Patent JPS5947732A successfully refreshed from Google Patents.
JPS5947732A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
semiconductor manufacturing equipment
Assignee: Hitachi Ltd
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Filing: 1982-09-10
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Granted: —
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Expires: 2002-09-10
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Ryoji Fukuyama
- 👤 良次 福山
- 👤 Norio Nakazato
- 👤 仲里 則男
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-03 16:58
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/3244
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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