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US9923008B2
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US
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Wafer-level array cameras and methods for fabricating the same
Assignee: Omnivision Technologies Inc
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Filing: 2014-04-09
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Granted: 2018-03-20
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Expires: 2034-04-09
Abstract
Abstract A wafer-level array camera includes (i) an image sensor wafer including an image sensor array, (ii) a spacer disposed on the image sensor wafer, and (iii) a lens wafer disposed on the spacer, wherein the lens wafer includes a lens array. A method for fabricating a plurality of wafer-level array cameras includes (i) disposing a lens wafer, including a plurality of lens arrays, on an image sensor wafer, including a plurality of image sensor arrays, to form a composite wafer and (ii) dicing the composite wafer to form the plurality of wafer-level array cameras, wherein each of the plurality of wafer-level array cameras includes a respective one of the plurality of lens arrays and a respective one of the plurality of image sensor arrays.
Inventors
- 👤 Raymond Wu
- 👤 Robbert Emery
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 15:51
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/80; H10F39/806; H01L27/14625; H01L27/14618; H01L27/1469; H10F39/011; H10F39/018; H10F39/804; H01L2924/00; H01L2924/0002
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
145 words
A method for fabricating a plurality of wafer-level array cameras, comprising: disposing a lens wafer, including a plurality of lens arrays, on an image sensor wafer, including a plurality of image sensor arrays, to form a composite wafer; and dicing the composite wafer to form the wafer-level array cameras, each of the wafer-level array cameras comprising a respective one of the lens arrays and a respective one of the image sensor arrays; wherein all lenses of the lens arrays have same back focal length; wherein the step of dicing comprises dicing the composite wafer to produce wafer-level array cameras of different array sizes; and wherein the step of disposing a lens wafer comprises a single step of aligning the lens wafer with the image sensor wafer such that all lenses of the lens arrays are aligned with respective image sensors of the image sensor arrays.
Claim 2
Independent Claim
145 words
A method for fabricating a plurality of wafer-level array cameras, comprising: disposing a lens wafer, including a plurality of lens arrays, on an image sensor wafer, including a plurality of image sensor arrays, to form a composite wafer; and dicing the composite wafer to form the wafer-level array cameras, each of the wafer-level array cameras comprising a respective one of the lens arrays and a respective one of the image sensor arrays; wherein all lenses of the lens arrays have same back focal length; wherein the step of dicing comprises dicing the composite wafer to produce wafer-level array cameras of different array sizes; and wherein the step of disposing a lens wafer comprises a single step of aligning the lens wafer with the image sensor wafer such that all lenses of the lens arrays are aligned with respective image sensors of the image sensor arrays.
Claim 3
Dependent Claim
30 words
The method of claim 1 , the step of disposing a lens wafer comprising: disposing the lens wafer on a spacer; and disposing the spacer on the image sensor wafer.
Claim 4
Dependent Claim
33 words
The method of claim 2 , the step of dicing the composite wafer further comprising dicing the composite wafer along at least one dicing line that intersects a material portion of the spacer.
Claim 5
Dependent Claim
33 words
The method of claim 2 , the distance between the lens wafer and the image sensor wafer of the composite wafer, in a direction orthogonal to the image sensor wafer, being substantially uniform.
Claim 6
Dependent Claim
61 words
The method of claim 1 , further comprising forming the lens wafer by disposing a first lens sub-wafer, including a plurality of first lens arrays, on a second lens sub-wafer, including a plurality of second lens arrays, such that each lens of the first lens arrays and a respective lens of the second lens arrays together form a stacked lens system.
Claim 7
Dependent Claim
41 words
The method of claim 5 , all lenses of the second lens arrays having same back focal length, and the step of disposing a lens wafer comprising disposing the lens wafer with the second lens sub-wafer facing the image sensor wafer.
Claim 8
Dependent Claim
31 words
The method of claim 5 , lenses of at least one of the first lens arrays having back focal length different from lenses of other ones of the first lens arrays.
Claim 9
Dependent Claim
32 words
The method of claim 1 , further comprising forming the lens array by stacking a plurality of lens sub-wafers such that each lens of the lens arrays is a stacked lens system.
Claim 10
Dependent Claim
38 words
The method of claim 1 , the step of dicing the composite wafer further comprising dicing the composite wafer such that wafer-level array cameras of different array sizes are associated with different respective columns of the composite wafer.
Claim 11
Dependent Claim
114 words
The method of claim 1 , further comprising forming the lens wafer by disposing (a) a plurality of first lens sub-wafers each including a plurality of first lens arrays on (b) a second lens sub-wafer including a plurality of second lens arrays, such that each lens of the first lens arrays and a respective lens of the second lens array together form a two-layer stacked lens system and such that the first lens arrays cooperate with second lens arrays to form respective two-layer lens array stacks, each of the first lens arrays of one first lens sub-wafer being non-identical to each of the first lens arrays of at least one other first lens sub-wafer.
Claim 12
Dependent Claim
41 words
The method of claim 10 , all lenses of the second lens arrays having same back focal length, and the step of disposing a lens wafer comprising disposing the lens wafer with the second lens sub-wafer facing the image sensor wafer.
Claim 13
Dependent Claim
37 words
The method of claim 10 , wherein lenses of the first lens arrays of one first lens sub-wafer have focal length different from lenses of the first lens arrays of at least one other first lens sub-wafer.
Claim 14
Independent Claim
225 words
A method for fabricating a plurality of wafer-level array cameras, comprising: forming a lens wafer by disposing (a) a plurality of first lens sub-wafers including a plurality of first lens arrays on (b) a second lens sub-wafer including a plurality of second lens arrays, such that each lens of the first lens arrays and a respective lens of the second lens arrays together form a two-layer stacked lens system and such that the first lens arrays cooperate with second lens arrays to form respective two-layer lens array stacks, each two-layer stacked lens system having same back focal length; disposing the lens wafer on an image sensor wafer, including a plurality of image sensor arrays, to form a composite wafer; and dicing the composite wafer to form the plurality of wafer-level array cameras, each of the wafer-level array cameras comprising a respective one of the two-layer lens array stacks and a respective one of the image sensor arrays, at least one wafer-level array camera having first lens array non-identical to first lens array of another one wafer-level array camera; wherein the step of disposing a lens wafer comprises a single step of aligning the lens wafer with the image sensor wafer such that each two-layer stacked lens system of the two-layer lens array stacks is aligned with a respective image sensor of the image sensor arrays.
Claim 15
Independent Claim
225 words
A method for fabricating a plurality of wafer-level array cameras, comprising: forming a lens wafer by disposing (a) a plurality of first lens sub-wafers including a plurality of first lens arrays on (b) a second lens sub-wafer including a plurality of second lens arrays, such that each lens of the first lens arrays and a respective lens of the second lens arrays together form a two-layer stacked lens system and such that the first lens arrays cooperate with second lens arrays to form respective two-layer lens array stacks, each two-layer stacked lens system having same back focal length; disposing the lens wafer on an image sensor wafer, including a plurality of image sensor arrays, to form a composite wafer; and dicing the composite wafer to form the plurality of wafer-level array cameras, each of the wafer-level array cameras comprising a respective one of the two-layer lens array stacks and a respective one of the image sensor arrays, at least one wafer-level array camera having first lens array non-identical to first lens array of another one wafer-level array camera; wherein the step of disposing a lens wafer comprises a single step of aligning the lens wafer with the image sensor wafer such that each two-layer stacked lens system of the two-layer lens array stacks is aligned with a respective image sensor of the image sensor arrays.
Claim 16
Dependent Claim
40 words
The method of claim 13 , lenses of each of the first lens arrays of one first lens sub-wafer having focal length different from lenses of each of the first lens arrays of at least one other first lens sub-wafer.
Claim 17
Dependent Claim
43 words
The method of claim 13 , all lenses of the plurality of second lens arrays having same back focal length, and the step of disposing a lens wafer comprising disposing the lens wafer with the second lens sub-wafer facing the image sensor wafer.
Claim 18
Dependent Claim
31 words
The method of claim 13 , for each individual one of the first lens arrays, all lenses of the individual one of the first lens arrays being identical to each other.
Claim 19
Dependent Claim
30 words
The method of claim 13 , the step of disposing a lens wafer comprising: disposing the lens wafer on a spacer; and disposing the spacer on the image sensor wafer.
Claim 20
Dependent Claim
28 words
The method of claim 13 , the step of dicing the composite wafer further comprising dicing the composite wafer to produce wafer-level array cameras of different array sizes.
Claim 21
Dependent Claim
38 words
The method of claim 18 , the step of dicing the composite wafer further comprising dicing the composite wafer such that wafer-level array cameras of different array sizes are associated with different respective columns of the composite wafer.
Claim 22
Dependent Claim
16 words
The method of claim 13 , array size of all the image sensor arrays being identical.
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