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
156 words
IN THE FABRICATION OF A SEMICONDUCTTOR DEVICE, THE STEPS OF PLACING A THIN METAL MASK DEFINING AN OPENING IN INTIMATE CONTACT WITH A SURFACE OF A SEMICONDUCTOR BODY, SAID MASK CHARACTERIZED BY A THICKNESS WHICH IS SMALL RELATIVE TO THE THICKNESS OF THE BODY AND BY A THIN CARBON FILM, HAVING A THICKNESS MUCH LESS THAN THAT OF SAID MASK LYING BETWEEN THE MAIN PORTION OF SAID MASK AND SAID BODY TO PREVENT BONDING AND ALLOYING THEREBETWEEN, HEATING SAID MASK AND SAID SEMICONDUCTOR BODY TO AN ELEVATED TEMPERATURE, DEPOSITING CONYACT METERIAL ONTO THE AREA OF THE SURFACE OF THE SEMICONDUCTOR BODY EXPOSED BY SAID OPENING IN SAID MASK WHILE MAINTAINING SAID SEMICONDUCTOR BODY AT SAID ELEVATED TEMPERATURE SO THAT THE CONTACT MATERIAL WILL ALLOY THEREWITH, MOVING SAID MASK RELATIVE TO SAID SEMICONDUCTOR BODY, EXPOSING A NEW AREA OF SAID BODY TO SAID OPENING AND DEPOSITING CONTACT MATERIAL ONTO NEW AREA THROUGH SAID OPENING IN SAID MASK.
Claim 2
Dependent Claim
156 words
IN THE FABRICATION OF A SEMICONDUCTTOR DEVICE, THE STEPS OF PLACING A THIN METAL MASK DEFINING AN OPENING IN INTIMATE CONTACT WITH A SURFACE OF A SEMICONDUCTOR BODY, SAID MASK CHARACTERIZED BY A THICKNESS WHICH IS SMALL RELATIVE TO THE THICKNESS OF THE BODY AND BY A THIN CARBON FILM, HAVING A THICKNESS MUCH LESS THAN THAT OF SAID MASK LYING BETWEEN THE MAIN PORTION OF SAID MASK AND SAID BODY TO PREVENT BONDING AND ALLOYING THEREBETWEEN, HEATING SAID MASK AND SAID SEMICONDUCTOR BODY TO AN ELEVATED TEMPERATURE, DEPOSITING CONYACT METERIAL ONTO THE AREA OF THE SURFACE OF THE SEMICONDUCTOR BODY EXPOSED BY SAID OPENING IN SAID MASK WHILE MAINTAINING SAID SEMICONDUCTOR BODY AT SAID ELEVATED TEMPERATURE SO THAT THE CONTACT MATERIAL WILL ALLOY THEREWITH, MOVING SAID MASK RELATIVE TO SAID SEMICONDUCTOR BODY, EXPOSING A NEW AREA OF SAID BODY TO SAID OPENING AND DEPOSITING CONTACT MATERIAL ONTO NEW AREA THROUGH SAID OPENING IN SAID MASK.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1966-05-06 | 1966-11-05 | 1967-05-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1970-05-06 | 1970-11-05 | 1971-05-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1974-05-06 | 1974-11-05 | 1975-05-07 | $7700.00 | Window Closed / Lapsed |