Patent EP0283095A1 successfully refreshed from Google Patents.
EP0283095A1
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Method and arrangement for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating device
Assignee: Hauzer Holding BV
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Filing: 1988-03-15
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Granted: —
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Expires: 2008-03-15
Abstract
Abstract Method and device for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating device. To prevent grooves to occur on the cathode surface means are provided to add a further movement to the circular base movement of the magnetic field generating device by which substantially the whole surface area to be consumed is scanned by the arc spot.
Inventors
- 👤 Hans Veltrop
- 👤 Harald Wesemeyer
- 👤 Boudewijn Johannes Athanasius Maria Buil
- 👤 Simon Boelens
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 07:11
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; C23C14/325
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
34 words
Method for mechanically moving a magnetic field generating device along a path near a cathode plate, said movement comprising a base rotation, characterized in that to said base rotation a further movement is added.
Claim 2
Dependent Claim
34 words
Method for mechanically moving a magnetic field generating device along a path near a cathode plate, said movement comprising a base rotation, characterized in that to said base rotation a further movement is added.
Claim 3
Dependent Claim
25 words
Method according to claim 1, wherein said further movement comprises a further rotational movement having an amplitude being smaller than that of said base rotation.
Claim 4
Dependent Claim
30 words
Method according to claim 1, wherein said further movement comprises a movement lineary changing the amplitude of the base rotation, in such a way that a spiral-like movement is obtained.
Claim 5
Dependent Claim
26 words
Method according to claim 3, wherein the radius vector on the spiral is substantially proportional with the square root of the angle of the radius vector.
Claim 6
Dependent Claim
35 words
Method according to claim 3 or 4, wherein said spiral satisfies ρ = a φ 1/x in which 2 ≦ x ≦ 2,5 ρ and φ being polycoordinates and φ being a function of time.
Claim 7
Dependent Claim
34 words
Method according to one of the claims 3-5, wherein the rate of the movement of the magnetic field near the centre of the spiral is larger than at the outer end of said spiral.
Claim 8
Dependent Claim
23 words
Method according to claim 6, characterized in that the rate of the movement is determined according to the amplitude of a goniometric function.
Claim 9
Dependent Claim
36 words
Method according to one of the preceding claims, wherein the perpendicular component of the magnetic field describes a further periodically movement substantially perpendicular on the surface, by which the shape of the arc traject is changed.
Claim 10
Dependent Claim
19 words
Method according to claim 5 or 6, wherein the rate of movement is determined by a higher order function.
Claim 11
Dependent Claim
16 words
Method according to one of the preceding claims, wherein the magnetic field rotates around its axis.
Claim 12
Dependent Claim
67 words
Arrangement for carrying out one of the preceding claims in combination with claim 2, comprising a magnetic field generating device moveable with regard to a cathode plate of a cathode arc evaporizing device, arranged excentrically with regard to the axis of a gear, being able to carry out said further rotation, said gear being engageable with a gear ring, being able to carry out the base rotation.
Claim 13
Dependent Claim
11 words
Arrangement according to claim 11, wherein said gears are independable drivable.
Claim 14
Dependent Claim
17 words
Arrangement according to claim 11 or 12 comprising microprocessor means for controlling the drive of the gears.
Claim 15
Dependent Claim
51 words
Arrangement for carrying out the method according to one of the claims 3-8 comprising a base plate having a spiral-like groove and a support member being rotatable with respect to the base plate having pin means being slidable engageable in said groove and being connected with the magnetic field generating device.
Claim 16
Dependent Claim
24 words
Device according to claim 14, wherein the base plate is rotatably in a direction opposite to the direction of movement of said support member.
Claim 17
Dependent Claim
34 words
Arrangement for carrying out the method according to one of the preceding claims, possible in combination with claims 14 or 15, wherein the magnetic field generating device comprises electromagnetic coils and a control circuitry.
Claim 18
Dependent Claim
11 words
Arrangement according to claim 16 wherein said coils can be modulated.
Claim 19
Dependent Claim
16 words
Arrangement according to claims 16 or 17, wherein said control circuitry is embodied in a microprocessor.
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