Patent JPS5874071A successfully refreshed from Google Patents.
JPS5874071A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
semiconductor equipment
Assignee: Hitachi Ltd
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Filing: 1982-10-08
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Granted: —
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Expires: 2002-10-08
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Osamu Minato
- 👤 湊 修
- 👤 Seiji Kubo
- 👤 征治 久保
- 👤 Toshiaki Masuhara
- 👤 増原 利明
- 👤 Masanori Kaneko
- 👤 正紀 金子
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-01 21:16
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/30
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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