Patent CH130177A successfully refreshed from Google Patents.
US8289635B2
Active / In Force
US
⏱️ 2.1 years remaining
Wafer stack, integrated optical device and method for fabricating the same
Assignee: Heptagon Photonics Pte Ltd
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Filing: 2008-12-16
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Granted: 2012-10-16
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Expires: 2028-12-16
Abstract
Abstract In a method for fabricating an integrated optical device by creating a wafer stack by stacking at least a top wafer carrying as functional elements a plurality of lenses on at least one further wafer including further functional elements, and separating the wafer stack into a plurality of integrated optical devices, wherein corresponding functional elements of the top and further wafer are aligned with each other and define a plurality of main optical axes, a method for providing a sunshade plate as part of an integrated optical device ( 10 ), including the steps of: providing a sunshade plate having a plurality of through holes, the through holes being arranged to correspond to the arrangement of the functional elements on the top wafer; and stacking the sunshade plate on the top wafer, with the through holes being aligned with said main optical axes.
Inventors
- 👤 Markus Rossi
- 👤 Hartmut Rudmann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 17:15
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/80; H10F39/805; H10F39/8053; H10F39/011; H10F39/024; H10F77/00; H10F77/30; H10F77/306; H10F77/331; H10F77/334; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49826
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
168 words
A method for fabricating an integrated optical device comprising the steps of: creating a wafer stack by stacking at least a top wafer carrying as functional elements a plurality of lenses, on at least one further wafer comprising further functional elements, and providing a sunshade plate as part of the integrated optical device by: providing a sunshade plate comprising a plurality of through holes, the through holes being arranged to correspond to the arrangement of the functional elements on the top wafer wherein the sides of the through holes are tapered and have an angle between 20-40° with respect to the normal of the sunshade plate; and stacking the sunshade plate on the top wafer, with the through holes being aligned with said main optical axes separating the wafer stack into a plurality of integrated optical devices, wherein corresponding functional elements of the top and further wafer are aligned with each other and define a plurality of main optical axes, each axis corresponding to one integrated optical device.
Claim 2
Independent Claim
168 words
A method for fabricating an integrated optical device comprising the steps of: creating a wafer stack by stacking at least a top wafer carrying as functional elements a plurality of lenses, on at least one further wafer comprising further functional elements, and providing a sunshade plate as part of the integrated optical device by: providing a sunshade plate comprising a plurality of through holes, the through holes being arranged to correspond to the arrangement of the functional elements on the top wafer wherein the sides of the through holes are tapered and have an angle between 20-40° with respect to the normal of the sunshade plate; and stacking the sunshade plate on the top wafer, with the through holes being aligned with said main optical axes separating the wafer stack into a plurality of integrated optical devices, wherein corresponding functional elements of the top and further wafer are aligned with each other and define a plurality of main optical axes, each axis corresponding to one integrated optical device.
Claim 3
Dependent Claim
30 words
The method of claim 1 , comprising the further step of stacking a transparent cover plate on the sunshade plate prior to separating the wafer stack into individual optical devices.
Claim 4
Dependent Claim
129 words
A wafer stack for the fabrication of integrated optical devices, the wafer stack comprising: at least a top wafer carrying as functional elements a plurality of lenses, at least one further wafer comprising further functional elements, the top wafer being stacked on the further wafer, wherein corresponding functional elements of the top and further wafer are aligned with each other and define a plurality of main optical axes, and wherein the wafer stack further comprises a sunshade plate comprising a plurality of through holes, the sunshade plate being stacked on the top wafer, with the through holes being arranged with said main optical axes, and wherein the sides of the through holes are tapered and have an angle between 20-40° with respect to the normal of the sunshade plate.
Claim 5
Dependent Claim
129 words
A wafer stack for the fabrication of integrated optical devices, the wafer stack comprising: at least a top wafer carrying as functional elements a plurality of lenses, at least one further wafer comprising further functional elements, the top wafer being stacked on the further wafer, wherein corresponding functional elements of the top and further wafer are aligned with each other and define a plurality of main optical axes, and wherein the wafer stack further comprises a sunshade plate comprising a plurality of through holes, the sunshade plate being stacked on the top wafer, with the through holes being arranged with said main optical axes, and wherein the sides of the through holes are tapered and have an angle between 20-40° with respect to the normal of the sunshade plate.
Claim 6
Dependent Claim
18 words
The wafer stack of claim 3 , wherein the sunshade plate is made of an optically non-transparent material.
Claim 7
Dependent Claim
25 words
An integrated optical device, manufactured from a wafer stack according to claim 3 by separating said wafer stack into a plurality of integrated optical devices.
Claim 8
Dependent Claim
25 words
The wafer stack of claim 3 , wherein the through holes have an angle between 25-35° with respect to the normal of the sunshade plate.
Claim 9
Dependent Claim
23 words
The wafer stack of claim 3 , wherein the thickness of the sunshade plate is in the range of 0.1 to 1 millimeters.
Claim 10
Dependent Claim
18 words
The wafer stack of claim 7 , wherein the sunshade plate is made of an optically non-transparent material.
Claim 11
Dependent Claim
18 words
The wafer stack of claim 3 , further comprising a transparent cover plate stacked on the sunshade plate.
Claim 12
Dependent Claim
23 words
The wafer stack of claim 9 , wherein the thickness of the sunshade plate is in the range of 0.1 to 1 millimeters.
Claim 13
Dependent Claim
18 words
The wafer stack of claim 9 , wherein the sunshade plate is made of an optically non-transparent material.
Claim 14
Dependent Claim
140 words
A wafer stack for the fabrication of integrated optical devices, the wafer stack comprising: at least a top wafer carrying as functional elements a plurality of lenses, at least one further wafer comprising further functional elements, the top wafer being stacked on the further wafer, wherein corresponding functional elements of the top and further wafer are aligned with each other and define a plurality of main optical axes, and wherein the wafer stack further comprises a sunshade plate comprising a plurality of through holes, the sunshade plate being stacked on the top wafer, with the through holes being arranged with said main optical axes, and further comprising a transparent cover plate stacked on the sunshade plate, wherein the sides of the through holes are tapered and have an angle between 20-40° with respect to the normal of the sunshade plate.
Claim 15
Dependent Claim
140 words
A wafer stack for the fabrication of integrated optical devices, the wafer stack comprising: at least a top wafer carrying as functional elements a plurality of lenses, at least one further wafer comprising further functional elements, the top wafer being stacked on the further wafer, wherein corresponding functional elements of the top and further wafer are aligned with each other and define a plurality of main optical axes, and wherein the wafer stack further comprises a sunshade plate comprising a plurality of through holes, the sunshade plate being stacked on the top wafer, with the through holes being arranged with said main optical axes, and further comprising a transparent cover plate stacked on the sunshade plate, wherein the sides of the through holes are tapered and have an angle between 20-40° with respect to the normal of the sunshade plate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2015-10-16 | 2016-04-16 | 2016-10-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2019-10-16 | 2020-04-16 | 2020-10-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2023-10-16 | 2024-04-16 | 2024-10-16 | $7700.00 | Window Closed / Lapsed |