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A method for the formation of a diffraction grating

Assignee: Sharp Corp
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Filing: 1985-12-23
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Granted: —
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Expires: 2005-12-23
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Abstract

Abstract A method for the formation of a diffraction grating on a substrate using a holographic technique and an etching technique, wherein the periodicity of the pattern of the diffraction grating is changed at will by a change of the light-path length of one of the two light fluxes from a holographic exposing system.

Inventors

  • 👤 Toshihiko Yoshida
  • 👤 Harushisa Takiguchi
  • 👤 Shinji Kaneiwa
  • 👤 Sadayoshi Matsui

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-30 15:13
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/10; H01S5/12; G; G02; G02B; G02B5/00; G02B5/18; G02B5/1847; G02B5/1857; G02B5/32; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/124; H01S5/124; Y; Y10; Y10S; Y10S359/00; Y10S359/90

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 53 words
A method for the formation of a diffraction grating on a substrate using a holographic technique and an etching technique, wherein the periodicity of the pattern of the diffraction grating is changed at will by a change of the light-path length of one of the two light fluxes from a holographic exposing system.
Claim 2
Independent Claim 53 words
A method for the formation of a diffraction grating on a substrate using a holographic technique and an etching technique, wherein the periodicity of the pattern of the diffraction grating is changed at will by a change of the light-path length of one of the two light fluxes from a holographic exposing system.
Claim 3
Dependent Claim 45 words
A method for the formation of a diffraction grating according to claim 1, wherein the change of the light-path length of one of the two light fluxes from the holographic exposing system is.achieved by passing said light flux through a transparent board of uneven thickness.
Claim 4
Dependent Claim 46 words
A method for the formation of a diffraction grating according to claim 2, wherein the difference Ad in thickness between the thicker portion and the thinner portion of said transparent board has the following relationship to the wavelength of the light passing through said transparent board:
Claim 5
Dependent Claim 36 words
A method for the formation of a diffraction grating according to claim 3, wherein the width of the thicker portion of said transparent board is equal to that of the thinner portion of said transparent board.
Claim 6
Dependent Claim 50 words
A method for the formation of a diffraction grating according to claim 4, wherein the width of both the thicker portion and the thinner portion of said transparent board is equal to the length of a semiconductor laser resonator which is obtained using the substrate having said diffraction grating thereon.

References Cited (Backward Citations)

DE1094484B Cited
US4402571A Cited

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