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US3088852A Expired / Lapsed US ⏱️ 0.0 years remaining

Masking and fabrication technique

Assignee: Texas Instruments Inc
•
Filing: 1959-10-20
•
Granted: 1963-05-07
•
Expires: 1979-10-20
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Abstract

No abstract record available.

Inventors

  • 👤 Cornelison Boyd
  • 👤 Jr Elmer A Wolff

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 08:08
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/10; H05K3/12; H05K3/1241; E; E03; E03B; E03B3/00; E03B3/06; E03B3/08; E03B3/12; H10; H10P; H10P95/00; H05K2203/00; H05K2203/01; H05K2203/0104; H05K2203/0126; Y; Y02; Y02A; Y02A20/00; Y10; Y10S; Y10S148/00; Y10S148/068; Y10S148/106; Y10S438/00; Y10S438/942; Y10S438/943; Y10S438/945; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12528

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 156 words
IN THE FABRICATION OF A SEMICONDUCTTOR DEVICE, THE STEPS OF PLACING A THIN METAL MASK DEFINING AN OPENING IN INTIMATE CONTACT WITH A SURFACE OF A SEMICONDUCTOR BODY, SAID MASK CHARACTERIZED BY A THICKNESS WHICH IS SMALL RELATIVE TO THE THICKNESS OF THE BODY AND BY A THIN CARBON FILM, HAVING A THICKNESS MUCH LESS THAN THAT OF SAID MASK LYING BETWEEN THE MAIN PORTION OF SAID MASK AND SAID BODY TO PREVENT BONDING AND ALLOYING THEREBETWEEN, HEATING SAID MASK AND SAID SEMICONDUCTOR BODY TO AN ELEVATED TEMPERATURE, DEPOSITING CONYACT METERIAL ONTO THE AREA OF THE SURFACE OF THE SEMICONDUCTOR BODY EXPOSED BY SAID OPENING IN SAID MASK WHILE MAINTAINING SAID SEMICONDUCTOR BODY AT SAID ELEVATED TEMPERATURE SO THAT THE CONTACT MATERIAL WILL ALLOY THEREWITH, MOVING SAID MASK RELATIVE TO SAID SEMICONDUCTOR BODY, EXPOSING A NEW AREA OF SAID BODY TO SAID OPENING AND DEPOSITING CONTACT MATERIAL ONTO NEW AREA THROUGH SAID OPENING IN SAID MASK.
Claim 2
Dependent Claim 156 words
IN THE FABRICATION OF A SEMICONDUCTTOR DEVICE, THE STEPS OF PLACING A THIN METAL MASK DEFINING AN OPENING IN INTIMATE CONTACT WITH A SURFACE OF A SEMICONDUCTOR BODY, SAID MASK CHARACTERIZED BY A THICKNESS WHICH IS SMALL RELATIVE TO THE THICKNESS OF THE BODY AND BY A THIN CARBON FILM, HAVING A THICKNESS MUCH LESS THAN THAT OF SAID MASK LYING BETWEEN THE MAIN PORTION OF SAID MASK AND SAID BODY TO PREVENT BONDING AND ALLOYING THEREBETWEEN, HEATING SAID MASK AND SAID SEMICONDUCTOR BODY TO AN ELEVATED TEMPERATURE, DEPOSITING CONYACT METERIAL ONTO THE AREA OF THE SURFACE OF THE SEMICONDUCTOR BODY EXPOSED BY SAID OPENING IN SAID MASK WHILE MAINTAINING SAID SEMICONDUCTOR BODY AT SAID ELEVATED TEMPERATURE SO THAT THE CONTACT MATERIAL WILL ALLOY THEREWITH, MOVING SAID MASK RELATIVE TO SAID SEMICONDUCTOR BODY, EXPOSING A NEW AREA OF SAID BODY TO SAID OPENING AND DEPOSITING CONTACT MATERIAL ONTO NEW AREA THROUGH SAID OPENING IN SAID MASK.

References Cited (Backward Citations)

US2137831A Cited
US2560594A Cited
US2666814A Cited
US2962396A Cited
US2842466A Cited
US2879188A Cited
US2858246A Cited
US2969296A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1966-05-06 1966-11-05 1967-05-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1970-05-06 1970-11-05 1971-05-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1974-05-06 1974-11-05 1975-05-07 $7700.00 Window Closed / Lapsed

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