US3969004A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Air bearing piston assembly for semiconductor mask-to-wafer aligner
Assignee: Applied Materials Inc
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Filing: 1974-08-02
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Granted: 1976-07-13
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Expires: 1994-08-02
Abstract
Abstract An air bearing piston assembly for semiconductor mask-to-wafer aligner which utilizes a plurality of air bearings to produce a very low friction and a very predictable force system for bringing a mask into contact and level with a semiconductor wafer. Two small driver pistons are employed to move a main piston. An outside air bearing between a rotation clamp ring and the main piston and an inside air bearing between a piston guide and the main piston produce an almost frictionless system. A third air bearing is established between a leveling ball and the ball table so that the wafer with the chunk can level accurately with a minimum of force against the mask.
Inventors
- 👤 Gerd Schliemann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 13:56
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; B; B28; B28D; B28D5/00; B28D5/0058; B28D5/0082; B28D5/0094; F; F16; F16C; F16C29/00; F16C29/02; F16C29/025; F16C32/00; F16C32/06; F16C32/0629; F16C32/064; F16C32/0644; F16C32/0662; F16C32/067; F16C7/00; F16C7/04; G01; G01D; G01D11/00; G01D11/30; G12; G12B; G12B5/00; H; H10; H10P; H10P72/00; H10P72/50; H10P72/57
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
103 words
In a semiconductor mask-to-wafer aligner, an air bearing piston assembly for raising a semiconductor wafer to a mask comprising: movable piston means; a ball table mounted on said piston means with a hemispherical leveling ball movably positioned in said ball table; means for establishing an air bearing between said ball and ball table; means for establishing either a vacuum or a pressure at the central portion of the flat surface of the hemispherical leveling ball; means for guiding said piston means; means for establishing an air bearing between said piston means and said piston guide means; and, means for moving said piston means.
Claim 2
Dependent Claim
103 words
In a semiconductor mask-to-wafer aligner, an air bearing piston assembly for raising a semiconductor wafer to a mask comprising: movable piston means; a ball table mounted on said piston means with a hemispherical leveling ball movably positioned in said ball table; means for establishing an air bearing between said ball and ball table; means for establishing either a vacuum or a pressure at the central portion of the flat surface of the hemispherical leveling ball; means for guiding said piston means; means for establishing an air bearing between said piston means and said piston guide means; and, means for moving said piston means.
Claim 3
Dependent Claim
24 words
The apparatus of claim 1 further comprising means for slowly and smoothly eliminating the air bearing between said levelling ball and said ball table.
Claim 4
Dependent Claim
29 words
The apparatus of claim 2 wherein said means for eliminating the air bearing between the levelling ball and the ball table includes means for establishing a vacuum there between.
Claim 5
Dependent Claim
15 words
The apparatus of claim 3 wherein said vacuum is established through a pneumatic delay means.
Claim 6
Dependent Claim
41 words
The apparatus of claim 3 further comprising means for moving said piston means while said air bearing is slowly and smoothly eliminated to bring said ball table into contact with the levelling ball when the air bearing there between is eliminated.
Claim 7
Dependent Claim
80 words
In a semiconductor mask-to-wafer aligner, an air bearing piston assembly for raising a semiconductor wafer to a mask comprising: movable piston means; means for guiding said piston means; means for establishing an air bearing between said piston means and said piston guide means; means for moving said piston means; and, engagable coupling means for coupling to the movable piston means, said coupling means being frictionless when disengaged and when engaged permits rotation of said piston means without X, Y translation.
Claim 8
Dependent Claim
80 words
In a semiconductor mask-to-wafer aligner, an air bearing piston assembly for raising a semiconductor wafer to a mask comprising: movable piston means; means for guiding said piston means; means for establishing an air bearing between said piston means and said piston guide means; means for moving said piston means; and, engagable coupling means for coupling to the movable piston means, said coupling means being frictionless when disengaged and when engaged permits rotation of said piston means without X, Y translation.
Claim 9
Dependent Claim
54 words
The apparatus of claim 6 wherein said movable piston means has a cylindrical portion and wherein said coupling means comprises a contractable ring positioned around but not touching the cylindrical portion of said piston means and means for contacting said ring sufficiently to clamp said ring to said cylindrical portion of the piston means.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-07-13 | 1980-01-12 | 1980-07-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-07-13 | 1984-01-12 | 1984-07-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-07-13 | 1988-01-12 | 1988-07-13 | $7700.00 | Window Closed / Lapsed |