Semiconductor processor

Abstract

Abstract PURPOSE:To prevent the attachment and deposit of reacted product ono a transmission window for ultraviolet rays by providing a means of cooling the window. CONSTITUTION:One end of a cooling gas introduction pipe 12 is connected to a cooling device 23, and the other end i.e. a cooling gas supply port 12a is placed at the outer peripheral end of said window made of glass 5b. Besides, one end of a cooling gas exhaust pipe 13 is connected to a cooling gas absorbing device 22, and the outer end i.e. a cooling gas inhalant 13a is placed at the outer peripheral end of the window 5b. In this semiconductor processor, at the same time that the supply and exhaust of reaction gas, the precipitation of reacted product on a wafer 1 and the like are performed, a cooling gas supplying device 21 emits cooling gas from the supply port 12a. This cooling gas is sucked into the inhalant 13a after flowing along the surface of the window 5b along the cooling gas flow line 16. Thereby, the window 5b is cooled by the cooling gas, resulting in the prevention of the attachment and deposit of reacted product onto the window 5b; accordingly a thin film can be vapor deposited on the surface of the wafer 1 with good efficiency.

Inventors

• 👤 Masaki Kusuhara
• 👤 楠原　晶樹

Bibliographic Details