US3934949A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for reducing rotation components in table translation
Assignee: AT&T Inc
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Filing: 1975-04-16
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Granted: 1976-01-27
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Expires: 1995-04-16
Abstract
Abstract A table is reciprocated along a straight line by a force that does not precisely control movement direction. Accurate motion constraint is provided by two separated air bearings arranged along a common axis. A third air bearing, displaced from the common axis, supports the table on a sleeve that is free to rotate on its axis.
Inventors
- 👤 Kevin James Brady
- 👤 Victor Andrew Firtion
- 👤 Leif Rongved
- 👤 Thomas Edward Saunders
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 10:51
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
96 words
A method for translating a semiconductor wafer along a straight line with great precision comprising the steps of: determining the movement curvature a 1 of a first reciprocating air bearing; determining the movement curvature a 2 of a second reciprocating air bearing; fastening the first and second bearings to a table such that they lie along a common axis and such that the angle a 1 extends in the same direction as that of the angle a 2 ; supporting the table with a third air bearing; and applying a reciprocating translational force to the table.
Claim 2
Independent Claim
96 words
A method for translating a semiconductor wafer along a straight line with great precision comprising the steps of: determining the movement curvature a 1 of a first reciprocating air bearing; determining the movement curvature a 2 of a second reciprocating air bearing; fastening the first and second bearings to a table such that they lie along a common axis and such that the angle a 1 extends in the same direction as that of the angle a 2 ; supporting the table with a third air bearing; and applying a reciprocating translational force to the table.
Claim 3
Dependent Claim
49 words
The method of claim 1 wherein: the third air bearing lies on a second axis that is parallel to said common axis; and the step of fastening the first and second air bearings comprises the step of fastening said bearings such as to avoid any binding action during reciprocation.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-01-26 | 1979-07-28 | 1980-01-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-01-26 | 1983-07-28 | 1984-01-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-01-26 | 1987-07-28 | 1988-01-27 | $7700.00 | Window Closed / Lapsed |