EP0586149A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Hermetic protection for integrated circuits, based on a ceramic layer
Assignee: Dow Silicones Corp
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Filing: 1993-08-19
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Granted: —
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Expires: 2013-08-19
Abstract
Abstract This invention relates to integrated circuits which are protected from the environment. Such circuits are hermetically sealed by applying additional ceramic layers to the primary passivation.
Inventors
- 👤 Grish Chandra
- 👤 Keith Winton Michael
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 04:29
CPC Classifications
H; H10; H10W; H10W42/00; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6342; H10P14/69; H10P14/6903; H10W74/00; H10W74/40; H10W74/43
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
62 words
An integrated circuit having a primary passivation and one or more open bond pads, said circuit characterized by: a ceramic layer covering the primary passivation, wherein the ceramic layer comprises a silicon-containing ceramic material which is deposited by a process comprising (A) coating the circuit with a composition comprising a preceramic silicon-containing material followed by (B) converting said material to a ceramic.
Claim 2
Dependent Claim
32 words
The integrated circuit of claim 1 wherein the ceramic layer is selected from the group consisting of silicon oxides, silicon nitride, silicon oxynitride, silicon oxycarbide, silicon carbonitride, silicon oxycarbonitride and silicon carbide.
Claim 3
Dependent Claim
15 words
The integrated circuit of claim 1 wherein the preceramic silicon-containing material is hydrogen silsesquioxane resin.
Claim 4
Dependent Claim
45 words
The integrated circuit of claim 1 wherein the preceramic silicon-containing material is a hydrolyzed, partially hydrolyzed or their combinations of a formula R n Si(OR) 4-n , in which R is an aliphatic, alicyclic or aromatic substituent of 1-20 carbon atoms and n is 0-3.
Claim 5
Dependent Claim
22 words
The integrated circuit of claim 1 which has been interconnected and embedded within a material selected from organic encapsulants and silicone encapsulants.
Claim 6
Dependent Claim
18 words
The integrated circuit of claim 1 in which the ceramic layer is opaque to ultraviolet and visible light.
Claim 7
Independent Claim
75 words
A method for hermetically sealing an integrated circuit having a primary passivation and one or more open bond pads, the method comprising: (A) applying a silicon-containing ceramic layer to the integrated circuit by a process which comprises (i) coating the circuit with a composition comprising a preceramic silicon-containing material followed by (ii) converting said material to the silicon-containing ceramic; and (B) removing at least a portion of the silicon-containing ceramic layer covering the bond pads.
Claim 8
Dependent Claim
84 words
An integrated circuit comprising: (A) a circuit subassembly having bond pads; (B) a primary passivation layer on the surface of the subassembly around the bond pads; and (C) one or more ceramic layers covering the primary passivation layer; characterized by one or more of the ceramic layers comprising a silicon-containing ceramic material which is deposited by a process comprising coating at least the primary passivation layer with a composition comprising a preceramic silicon-containing material followed by converting the preceramic material to a ceramic layer.
References Cited (Backward Citations)
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