Patent US7271026B2 successfully refreshed from Google Patents.
US7271026B2
Expired / Lapsed
US
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Method for producing chip stacks and chip stacks formed by integrated devices
Assignee: Polaris Innovations Ltd
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Filing: 2005-03-14
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Granted: 2007-09-18
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Expires: 2025-03-14
Abstract
Abstract The method of the present invention relates to a method for producing a chip stack comprising the steps of manufacturing at least a first and a second integrated structure on a single substrate, an area of the first integrated structure and an area of the second integrated structure adjoining a respective first and second kerf area; providing a first redistribution layer on the first integrated structure on the substrate, said first redistribution layer at least partially extending beyond the area of the first integrated structure into the first kerf area, thereby forming a first integrated device area, wherein a first contact pad is arranged on the first redistribution layer in a first contacting area overlapping the first kerf area; providing a second redistribution layer on a second integrated structure on the substrate, including a second contact pad, thereby forming a second integrated device area; separating the first and second integrated device areas along a separation line defined by at least one of the boundaries of the first integrated device area and the second integrated device area, resulting in separated first and second integrated devices; and stacking the second integrated device on the first integrated device so that the first contacting pattern is uncovered by the second integrated device.
Inventors
- 👤 Harald Gross
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 11:01
CPC Classifications
H; H10; H10W; H10W90/00; H10W90/20; H10W90/231; H10W90/701; H10W90/751; H10W90/754
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
304 words
A method for producing a chin stack, comprising: manufacturing at least a first and a second integrated circuit structure on a substrate, an area of the first integrated circuit structure and an area of the second integrated circuit structure adjoining a respective first and second kerf area of the substrate; forming a first redistribution layer on the first integrated circuit structure on the substrate, the first redistribution layer at least partially extending beyond the area of the first integrated circuit structure into the first kerf area, thereby forming a first integrated device area, wherein a first contact pad is formed by the first redistribution layer in a first contacting area overlapping the first kerf area; forming a second redistribution layer on the second integrated rated circuit structure on the substrate, thereby forming a second integrated device area, the second redistribution layer forming a second contacting area having a second contact pad disposed therein, wherein the second redistribution layer is formed to extend beyond the area of the second integrated circuit structure into the second kerf area, thereby forming the second integrated device area, and wherein the second contact pad thereby overlaps the second kerf area; separating the first and second integrated circuit structures along a boundary defined by the first and second kerf areas; and stacking the separated second integrated device on the separated first integrated device so that the first contact pad remains exposed and uncovered by the second integrated device, wherein the step of stacking is performed by positioning the integrated circuit structures in like relative x-y orientation and in such a way that the areas of the first and the second integrated circuit structures substantially cover each other entirely, wherein forming the first and second redistribution layer is performed by arranging their respective contacting patterns orthogonally with respect to each other.
Claim 2
Independent Claim
304 words
A method for producing a chin stack, comprising: manufacturing at least a first and a second integrated circuit structure on a substrate, an area of the first integrated circuit structure and an area of the second integrated circuit structure adjoining a respective first and second kerf area of the substrate; forming a first redistribution layer on the first integrated circuit structure on the substrate, the first redistribution layer at least partially extending beyond the area of the first integrated circuit structure into the first kerf area, thereby forming a first integrated device area, wherein a first contact pad is formed by the first redistribution layer in a first contacting area overlapping the first kerf area; forming a second redistribution layer on the second integrated rated circuit structure on the substrate, thereby forming a second integrated device area, the second redistribution layer forming a second contacting area having a second contact pad disposed therein, wherein the second redistribution layer is formed to extend beyond the area of the second integrated circuit structure into the second kerf area, thereby forming the second integrated device area, and wherein the second contact pad thereby overlaps the second kerf area; separating the first and second integrated circuit structures along a boundary defined by the first and second kerf areas; and stacking the separated second integrated device on the separated first integrated device so that the first contact pad remains exposed and uncovered by the second integrated device, wherein the step of stacking is performed by positioning the integrated circuit structures in like relative x-y orientation and in such a way that the areas of the first and the second integrated circuit structures substantially cover each other entirely, wherein forming the first and second redistribution layer is performed by arranging their respective contacting patterns orthogonally with respect to each other.
Claim 3
Independent Claim
231 words
A method for producing a chip stack, comprising: manufacturing at least a first and a second integrated circuit structure on a substrate, an area of the first integrated circuit structure and an area of the second integrated circuit structure adjoining a respective first and second kerf area of the substrate; forming a first redistribution layer on the first integrated circuit structure on the substrate, the first redistribution layer at least partially extending beyond the area of the first integrated circuit structure into the first kerf area, thereby forming a first integrated device area, wherein a first contact pad is formed by the first redistribution layer in a first contacting area overlapping the first kerf area; forming a second redistribution layer on the second integrated circuit structure on the substrate, thereby forming a second integrated device area, the second redistribution layer forming a second contacting area having a second contact pad disposed therein; separating the first and second integrated circuit structures along a boundary defined by the first and second kerf areas, wherein the step of separating the first and second integrated circuit structures is performed using a etch separation process applied in a spacing formed between the first and second integrated device areas; and stacking the separated second integrated device on the separated first integrated device so that the first contact pad remains exposed and uncovered by the second integrated device.
Claim 4
Independent Claim
231 words
A method for producing a chip stack, comprising: manufacturing at least a first and a second integrated circuit structure on a substrate, an area of the first integrated circuit structure and an area of the second integrated circuit structure adjoining a respective first and second kerf area of the substrate; forming a first redistribution layer on the first integrated circuit structure on the substrate, the first redistribution layer at least partially extending beyond the area of the first integrated circuit structure into the first kerf area, thereby forming a first integrated device area, wherein a first contact pad is formed by the first redistribution layer in a first contacting area overlapping the first kerf area; forming a second redistribution layer on the second integrated circuit structure on the substrate, thereby forming a second integrated device area, the second redistribution layer forming a second contacting area having a second contact pad disposed therein; separating the first and second integrated circuit structures along a boundary defined by the first and second kerf areas, wherein the step of separating the first and second integrated circuit structures is performed using a etch separation process applied in a spacing formed between the first and second integrated device areas; and stacking the separated second integrated device on the separated first integrated device so that the first contact pad remains exposed and uncovered by the second integrated device.
Claim 5
Dependent Claim
32 words
The method according to claim 2 , wherein the first and the second redistribution layer are provided with a pattern which provides edges to define a masking for the etch separation process.
Claim 6
Dependent Claim
69 words
The method according to claim 3 , wherein the second redistribution layer is formed to extend beyond the area of the second integrated structure into a common kerf area, thereby forming the second integrated device area, wherein the second contacting area overlaps the common kerf area; the common kerf area being defined by an area of the substrate in which wherein the first and the second kerf areas overlap.
Claim 7
Independent Claim
230 words
A method for producing a chip stack, comprising: manufacturing at least a first and a second integrated circuit structure on a substrate, an area of the first integrated circuit structure and an area of the second integrated circuit structure adjoining a respective first and second kerf area of the substrate; forming a first redistribution layer on the first integrated circuit structure on the substrate, the first redistribution layer at least partially extending beyond the area of the first integrated circuit structure into the first kerf area, thereby forming a first integrated device area, wherein a first contact pad is formed by the first redistribution layer in a first contacting area overlapping the first kerf area; forming a second redistribution layer on the second integrated circuit structure on the substrate, thereby forming a second integrated device area, the second redistribution layer forming a second contacting area having a second contact pad disposed therein; separating the first and second integrated circuit structures along a boundary defined by the first and second kerf areas, wherein the step of separating the first and second integrated device areas is performed using a sawing process applied in a spacing formed between the first and second integrated device areas; and stacking the separated second integrated device on the separated first integrated device so that the first contact pad remains exposed and uncovered by the second integrated device.
Claim 8
Independent Claim
230 words
A method for producing a chip stack, comprising: manufacturing at least a first and a second integrated circuit structure on a substrate, an area of the first integrated circuit structure and an area of the second integrated circuit structure adjoining a respective first and second kerf area of the substrate; forming a first redistribution layer on the first integrated circuit structure on the substrate, the first redistribution layer at least partially extending beyond the area of the first integrated circuit structure into the first kerf area, thereby forming a first integrated device area, wherein a first contact pad is formed by the first redistribution layer in a first contacting area overlapping the first kerf area; forming a second redistribution layer on the second integrated circuit structure on the substrate, thereby forming a second integrated device area, the second redistribution layer forming a second contacting area having a second contact pad disposed therein; separating the first and second integrated circuit structures along a boundary defined by the first and second kerf areas, wherein the step of separating the first and second integrated device areas is performed using a sawing process applied in a spacing formed between the first and second integrated device areas; and stacking the separated second integrated device on the separated first integrated device so that the first contact pad remains exposed and uncovered by the second integrated device.
Claim 9
Dependent Claim
44 words
The method according to claim 5 , wherein a plurality of first and second integrated structures are provided on the substrate such that, after applying the first and second redistribution layer, the lines formed by the spacings between the integrated device areas are straight.
Claim 10
Independent Claim
300 words
A method for producing chip stacks, comprising: manufacturing at least a first and a second integrated circuit structure on a substrate, an area of the first integrated circuit structure and an area of the second integrated circuit structure adjoining a respective first and second kerf area of the substrate and formed on opposing sides of the first and second integrated circuit structures; forming a first redistribution layer on the first integrated circuit structure on the substrate, the first redistribution layer extending according to a first orientation beyond opposing boundaries of the area of the first integrated circuit structure into at least a portion of the first kerf area on each opposing side of the first integrated circuit structure, thereby forming a first integrated device area, wherein a first contacting pattern is formed by the first redistribution layer in a first contacting area overlapping the first kerf area, the contacting area defining an electrical contact area for connecting the first integrated circuit structure to an external electrical component; forming a second redistribution layer on the second integrated circuit structure on the substrate, the second redistribution layer extending according to a second orientation beyond opposing boundaries of the area of the second integrated circuit structure into the second kerf area on each opposing side of the first integrated circuit structure, thereby forming the second integrated device area, wherein a second contacting pattern is formed by the second redistribution layer in an area overlapping the second kerf area; wherein the first and the second orientation are substantially orthogonal to each other; separating the first and second integrated device areas along the boundaries defined by the first and second integrated device areas; and stacking the first and second integrated devices such that the first and second orientation maintain their orthogonal relation to each other.
Claim 11
Independent Claim
300 words
A method for producing chip stacks, comprising: manufacturing at least a first and a second integrated circuit structure on a substrate, an area of the first integrated circuit structure and an area of the second integrated circuit structure adjoining a respective first and second kerf area of the substrate and formed on opposing sides of the first and second integrated circuit structures; forming a first redistribution layer on the first integrated circuit structure on the substrate, the first redistribution layer extending according to a first orientation beyond opposing boundaries of the area of the first integrated circuit structure into at least a portion of the first kerf area on each opposing side of the first integrated circuit structure, thereby forming a first integrated device area, wherein a first contacting pattern is formed by the first redistribution layer in a first contacting area overlapping the first kerf area, the contacting area defining an electrical contact area for connecting the first integrated circuit structure to an external electrical component; forming a second redistribution layer on the second integrated circuit structure on the substrate, the second redistribution layer extending according to a second orientation beyond opposing boundaries of the area of the second integrated circuit structure into the second kerf area on each opposing side of the first integrated circuit structure, thereby forming the second integrated device area, wherein a second contacting pattern is formed by the second redistribution layer in an area overlapping the second kerf area; wherein the first and the second orientation are substantially orthogonal to each other; separating the first and second integrated device areas along the boundaries defined by the first and second integrated device areas; and stacking the first and second integrated devices such that the first and second orientation maintain their orthogonal relation to each other.
Claim 12
Dependent Claim
38 words
The method according to claim 7 , wherein a plurality of first and second integrated structures are provided on the substrate in such a manner that the boundaries form straight lines extending over the surface of the substrate.
Claim 13
Dependent Claim
33 words
The method according to claim 7 , wherein the first and the second integrated devices are stacked so that the areas of the first and the second integrated structures cover each other entirely.
Claim 14
Dependent Claim
35 words
The method according to claim 7 , wherein separating the first and second integrated device areas is performed using an etch-separation process applied in a spacing formed between the first and second integrated device areas.
Claim 15
Dependent Claim
29 words
The method according to claim 10 , wherein the first and the second redistribution layer are arranged to provide edges to define a masking for the etch separation process.
Claim 16
Dependent Claim
35 words
The method according to claim 8 , wherein separating the first and second integrated device areas is performed using a sawing process applied in a spacing formed between the first and second integrated device areas.
Claim 17
Dependent Claim
23 words
The method according to claim 7 , wherein forming the first and second redistribution layer is done simultaneously, using the same processing steps.
Claim 18
Dependent Claim
38 words
The method according to claim 7 , wherein the chip stack is attached on a printed circuit board and wherein respective contact pads of the printed circuit board and the first and second contacting patterns are wire bonded.
Claim 19
Dependent Claim
288 words
A chip stack, comprising: a first integrated circuit defining a first integrated circuit area and a first redistribution layer formed over the first integrated circuit and extending beyond the first integrated circuit area, wherein a first contact pad is formed by the first redistribution layer in a first contacting area adjoining the first integrated structure area; and a second integrated circuit defining a second integrated circuit area and a second redistribution layer formed over the second integrated circuit and extending beyond the second integrated circuit area, wherein a second contacting pad is formed by the second redistribution layer in a second contacting area adjoining the second integrated structure area; wherein the first and second integrated circuit structures are manufactured on a substrate having an area of the first integrated circuit structure and an area of the second integrated circuit structure adjoining a respective first and second kerf area of the substrate; wherein the first and second integrated circuit structures are separated along a boundary defined by the first and second kerf areas: wherein the second integrated circuit is arranged on the first integrated circuit so as to form a stack wherein the first contact pad and the second contact pads are exposed and uncovered by the first and second integrated circuits, respectively; and wherein the first redistribution layer extends in a first orientation beyond two opposing sides of the first integrated circuit area of the first integrated circuit; and wherein the second redistribution layer extends in a second orientation beyond two opposing sides of the second integrated circuit area of the second integrated circuit; wherein the first and the second integrated circuits are arranged in such a way that the first and the second orientation are substantially orthogonal.
Claim 20
Dependent Claim
288 words
A chip stack, comprising: a first integrated circuit defining a first integrated circuit area and a first redistribution layer formed over the first integrated circuit and extending beyond the first integrated circuit area, wherein a first contact pad is formed by the first redistribution layer in a first contacting area adjoining the first integrated structure area; and a second integrated circuit defining a second integrated circuit area and a second redistribution layer formed over the second integrated circuit and extending beyond the second integrated circuit area, wherein a second contacting pad is formed by the second redistribution layer in a second contacting area adjoining the second integrated structure area; wherein the first and second integrated circuit structures are manufactured on a substrate having an area of the first integrated circuit structure and an area of the second integrated circuit structure adjoining a respective first and second kerf area of the substrate; wherein the first and second integrated circuit structures are separated along a boundary defined by the first and second kerf areas: wherein the second integrated circuit is arranged on the first integrated circuit so as to form a stack wherein the first contact pad and the second contact pads are exposed and uncovered by the first and second integrated circuits, respectively; and wherein the first redistribution layer extends in a first orientation beyond two opposing sides of the first integrated circuit area of the first integrated circuit; and wherein the second redistribution layer extends in a second orientation beyond two opposing sides of the second integrated circuit area of the second integrated circuit; wherein the first and the second integrated circuits are arranged in such a way that the first and the second orientation are substantially orthogonal.
Claim 21
Dependent Claim
248 words
A chin stack, comprising: a first integrated circuit defining a first integrated circuit area and a first redistribution layer formed over the first integrated circuit and extending beyond the first integrated circuit area, wherein a first contact pad is formed by the first redistribution layer in a first contacting area adjoining the first integrated structure area; and a second integrated circuit defining a second integrated circuit area and a second redistribution layer formed over the second integrated circuit and extending beyond the second integrated circuit area, wherein a second contacting pad is formed by the second redistribution layer in a second contacting area adjoining the second integrated structure area; wherein the first and second integrated circuit structures are manufactured on a substrate having an area of the first integrated circuit structure and an area of the second integrated circuit structure adjoining a respective first and second kerf area of the substrate; wherein the first and second integrated circuit structures are separated along a boundary defined by the first and second kerf areas; wherein the second integrated circuit is arranged on the first integrated circuit so as to form a stack wherein the first contact pad and the second contact pads are exposed and uncovered by the first and second integrated circuits, respectively; and wherein a plurality of first and second integrated circuits are arranged alternately such that the first integrated circuits are arranged in the first orientation and the second integrated circuits are arranged in the second orientation.
Claim 22
Dependent Claim
248 words
A chin stack, comprising: a first integrated circuit defining a first integrated circuit area and a first redistribution layer formed over the first integrated circuit and extending beyond the first integrated circuit area, wherein a first contact pad is formed by the first redistribution layer in a first contacting area adjoining the first integrated structure area; and a second integrated circuit defining a second integrated circuit area and a second redistribution layer formed over the second integrated circuit and extending beyond the second integrated circuit area, wherein a second contacting pad is formed by the second redistribution layer in a second contacting area adjoining the second integrated structure area; wherein the first and second integrated circuit structures are manufactured on a substrate having an area of the first integrated circuit structure and an area of the second integrated circuit structure adjoining a respective first and second kerf area of the substrate; wherein the first and second integrated circuit structures are separated along a boundary defined by the first and second kerf areas; wherein the second integrated circuit is arranged on the first integrated circuit so as to form a stack wherein the first contact pad and the second contact pads are exposed and uncovered by the first and second integrated circuits, respectively; and wherein a plurality of first and second integrated circuits are arranged alternately such that the first integrated circuits are arranged in the first orientation and the second integrated circuits are arranged in the second orientation.
Claim 23
Dependent Claim
21 words
The chip stack according to claim 16 , wherein the first and second integrated circuits are stacked in a crosswise manner.
Claim 24
Dependent Claim
59 words
The chip stack of claim 16 , further comprising an electronic system including a printed circuit board on which the chip stack is disposed, wherein the first contact pad is wire bonded to a contact pad of the printed circuit board and wherein the second contact pad is wire bonded to another contact pad of the printed circuit board.
Claim 25
Dependent Claim
17 words
chip stack of claim 16 , wherein the first and second integrated circuits form a stepped profile.
Claim 26
Dependent Claim
42 words
The chip stack of claim 18 , wherein the first and second integrated circuit structures are stacked and wire bonded without need for spacers to create a sufficient gap between the first and second integrated circuit structures for the respective wire bonds.
Claim 27
Dependent Claim
31 words
The method of claim 7 , wherein the stacking is done without need for spacers to create a sufficient gap between the first and second integrated circuit structures for wire bonds.
Claim 28
Dependent Claim
21 words
The method of claim 7 , wherein the first and second integrated circuit structures are stacked to form a stepped profile.
Claim 29
Dependent Claim
71 words
The method of claim 7 , wherein the first redistribution layer comprises a first conducting member coupling the first contact pad to a respective inner contact pad formed at an inner region of the first integrated circuit structure and wherein the second redistribution layer comprises a second conducting member coupling the first contact pad to a respective inner contact pad formed at an inner region of the first integrated circuit structure.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2010-09-17 | 2011-03-19 | 2011-09-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2014-09-17 | 2015-03-19 | 2015-09-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2018-09-17 | 2019-03-19 | 2019-09-18 | $7700.00 | Window Closed / Lapsed |