US7751026B2
Expired / Lapsed
US
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Apparatus and method for recovering fluid for immersion lithography
Assignee: Nikon Corp
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Filing: 2006-05-31
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Granted: 2010-07-06
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Expires: 2026-05-31
Abstract
Abstract A apparatus and methods recover a fluid from an immersion area formed in a gap between a projection system and an object of exposure in an immersion lithography system. A porous member is disposed adjacent to the immersion area. A pressure control system provides a first low pressure to a first portion of the porous member to remove immersion fluid that escapes from the immersion area, and provides a second low pressure to a second portion of the porous member to remove immersion fluid that escapes from the immersion area. The second low pressure is different from the first low pressure.
Inventors
- 👤 Alex Ka Tim Poon
- 👤 Leonard Wai Fung Kho
- 👤 Gaurav Keswani
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 06:05
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70341
Claims Analysis
Total Claims: 47
Claim 1
Independent Claim
117 words
An apparatus for recovering an immersion liquid from an immersion area formed in a gap between a projection system and an object of exposure in an immersion lithography system, the apparatus comprising: a porous member disposed adjacent to the immersion area; and a pressure control system that provides a first low pressure to a first portion of the porous member to remove immersion liquid from the immersion area through the first portion of the porous member, and provides a second low pressure to a second portion of the porous member to remove immersion liquid from the immersion area through the second portion of the porous member, the second low pressure being different from the first low pressure.
Claim 2
Independent Claim
117 words
An apparatus for recovering an immersion liquid from an immersion area formed in a gap between a projection system and an object of exposure in an immersion lithography system, the apparatus comprising: a porous member disposed adjacent to the immersion area; and a pressure control system that provides a first low pressure to a first portion of the porous member to remove immersion liquid from the immersion area through the first portion of the porous member, and provides a second low pressure to a second portion of the porous member to remove immersion liquid from the immersion area through the second portion of the porous member, the second low pressure being different from the first low pressure.
Claim 3
Dependent Claim
46 words
The apparatus of claim 1 , wherein the first portion of the porous member is disposed on first and second opposite sides of the immersion area, and the second portion of the porous member is disposed on third and fourth opposite sides of the immersion area.
Claim 4
Dependent Claim
14 words
The apparatus of claim 2 , wherein the porous member encircles the immersion area.
Claim 5
Dependent Claim
14 words
The apparatus of claim 1 , wherein the porous member encircles the immersion area.
Claim 6
Dependent Claim
31 words
The apparatus of claim 1 , wherein a shape of the first portion of the porous member is the same as a shape of the second portion of the porous member.
Claim 7
Dependent Claim
30 words
The apparatus of claim 1 , wherein a shape of the first portion of the porous member is different from a shape of the second portion of the porous member.
Claim 8
Dependent Claim
48 words
The apparatus of claim 1 , wherein the first and second low pressures each maintain a pressure at a surface of the porous member below a bubble point of the porous member so that gas does not flow through the first and second portions of the porous member.
Claim 9
Dependent Claim
131 words
The apparatus of claim 1 , wherein: the immersion lithography system is a scanning exposure system that moves the object in a scanning direction during exposure of the object; the first portion of the porous member is disposed on first and second opposite sides of the immersion area, the first and second opposite sides each extending in a direction that intersects the scanning direction; the second portion of the porous member is disposed on third and fourth opposite sides of the immersion area, the third and fourth opposite sides each extending in a direction that is parallel to the scanning direction; and the first low pressure supplied to the first portion of the porous member is lower than the second low pressure supplied to the second portion of the porous member.
Claim 10
Dependent Claim
48 words
The apparatus of claim 8 , wherein the first and second low pressures each maintain a pressure at a surface of the porous member below a bubble point of the porous member so that gas does not flow through the first and second portions of the porous member.
Claim 11
Dependent Claim
25 words
The apparatus of claim 1 , wherein the porous member is one of a mesh, a porous material and a member having etched holes therein.
Claim 12
Dependent Claim
42 words
The apparatus of claim 1 , wherein the porous member is disposed on a radially outer portion of the apparatus, and a radially inner portion of the apparatus includes immersion liquid supply openings that supply the immersion liquid to the immersion area.
Claim 13
Dependent Claim
84 words
An immersion lithography system for transferring an image onto an object, the immersion lithography system comprising: a projection system; a stage which holds the object, the projection system forms the image on the object held by the stage; an immersion liquid supply system that supplies an immersion liquid to an immersion area that is formed in a gap between the projection system and the object held by the stage; and the apparatus of claim 1 for recovering the immersion liquid from the immersion area.
Claim 14
Dependent Claim
29 words
A process for manufacturing a device comprising the steps of providing an object and transferring an image onto the object utilizing the immersion lithography system of claim 12 .
Claim 15
Independent Claim
135 words
An apparatus for recovering a liquid from an immersion area formed in a gap between a projection system and an object of exposure in an immersion lithography system, the apparatus comprising: a porous member disposed adjacent to the immersion area; a manifold in liquid communication with the porous member, the manifold partitioned into at a first cavity and a second cavity; the first cavity maintained at a first low pressure to remove immersion liquid from the immersion area through a first portion of the porous member which communicates with the first cavity; and the second cavity maintained at a second low pressure to remove immersion liquid from the immersion area through a second portion of the porous member which communicates with the second cavity, the second low pressure being different from the first low pressure.
Claim 16
Independent Claim
135 words
An apparatus for recovering a liquid from an immersion area formed in a gap between a projection system and an object of exposure in an immersion lithography system, the apparatus comprising: a porous member disposed adjacent to the immersion area; a manifold in liquid communication with the porous member, the manifold partitioned into at a first cavity and a second cavity; the first cavity maintained at a first low pressure to remove immersion liquid from the immersion area through a first portion of the porous member which communicates with the first cavity; and the second cavity maintained at a second low pressure to remove immersion liquid from the immersion area through a second portion of the porous member which communicates with the second cavity, the second low pressure being different from the first low pressure.
Claim 17
Dependent Claim
38 words
The apparatus of claim 14 , wherein the first cavity is disposed on first and second opposite sides of the immersion area, and the second cavity is disposed on third and fourth opposite sides of the immersion area.
Claim 18
Dependent Claim
14 words
The apparatus of claim 14 , wherein the porous member encircles the immersion area.
Claim 19
Dependent Claim
38 words
The apparatus of claim 16 , wherein the first cavity is disposed on first and second opposite sides of the immersion area, and the second cavity is disposed on third and fourth opposite sides of the immersion area.
Claim 20
Dependent Claim
23 words
The apparatus of claim 14 , wherein a shape of the first cavity is the same as a shape of the second cavity.
Claim 21
Dependent Claim
22 words
The apparatus of claim 14 , wherein a shape of the first cavity is different from a shape of the second cavity.
Claim 22
Dependent Claim
48 words
The apparatus of claim 14 , wherein the first and second low pressures each maintain a pressure at a surface of the porous member below a bubble point of the porous member so that gas does not flow through the first and second portions of the porous member.
Claim 23
Dependent Claim
115 words
The apparatus of claim 14 , wherein: the immersion lithography system is a scanning exposure system that moves the object in a scanning direction during exposure of the object; the first cavity is disposed on first and second opposite sides of the immersion area, the first and second opposite sides each extending in a direction that intersects the scanning direction; the second cavity is disposed on third and fourth opposite sides of the immersion area, the third and fourth opposite sides each extending in a direction that is parallel to the scanning direction; and the first low pressure supplied to the first cavity is lower than the second low pressure supplied to the second cavity.
Claim 24
Dependent Claim
48 words
The apparatus of claim 21 , wherein the first and second low pressures each maintain a pressure at a surface of the porous member below a bubble point of the porous member so that gas does not flow through the first and second portions of the porous member.
Claim 25
Dependent Claim
25 words
The apparatus of claim 14 , wherein the porous member is one of a mesh, a porous material and a member having etched holes therein.
Claim 26
Dependent Claim
42 words
The apparatus of claim 14 , wherein the porous member is disposed on a radially outer portion of the apparatus, and a radially inner portion of the apparatus includes immersion liquid supply openings that supply the immersion liquid to the immersion area.
Claim 27
Dependent Claim
84 words
An immersion lithography system for transferring an image onto an object, the immersion lithography system comprising: a projection system; a stage which holds the object, the projection system forms the image on the object held by the stage; an immersion liquid supply system that supplies an immersion liquid to an immersion area that is formed in a gap between the projection system and the object held by the stage; and the apparatus of claim 14 for recovering the immersion liquid from the immersion area.
Claim 28
Dependent Claim
29 words
A process for manufacturing a device comprising the steps of providing an object and transferring an image onto the object utilizing the immersion lithography system of claim 25 .
Claim 29
Independent Claim
133 words
A method of recovering a liquid from an immersion area formed in a gap between a projection system and an object of exposure in an immersion lithography system, the method comprising: drawing immersion liquid from the immersion area via a porous member that is disposed adjacent to the immersion area; and controlling a pressure that is supplied to the porous member by providing a first low pressure to a first portion of the porous member to remove immersion liquid from the immersion area through the first portion of the porous member, and by providing a second low pressure to a second portion of the porous member to remove immersion liquid from the immersion area through the second portion of the porous member, the second low pressure being different from the first low pressure.
Claim 30
Independent Claim
133 words
A method of recovering a liquid from an immersion area formed in a gap between a projection system and an object of exposure in an immersion lithography system, the method comprising: drawing immersion liquid from the immersion area via a porous member that is disposed adjacent to the immersion area; and controlling a pressure that is supplied to the porous member by providing a first low pressure to a first portion of the porous member to remove immersion liquid from the immersion area through the first portion of the porous member, and by providing a second low pressure to a second portion of the porous member to remove immersion liquid from the immersion area through the second portion of the porous member, the second low pressure being different from the first low pressure.
Claim 31
Dependent Claim
46 words
The method of claim 27 , wherein the first portion of the porous member is disposed on first and second opposite sides of the immersion area, and the second portion of the porous member is disposed on third and fourth opposite sides of the immersion area.
Claim 32
Dependent Claim
14 words
The method of claim 28 , wherein the porous member encircles the immersion area.
Claim 33
Dependent Claim
14 words
The method of claim 27 , wherein the porous member encircles the immersion area.
Claim 34
Dependent Claim
31 words
The method of claim 27 , wherein a shape of the first portion of the porous member is the same as a shape of the second portion of the porous member.
Claim 35
Dependent Claim
30 words
The method of claim 27 , wherein a shape of the first portion of the porous member is different from a shape of the second portion of the porous member.
Claim 36
Dependent Claim
48 words
The method of claim 27 , wherein the first and second low pressures each maintain a pressure at a surface of the porous member below a bubble point of the porous member so that gas does not flow through the first and second portions of the porous member.
Claim 37
Dependent Claim
131 words
The method of claim 27 , wherein: the immersion lithography system is a scanning exposure system that moves the object in a scanning direction during exposure of the object; the first portion of the porous member is disposed on first and second opposite sides of the immersion area, the first and second opposite sides each extending in a direction that intersects the scanning direction; the second portion of the porous member is disposed on third and fourth opposite sides of the immersion area, the third and fourth opposite sides each extending in a direction that is parallel to the scanning direction; and the first low pressure supplied to the first portion of the porous member is lower than the second low pressure supplied to the second portion of the porous member.
Claim 38
Dependent Claim
48 words
The method of claim 34 , wherein the first and second low pressures each maintain a pressure at a surface of the porous member below a bubble point of the porous member so that gas does not flow through the first and second portions of the porous member.
Claim 39
Dependent Claim
25 words
The method of claim 27 , wherein the porous member is one of a mesh, a porous material and a member having etched holes therein.
Claim 40
Dependent Claim
50 words
The method of claim 27 , wherein the porous member is disposed on a radially outer portion of the apparatus, and a radially inner portion of the apparatus includes immersion liquid supply openings, and further comprising supplying the immersion liquid to the immersion area through the immersion liquid supply openings.
Claim 41
Dependent Claim
59 words
The method of claim 27 , wherein the immersion liquid is drawn through the porous member by communicating the first portion of the porous member with a first cavity that is maintained at the first low pressure, and by communicating the second portion of the porous member with a second cavity that is maintained at the second low pressure.
Claim 42
Dependent Claim
20 words
The apparatus of claim 1 , wherein the first and second portions of the porous member have a same porosity.
Claim 43
Dependent Claim
20 words
The apparatus of claim 1 , wherein the first and second portions of the porous member have an identical structure.
Claim 44
Dependent Claim
20 words
The apparatus of claim 14 , wherein the first and second portions of the porous member have a same porosity.
Claim 45
Dependent Claim
20 words
The apparatus of claim 14 , wherein the first and second portions of the porous member have an identical structure.
Claim 46
Dependent Claim
20 words
The method of claim 27 , wherein the first and second portions of the porous member have a same porosity.
Claim 47
Dependent Claim
20 words
The method of claim 27 , wherein the first and second portions of the porous member have an identical structure.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2013-07-05 | 2014-01-04 | 2014-07-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2017-07-05 | 2018-01-04 | 2018-07-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2021-07-05 | 2022-01-04 | 2022-07-06 | $7700.00 | Window Closed / Lapsed |