DE2333902A1
Expired / Lapsed
DE
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METHOD OF ALIGNMENT OF MASKS FOR SOFT X-RAY RADIATION
Assignee: Massachusetts Institute of Technology
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Filing: 1973-06-29
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Granted: —
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Expires: 1993-06-29
Abstract
No abstract record available.
Inventors
- 👤 Henry Ignatius Smith
- 👤 David Lewis Spears
- 👤 Ernest Stern
Bibliographic Details
Application Number
—
Jurisdiction
DE
Data Source
google_patents
Last Synchronized
2026-11-09 07:39
CPC Classifications
H; H10; H10P; H10P95/00; G; G03; G03F; G03F9/00; G03F9/70; G03F9/7073; G03F9/7076; Y; Y10; Y10S; Y10S430/00; Y10S430/167; Y10S430/168
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References Cited (Backward Citations)
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