EP0002105A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Process for increasing the solubility rate ratio of a positive-working resist
Assignee: International Business Machines Corp
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Filing: 1978-10-13
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Granted: —
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Expires: 1998-10-13
Abstract
Abstract This invention relates to a process for increasing solubility rate ratio or shortening the development time of quinone-diazo or quinone-triazo sensitized phenolic-aldehyde resins. In accordance with the present invention, the resists are contacted with a trialkylamine containing from two to eight carbon atoms in each alkyl group. This process increases the ratio between the rate at which the exposed region of the resist is dissolved and the rate at which the unexposed region is dissolved.
Inventors
- 👤 James Albert Carothers
- 👤 James Economy
- 👤 Augustus Ceniza Ouano
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-25 11:02
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/0226
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
38 words
A process for increasing the solubility rate ratio of a quinone-diazo or quinone-triazo sensitized phenolic-aldehyde resist, characterised in that the resist is contacted with a liquid trialkylamine containing from two to eight carbon atoms in each alkyl group.
Claim 2
Dependent Claim
38 words
A process for increasing the solubility rate ratio of a quinone-diazo or quinone-triazo sensitized phenolic-aldehyde resist, characterised in that the resist is contacted with a liquid trialkylamine containing from two to eight carbon atoms in each alkyl group.
Claim 3
Dependent Claim
12 words
A process as claimed in claim 1, wherein the amine is tributylamine.
Claim 4
Dependent Claim
12 words
A process as claimed in claim 1, wherein the amine is tripropylamine.
Claim 5
Dependent Claim
26 words
A process as claimed in any one of claims 1 to 3 wherein the resist is contacted with said liquid trialkylamine for 1 to 30 minutes.
Claim 6
Dependent Claim
27 words
A process as claimed in any one of the preceding claims, wherein the resist is contacted with said liquid trialkylamine after exposure of the resist to radiation.
Claim 7
Dependent Claim
23 words
A process as claimed in any one of the preceding claims, wherein the resist is contacted with the liquid trialkylamine under anhydrous conditions.
References Cited (Backward Citations)
GB1066366A
Cited
US3269837A
Cited
US3402044A
Cited
JPS50108002A
Cited
US3961100A
Cited
US3961101A
Cited
JPS5156226A
Cited
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