Patent US2767675A successfully refreshed from Google Patents.
Patent EP0260534A1 successfully refreshed from Google Patents.
EP0260534A1
Expired / Lapsed
EP
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Metallorganic compounds
Assignee: Merck Patent GmbH
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Filing: 1987-09-03
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Granted: —
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Expires: 2007-09-03
Abstract
Abstract Translated from German Die Erfindung betrifft die Verwendung von intramolekular stabilisierten metallorganischen Verbindungen zur Herstellung dünner Filme und epitaktischer Schichten durch Gasphasenabscheidung. The invention relates to the use of intramolecularly stabilized organometallic compounds for the production of thin films and epitaxial layers by vapor deposition.
Inventors
- 👤 Dietrich Dr. Erdmann
- 👤 Max Emanuel Dr. Van Ghemen
- 👤 Ludwig Dr. Pohl
- 👤 Herbert Prof. Dr. Schumann
- 👤 Uwe Hartmann
- 👤 Wilfried Wassermann
- 👤 Meino Dr. Heyen
- 👤 Holger Dr. Jürgensen
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 13:29
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C30; C30B; C30B25/00; C30B25/02; C07; C07F; C07F5/00; C23C16/00; C23C16/06; C23C16/18; C30B29/00; C30B29/02; C30B29/10; C30B29/40
Claims Analysis
Total Claims: 0
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