Patent WO1992016306A2 successfully refreshed from Google Patents.
WO1992016306A2
Expired / Lapsed
WO
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Manufacture of high precision electronic components with ultra-high purity liquids
Assignee: Startec Ventures Inc
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Filing: 1992-03-17
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Granted: —
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Expires: 2012-03-17
Abstract
Abstract Semiconductor wafers and other electronic parts which similarly riquire ultra-high purity manufacturing environments are treated with ultra-high purity liquid cleaning and etching agents prepared at the site of use from gaseous raw materials which have been purified to a level compatible with semiconductor manufacturing standards, combined when appropriate with ultra-pure water.
Inventors
- 👤 R. Scot Clark
- 👤 Stephen S. Baird
- 👤 Joe G. Hoffman
Bibliographic Details
Application Number
—
Jurisdiction
WO
Data Source
google_patents
Last Synchronized
2026-11-09 03:32
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0404; Y; Y10; Y10S; Y10S134/00; Y10S134/902
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