US7280885B1
Expired / Lapsed
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Method and apparatus to reconcile recipe manager and manufacturing execution system context configurations
Assignee: GlobalFoundries Inc
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Filing: 2004-12-01
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Granted: 2007-10-09
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Expires: 2024-12-01
Abstract
Abstract A method and apparatus for managing recipes in a semiconductor manufacturing process. Recipes and associated process contexts in a manufacturing execution system and corresponding recipes and associated contexts in a recipe management system are audited to identify discrepancies. The discrepancies are reconciled to ensure that compatible recipes and process contexts are maintained in the manufacturing execution system and the recipe management system. The audit and reconciliation process can be initiated automatically at predetermined time intervals or can be initiated interactively by a user of the manufacturing system.
Inventors
- 👤 Russell Clinton Brown
- 👤 Thomas P. Jackson
- 👤 II Ronald Ivan Savage
- 👤 Achim Felber
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 08:37
CPC Classifications
G; G05; G05B; G05B19/00; G05B19/02; G05B19/418; G05B19/41865; G05B2219/00; G05B2219/30; G05B2219/32; G05B2219/32097; G05B2219/32196; G05B2219/45; G05B2219/45031; Y; Y02; Y02P; Y02P90/00; Y02P90/02
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
112 words
A method of manufacturing semiconductor devices using recipes in a semiconductor manufacturing process comprising: obtaining a first recipe having an associated defined context in a recipe management system; obtaining a second recipe having an associated defined context in a manufacturing execution system, said second recipe corresponding to said first recipe in said recipe management system; auditing said first and second recipes by comparing said first and second associated contexts; generating an audit list corresponding to the comparison of said first and second contexts; reconciling said first and second recipes based on the result of said audit list; and fabricating a semiconductor device using a reconciled recipe contained in said manufacturing execution system.
Claim 2
Independent Claim
112 words
A method of manufacturing semiconductor devices using recipes in a semiconductor manufacturing process comprising: obtaining a first recipe having an associated defined context in a recipe management system; obtaining a second recipe having an associated defined context in a manufacturing execution system, said second recipe corresponding to said first recipe in said recipe management system; auditing said first and second recipes by comparing said first and second associated contexts; generating an audit list corresponding to the comparison of said first and second contexts; reconciling said first and second recipes based on the result of said audit list; and fabricating a semiconductor device using a reconciled recipe contained in said manufacturing execution system.
Claim 3
Dependent Claim
32 words
The method of claim 1 wherein said audit list contains a recipe that has a context defined in said recipe management system, but no corresponding context defined in said manufacturing execution system.
Claim 4
Dependent Claim
30 words
The method of claim 2 wherein said reconciling is accomplished by placing a context in said manufacturing execution system corresponding to the context of said recipe on said audit list.
Claim 5
Dependent Claim
32 words
The method of claim 1 wherein said audit list contains a recipe that has a context defined in said manufacturing execution system, but no corresponding context defined in said recipe management system.
Claim 6
Dependent Claim
30 words
The method of claim 4 wherein said reconciling is accomplished by placing a context in said recipe management system corresponding to the context of said recipe on said audit list.
Claim 7
Dependent Claim
16 words
The method of claim 1 wherein said auditing is initiated automatically at a predetermined time interval.
Claim 8
Dependent Claim
14 words
The method of claim 1 wherein said auditing is initiated interactively by a user.
Claim 9
Dependent Claim
21 words
The method of claim 1 wherein said auditing is initiated by an external command used to populate a context decision node.
Claim 10
Independent Claim
114 words
A method of manufacturing semiconductor devices using a semiconductor manufacturing process comprising: obtaining a first set of contexts associated with a first plurality of recipes in a manufacturing execution system; obtaining a second set of contexts associated with a second plurality of recipes in a recipe management system; auditing said first and second sets of contexts to generate an audit list of contexts contained in said first list, but not in said second list; using said audit list to generate a reconciled set of contexts in said recipe management system; using said reconciled set of contexts to generate a reconciled recipe in said manufacturing system; and using said reconciled recipe to manufacture semiconductor devices.
Claim 11
Independent Claim
114 words
A method of manufacturing semiconductor devices using a semiconductor manufacturing process comprising: obtaining a first set of contexts associated with a first plurality of recipes in a manufacturing execution system; obtaining a second set of contexts associated with a second plurality of recipes in a recipe management system; auditing said first and second sets of contexts to generate an audit list of contexts contained in said first list, but not in said second list; using said audit list to generate a reconciled set of contexts in said recipe management system; using said reconciled set of contexts to generate a reconciled recipe in said manufacturing system; and using said reconciled recipe to manufacture semiconductor devices.
Claim 12
Dependent Claim
25 words
The method of claim 9 wherein said reconciled set of contexts is generated by placing contexts on said audit list in said recipe management system.
Claim 13
Dependent Claim
16 words
The method of claim 9 wherein said auditing is initiated automatically at a predetermined time interval.
Claim 14
Dependent Claim
14 words
The method of claim 9 wherein said auditing is initiated interactively by a user.
Claim 15
Dependent Claim
21 words
The method of claim 9 wherein said auditing is initiated by an external command used to populate a context decision node.
Claim 16
Independent Claim
63 words
A method for manufacturing recipes comprising: auditing a first set of contexts associated with recipes in a manufacturing execution system, thereby generating an audit list of unreconciled contexts; reconciling said recipes by synchronizing said unreconciled contexts with a second set of contexts contained in a recipe management system; and fabricating a semiconductor device using a reconciled recipe contained in said manufacturing execution system.
Claim 17
Independent Claim
63 words
A method for manufacturing recipes comprising: auditing a first set of contexts associated with recipes in a manufacturing execution system, thereby generating an audit list of unreconciled contexts; reconciling said recipes by synchronizing said unreconciled contexts with a second set of contexts contained in a recipe management system; and fabricating a semiconductor device using a reconciled recipe contained in said manufacturing execution system.
Claim 18
Dependent Claim
22 words
The method of claim 14 wherein the auditing is initiated automatically by an external command used to populate a context decision node.
Claim 19
Dependent Claim
14 words
The method of claim 14 wherein the auditing is initiated interactively by a user.
Claim 20
Independent Claim
88 words
An apparatus of manufacturing semiconductors using a semiconductor manufacturing process comprising: means for auditing a first set of contexts in a manufacturing execution system; means for auditing a second set of contexts in a recipe management system; means for reconciling said first set of contexts and said second set of contexts to generate a set of reconciled contexts in said manufacturing execution system; means for generating a set of reconciled recipes using said set of reconciled contexts; and means for manufacturing semiconductors using said set of reconciled recipes.
Claim 21
Independent Claim
88 words
An apparatus of manufacturing semiconductors using a semiconductor manufacturing process comprising: means for auditing a first set of contexts in a manufacturing execution system; means for auditing a second set of contexts in a recipe management system; means for reconciling said first set of contexts and said second set of contexts to generate a set of reconciled contexts in said manufacturing execution system; means for generating a set of reconciled recipes using said set of reconciled contexts; and means for manufacturing semiconductors using said set of reconciled recipes.
Claim 22
Dependent Claim
17 words
The apparatus of claim 17 , said means for auditing being initiated automatically on a periodic basis.
Claim 23
Dependent Claim
16 words
The apparatus of claim 17 , said means for auditing being initiated interactively by a user.
Claim 24
Dependent Claim
25 words
The apparatus of claim 17 , said means for initiating said audit being responsive to an external command used to populate a context decision node.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2010-10-08 | 2011-04-09 | 2011-10-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2014-10-08 | 2015-04-09 | 2015-10-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2018-10-08 | 2019-04-09 | 2019-10-09 | $7700.00 | Window Closed / Lapsed |