Patent EP0486966A1 successfully refreshed from Google Patents.
EP0486966A1
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EP
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Electrostatic chuck
Assignee: Toshiba Corp
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Filing: 1991-11-15
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Granted: —
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Expires: 2011-11-15
Abstract
Abstract An electrostatic chuck for electrostatically holding a wafer (1) is provided in a vacuum chamber (10) formed in a magnetron plasma etching apparatus. The electrostatic chuck has a base member (21), a first insulating layer (41) provided on the base member and made of polyimide, a second insulation layer (42) made of AℓN, a conductive sheet (44) provided between first and second insulation layers (41, 42), and an adhesive layer (43) made of a thermosetting resin and adhering the first insulating layer (41) to the second insulating layer (42). The wafer is placed on the second insulating layer (42), and power is supplied from a high voltage power supply (24) to the conductive sheet (44) via a feeding sheet (22), thereby creating static electricity and hence a coulombic force for holding the wafer (1) on the second insulating layer (42).
Inventors
- 👤 Toshihisa Nozawa
- 👤 Junichi Arami
- 👤 Shinji Kubota
- 👤 Isahiro Hasegawa
- 👤 Katsuya Okumura
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 18:53
CPC Classifications
H; H02; H02N; H02N13/00; H10; H10P; H10P95/00; H10P72/00; H10P72/70; H10P72/72; H10P72/722; Y; Y10; Y10T; Y10T279/00; Y10T279/23
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
131 words
An electrostatic chuck for holding an object with the use of a coulombic force, comprising: a base member (21); a first insulating layer (41) formed on the base member (21); a second insulating (42) layer made of an inorganic dielectric material; an electrode (44, 45) provided between the first and second insulating layers (41, 42) or in the first insulating layer (41); and an adhesive layer (43) made of an organic material and adhering the first insulating layer (41) to the second insulating layer (42); wherein the object (1) is placed on the second insulating layer (42), and a voltage is applied between the object (1) and the electrode (44, 45), thereby creating static electricity and hence a coulombic force for holding the object (1) on the second insulating layer (42).
Claim 2
Dependent Claim
21 words
The electrostatic chuck according to claim 1, characterized in that the second insulating layer (42) is formed of a sintered body.
Claim 3
Dependent Claim
19 words
The electrostatic chuck according to claim 2, characterized in that the second insulating layer (42) is made of AℓN.
Claim 4
Dependent Claim
19 words
The electrostatic chuck according to claim 1, characterized in that the second insulating layer (42) is a thin film.
Claim 5
Dependent Claim
23 words
The electrostatic chuck according to claim 1, characterized in that the second insulating layer (42) has a crystal body or a glass body.
Claim 6
Dependent Claim
21 words
The electrostatic chuck according to claim 1, characterized in that the first insulating layer (41) is made of an organic material.
Claim 7
Dependent Claim
19 words
The electrostatic chuck according to claim 6, characterized in that the first insulating layer (41) is made of polyimide.
Claim 8
Dependent Claim
20 words
The electrostatic chuck according to claim 1, characterized in that the adhesive layer (43) is made of a thermosetting resin.
Claim 9
Dependent Claim
20 words
The electrostatic chuck according to claim 1, characterized in that the electrode (44) is provided in the adhesive layer (43).
Claim 10
Dependent Claim
25 words
The electrostatic chuck according to claim 1, characterized in that the electrode (45) is formed on the lower surface of the second insulating layer (42).
Claim 11
Dependent Claim
25 words
The electrostatic chuck according to claim 1, characterized in that the electrode (45) is formed on the upper surface of the first insulating layer (41).
Claim 12
Dependent Claim
187 words
An electrostatic chuck device for holding an object (1) with the use of a coulombic force, comprising: a base member (21); an electrostatic holding sheet (22) provided on the base member (21), and comprising a first insulating layer (41) formed on the base member side, a second insulating layer (42) made of an inorganic dielectric material and formed on the object side, an electrode (44, 45) provided between the first and second insulating layers (41, 42) or in the first insulating layer (41), and an adhesive layer (43) made of an organic material and adhering the first insulating layer (41) to the second insulating layer (42); power supply means (24) for applying a voltage between the electrode (44, 45) and the object (1); and feeding means (23) for feeding power from the power supply means (24) to the electrode (44, 45); wherein the object (1) is placed on the second insulating layer (42), and a voltage is applied between the object (1) and the electrode (44, 45), thereby creating static electricity and hence a coulombic force for holding the object (1) on the second insulating layer (42).
Claim 13
Dependent Claim
60 words
The electrostatic chuck device according to claim 12, characterized in that the electrostatic holding sheet (22) has a gas inlet (6) extending from the upper surface of the electrostatic holding sheet (22) to the lower surface thereof, and a gas for transferring heat is guided between the object (1) and the electrostatic holding sheet (22) through the gas inlet (6).
References Cited (Backward Citations)
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