Process and apparatus for obtaining a diamondlayer

Abstract

Abstract The invention relates to a process and an installation for depositing a diamond layer on a workpiece, for example a drawing die or a punch tool, in which a reactive, plasma-aided coating process is used. According to the invention, the plasma is generated by means of a direct-voltage arc discharge, a current of charged particles additionally being introduced into the discharge path; the workpiece to be coated is placed, according to the invention, in the discharge path. The design according to the invention makes it possible to use a relatively long discharge path, with the result that even large surface areas can be coated; the coating takes place in an area of very high plasma homogeneity and density. The invention provides a process which can be cheaply and reliably controlled and which is suitable even for large-area coatings.

Inventors

• 👤 Johann Dr. Karner
• 👤 Erich Dr. Bergmann
• 👤 Helmut Daxinger

Bibliographic Details