EP0498604A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Semiconductor device having a teos based spin-on-glass and process for making the same
Assignee: Motorola Solutions Inc
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Filing: 1992-02-03
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Granted: —
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Expires: 2012-02-03
Abstract
Abstract In one form, a TEOS based spin-on-glass is made having on the order of 10% to 25% by volume of tetraethylorthosilicate, the equivalent of on the order of 0.1% to 3.0% by volume of 70% concentrated nitric acid, on the order of 60% to 90% by volume of alcohol, and the balance water. The spin-on-glass is applied to a semiconductor substrate and heated in order to densify the spin-on-glass.
Inventors
- 👤 Papu D. Maniar
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 08:54
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6342; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10W; H10W20/00; H10W20/40; H10W20/45; H10W20/48; H10W74/00; H10W74/10; H10W74/131; H10W74/137; H10P14/65; H10P14/6516; H10P14/6518; H10P14/6524; H10P14/6529; H10P14/6532; H10P14/69215; H10P14/6923; H10P14/6927
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
86 words
A process for making a semiconductor device comprising the steps of: providing a spin-on-glass having the composition of: a) on the order of 10% to 25% by volume of tetraethylorthosilicate; b) on the order of 0.1% to 3.0% by volume of the equivalent of 70% nitric acid; c) on the order of 60% to 90% by volume of alcohol; and d) balance water; providing a semiconductor substrate; coating the semiconductor substrate with the spin-on-glass; and heating the coated semiconductor substrate in order to densify the spin-on-glass.
Claim 2
Dependent Claim
66 words
A semiconductor device comprising: a semiconductor substrate; and a spin-on-glass coating overlying the semiconductor substrate, the spin-on-glass having the composition of: a) on the order of 10% to 25% by volume of tetraethylorthosilicate; b) on the order of 0.1% to 3.0% by volume of the equivalent of 70% nitric acid; c) on the order of 60% to 90% by volume of alcohol; and d) balance water.
Claim 3
Dependent Claim
63 words
The process of claim 1 or the device of claim 2 wherein the spin-on-glass has the composition of: a) on the order of 15 to 22% by volume of tetraethylorthosilicate; b) on the order of 0.2% to 1.3% by volume of the equivalent of 70% nitric acid; c) on the order of 70% to 90% by volume of alcohol; and d) balance water.
Claim 4
Dependent Claim
64 words
The process of claim 1 or the device of claim 2 wherein the spin-on-glass has the composition of: a) on the order of 15% to 22% by volume of tetraethylorthosilicate; b) on the order of 0.2% to 1.3% by volume of the equivalent of 70% nitric acid; c) on the order of 70% to 90% by volume of isopropyl alcohol; and d) balance water.
Claim 5
Dependent Claim
64 words
The process of claim 1 or the device of claim 2 wherein the spin-on-glass has the composition of: a) on the order of 16.8% to 19.0% by volume of tetraethylorthosilicate; b) on the order of 0.4% to 1.1% by volume of the equivalent of 70% nitric acid; c) on the order of 74.5% to 81.5% by volume of isopropyl alcohol; and d) balance water.
Claim 6
Dependent Claim
98 words
A process for forming a tetraethylorthosilicate (TEOS) based spin-on-glass comprising the steps of: diluting concentrated nitric acid with on the order of 6% to 10% by volume of de-ionized water and with on the order of 85% to 95% by volume of alcohol to form a dilute nitric acid solution; diluting tetraethylorthosilicate (TEOS) with on the order of 65% to 75% by volume of alcohol to form a dilute TEOS solution; and adding the dilute nitric acid solution to the dilute TEOS solution in a ratio of on the order of 1:1 to 1:2 to form a spin-on-glass.
Claim 7
Dependent Claim
31 words
The process of claim 6 wherein the step of diluting concentrated nitric acid comprises diluting concentrated nitric acid with on the order of 85% to 95% by volume of isopropyl alcohol.
Claim 8
Dependent Claim
29 words
The process of claim 6 wherein the step of diluting tetraethylorthosilicate (TEOS) comprises diluting tetraethylorthosilicate (TEOS) with on the order of 65% to 75% by volume of isopropyl alcohol.
Claim 9
Dependent Claim
21 words
The process of claim 6 wherein the step of diluting concentrated nitric acid comprises diluting the equivalent of 70% nitric acid.
References Cited (Backward Citations)
GB2062962A
Cited
EP0130801A1
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EP0206717A2
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EP0206937A2
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EP0280085A1
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EP0313095A2
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