EP0109718A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Displacement device, particularly for the photolithographic treatment of a substrate
Assignee: Koninklijke Philips NV
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Filing: 1983-11-15
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Granted: —
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Expires: 2003-11-15
Abstract
Abstract A displacement device, which is particularly suitable for use in an apparatus for the photolithographic treatment of a substrate, is provided with a holder which is placed on a carriage mechanism which is acted upon by driving members for imparting translational movements and a rotary movement to the holder. The carriage is constituted by a lower and an upper carriage part, which carriage parts each have a flat surface, these surfaces facing each other. Three linear driving members act upon the carriage, which driving members each have a housing and a driving element which projects at both ends from the housing and which is axially movable with respect to the housing. The housing of the first driving member is connected to the upper carriage part, while the driving elements of the second and the third driving members are coupled to the lower carriage part and the driving elements of the first driving member are connected to the housing of the second and the third driving member, respectively, the driving members being arranged in the shape of an H.
Inventors
- 👤 Stefan Wittekoek
- 👤 Adrianus Gerardus Bouwer
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-01 03:39
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716; H; H10; H10P; H10P72/00
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
186 words
A displacement device, particularly for use in an apparatus for the photo-lithographic treatment of a substrate, which device is provided with a holder which is placed on a carriage mechanism which is acted upon by driving members for imparting translational movements and a rotary movement to the holder, characterized in that the carriage is constituted by a lower and an upper carriage part, which carriage parts each have a flat surface, these surfaces facing each other, and three linear driving members acting upon the carriage, which driving members each have a housing and a driving element which projects at both ends from the housing and which is axially movable with respect to the housing, in that the housing of the first driving member is connected to the upper carriage part, while the driving elements of the second and the third driving members are coupled to the lower carriage part, and in that the driving elements of the first driving member are connected to the housing of the second and of the third driving member, respectively, the driving members being arranged in the shape of an H.
Claim 2
Dependent Claim
186 words
A displacement device, particularly for use in an apparatus for the photo-lithographic treatment of a substrate, which device is provided with a holder which is placed on a carriage mechanism which is acted upon by driving members for imparting translational movements and a rotary movement to the holder, characterized in that the carriage is constituted by a lower and an upper carriage part, which carriage parts each have a flat surface, these surfaces facing each other, and three linear driving members acting upon the carriage, which driving members each have a housing and a driving element which projects at both ends from the housing and which is axially movable with respect to the housing, in that the housing of the first driving member is connected to the upper carriage part, while the driving elements of the second and the third driving members are coupled to the lower carriage part, and in that the driving elements of the first driving member are connected to the housing of the second and of the third driving member, respectively, the driving members being arranged in the shape of an H.
Claim 3
Dependent Claim
56 words
A device as claimed in Claim 1, characterized in that the linear driving members consist of hydraulic linear motors, in that the driving elements of the first driving member are pivotally secured to the housing of the second and the third driving member, respectively, and in that one of these driving elements comprises a slide shaft.
Claim 4
Dependent Claim
19 words
A device as claimed in Claim 1, characterized in that the linear driving members consist of linear electric motors.
Claim 5
Dependent Claim
88 words
A device as claimed in Claim 1, 2 or 3, characterized in that the upper carriage part is provided with restrictions which merge into the flat surface facing the lower carriage part, which restrictions join a source of excess pressure present in the lower carriage part for forming an aerostatic bearing between the two carriage parts, the upper carriage part comprising a chamber which adjoins the lower carriage part and which can be connected to subatmospheric pressure in order to obtain a preliminary stress of the aerostatic bearing.
Claim 6
Independent Claim
79 words
A device as claimed in any one of Claims 1 to 4, characterized in that two orthogonal mirror surfaces are present on the upper carriage part, which surfaces constitute two upright sides of a reference member, the adjustment of the position being effected by means of a control of the driving members derived from the measured position with the aid of a laser-interferometer assembly with reference to light beams emitted by the laser and reflected by the mirror surfaces.
Claim 7
Dependent Claim
78 words
A device as claimed in Claim 5, characterized in that the holder is located in a recess of the reference member with the mirror surfaces, the holder having a carrying surface for an article, which carrying surface substantially coincides in the direction of height of the mirror surfaces with the plane in which the light beams are located, by means of which the laser-interferometer assembly determines the position of the holder in co-operation with the two mirror surfaces.
References Cited (Backward Citations)
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