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DE2723902A1
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METHOD FOR ADJUSTING A SEMICONDUCTOR DISC RELATIVE TO A RADIATION MASK IN X-RAY PHOTOLITHOGRAPHY
Assignee: Siemens Corp
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Filing: 1977-05-26
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Granted: —
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Expires: 1997-05-26
Abstract
No abstract record available.
Inventors
- 👤 Eckart Dr Phil Hundt
Bibliographic Details
Application Number
—
Jurisdiction
DE
Data Source
google_patents
Last Synchronized
2026-11-02 15:29
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; Y; Y10; Y10S; Y10S438/00; Y10S438/975
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
DE2333902A1
Cited
US3928094A
Cited
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