US7107825B2
Expired / Lapsed
US
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Method and apparatus for the actuation of the cantilever of a probe-based instrument
Assignee: Georgia Tech Research Corp
•
Filing: 2003-06-06
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Granted: 2006-09-19
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Expires: 2023-06-06
Abstract
Abstract An electromagnetic drive causes a cantilever of a probe-based instrument to deform flexurally by transmitting a high frequency AC signal through an electromagnetic actuator located in the vicinity of the cantilever. The AC signal preferably is an RF carrier signal having a frequency that is substantially higher than the resonant frequency of the cantilever. The carrier signal may, if desired, be modulated with a lower frequency modulation signal to induce the cantilever to oscillate, preferably at resonance. Alternatively, the carrier signal may be transmitted to the electromagnetic actuator without being modulated in order to deflect the cantilever quasi-statically. Cantilever response can then be monitored either directly in response to the imposition of the electromagnetically induced deformation of the cantilever in response to probe/sample interaction to obtain measurements regarding characteristics of the sample, the environment, and/or the cantilever.
Inventors
- 👤 F. Levent Degertekin
- 👤 Chanmin Su
- 👤 Peter G. Neilson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 20:13
CPC Classifications
G; G01; G01Q; G01Q30/00; G01Q30/08; G01Q30/12; G01Q30/14; B; B82; B82Y; B82Y35/00; G01N; G01N29/00; G01N29/04; G01N29/06; G01N29/0654; G01N29/0681; G01N29/22; G01N29/24; G01N29/2456; G01N29/34; G01N29/346; G01Q60/00; G01Q60/24; G01Q60/32; G01S; G01S17/00; G01S17/02; G01S17/06; G01S17/08; G01N2291/00; G01N2291/02; G01N2291/028; G01N2291/02827; G01N2291/04; G01N2291/042; G01N2291/0427; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/872
Claims Analysis
Total Claims: 46
Claim 1
Independent Claim
78 words
A measurement instrument comprising: (A) a probe including a cantilever; (B) an electromagnetic actuator spaced from the cantilever; and (C) a signal source that is configured to transmit an AC signal to the electromagnetic actuator at a frequency that is substantially higher than the mechanical resonant frequency of the cantilever, the electromagnetic actuator being responsive to the AC signal to impose a force on the cantilever, wherein the AC signal has a frequency of over about 10 MHz.
Claim 2
Dependent Claim
78 words
A measurement instrument comprising: (A) a probe including a cantilever; (B) an electromagnetic actuator spaced from the cantilever; and (C) a signal source that is configured to transmit an AC signal to the electromagnetic actuator at a frequency that is substantially higher than the mechanical resonant frequency of the cantilever, the electromagnetic actuator being responsive to the AC signal to impose a force on the cantilever, wherein the AC signal has a frequency of over about 10 MHz.
Claim 3
Dependent Claim
21 words
The instrument as recited in claim 1 , wherein the electromagnetic actuator comprises a conductive pattern fixed to a non-conductive substrate.
Claim 4
Dependent Claim
28 words
The instrument as recited in claim 2 , wherein the conductive pattern is fixed on a surface of the substrate that faces and is spaced from the cantilever.
Claim 5
Dependent Claim
29 words
The instrument as recited in claim 1 , wherein the cantilever and the electromagnetic actuator are configured to be immersed in a gaseous or liquid medium during instrument operation.
Claim 6
Dependent Claim
46 words
The instrument as recited in claim 1 , wherein the electromagnetic actuator and the cantilever are configured to interact with one another so that the thermal stress caused by the electromagnetic actuator causes the cantilever to deform and oscillate at or below the resonant frequency thereof.
Claim 7
Dependent Claim
49 words
The instrument as recited in claim 1 , wherein the electromagnetic actuator and the cantilever are configured to interact with one another so that the electrostrictive stress or thermal stresses caused by the electromagnetic actuator causes the cantilever to deform and oscillate at or below the resonant frequency thereof.
Claim 8
Dependent Claim
18 words
The instrument as recited in claim 1 , wherein at least a portion of the cantilever is magnetic.
Claim 9
Dependent Claim
30 words
The instrument as recited in claim 7 , wherein the cantilever has a layer of a conductive material coated on at least a portion of at least one surface thereof.
Claim 10
Dependent Claim
16 words
The instrument as recited in claim 7 , wherein the cantilever is formed from doped silicon.
Claim 11
Dependent Claim
16 words
The instrument as recited in claim 1 , wherein the electromagnetic actuator comprises a micro wire.
Claim 12
Dependent Claim
21 words
The instrument as recited in claim 10 , wherein the micro wire has a diameter of less than about 200 microns.
Claim 13
Dependent Claim
20 words
The instrument as recited in claim 11 , wherein the micro wire has a diameter less than about 50 microns.
Claim 14
Dependent Claim
23 words
The instrument as recited in claim 12 , wherein the micro wire has a diameter between about 10 microns and about 25 microns.
Claim 15
Dependent Claim
29 words
The instrument as recited in claim 10 , wherein the micro wire is separated from the cantilever by a gap having a thickness of less than about 200 microns.
Claim 16
Dependent Claim
18 words
The instrument as recited in claim 14 , wherein the gap has a thickness of about 50 microns.
Claim 17
Dependent Claim
36 words
The instrument as recited in claim 1 , wherein the AC signal is a radio frequency signal, and wherein the signal source includes a radio frequency carrier signal source that outputs a radio frequency carrier signal.
Claim 18
Dependent Claim
40 words
The instrument as recited in claim 16 , wherein the AC signal is an unmodulated signal formed from the carrier signal, and wherein the electromagnetic actuator is responsive to the AC signal to impose a quasistatic force on the cantilever.
Claim 19
Dependent Claim
23 words
The instrument as recited in claim 1 , wherein the AC signal has a frequency between about 100 MHz and about 300 MHz.
Claim 20
Dependent Claim
51 words
The instrument as recited in claim 1 , wherein the cantilever has a free end portion and has a base supported on a holder, and wherein the electromagnetic actuator and the cantilever are configured to interact with one another to impose a force on the free end portion of the cantilever.
Claim 21
Dependent Claim
148 words
A measurement instrument comprising: (A) a probe including a cantilever; (B) an electromagnetic actuator spaced from the cantilever; and (C) a signal source that is configured to transmit an AC signal to the electromagnetic actuator at a frequency that is substantially higher than the mechanical resonant frequency of the cantilever, the electromagnetic actuator being responsive to the AC signal to impose a force on the cantilever, wherein wherein the AC signal is a radio frequency signal, and wherein the signal source includes a radio frequency carrier signal source that outputs an a radio frequency carrier signal, and wherein the AC signal is a modulated signal formed by modulating the radio frequency carrier signal with a modulation signal having a frequency that is substantially lower than the frequency of the carrier signal, and wherein the electromagnetic actuator is responsive to the AC signal to drive the cantilever to oscillate.
Claim 22
Dependent Claim
148 words
A measurement instrument comprising: (A) a probe including a cantilever; (B) an electromagnetic actuator spaced from the cantilever; and (C) a signal source that is configured to transmit an AC signal to the electromagnetic actuator at a frequency that is substantially higher than the mechanical resonant frequency of the cantilever, the electromagnetic actuator being responsive to the AC signal to impose a force on the cantilever, wherein wherein the AC signal is a radio frequency signal, and wherein the signal source includes a radio frequency carrier signal source that outputs an a radio frequency carrier signal, and wherein the AC signal is a modulated signal formed by modulating the radio frequency carrier signal with a modulation signal having a frequency that is substantially lower than the frequency of the carrier signal, and wherein the electromagnetic actuator is responsive to the AC signal to drive the cantilever to oscillate.
Claim 23
Dependent Claim
24 words
The instrument as recited in claim 20 , wherein the modulation signal has a frequency of between about 100 Hz and about 5 MHz.
Claim 24
Dependent Claim
43 words
The instrument as recited in claim 20 , wherein the instrument is configured to monitor a characteristic of cantilever oscillation while the cantilever interacts with a sample and to obtain an indication of a characteristic of the sample based on the monitoring step.
Claim 25
Dependent Claim
30 words
The instrument as recited in claim 22 , wherein the modulation signal has a frequency between DC and a quasistatic signal to the fifth overtone of the cantilever resonant frequency.
Claim 26
Dependent Claim
96 words
The instrument as recited in claim 22 , wherein the instrument further comprises a detector that monitors cantilever oscillation, a computer that is operatively coupled to the detector, that compares a monitored parameter of cantilever oscillation to a setpoint, and that generates an error signal as a result of the comparison, and a translational actuator that is operatively coupled to the computer and that moves one of the probe and the sample relative to the other of the probe and the sample so as to make the monitored cantilever oscillation parameter at least approach the setpoint.
Claim 27
Dependent Claim
34 words
The instrument as recited in claim 24 , further comprising a feedback circuit that determines gains for the error signal and the drive voltage required to move the translational actuators to maintain the setpoint.
Claim 28
Dependent Claim
58 words
The instrument as recited in claim 24 , wherein the monitored cantilever oscillation parameter is cantilever oscillation amplitude, and wherein the translational actuator comprises a Z actuator that moves at least one of the probe and the sample vertically relative to the other of the probe and the sample in response to the receipt of the error signal.
Claim 29
Dependent Claim
78 words
The instrument as recited in claim 20 , further comprising: a detector that monitors cantilever oscillation, and a computer that is operatively coupled to the detector, compares a monitored parameter of cantilever oscillation to a setpoint, generates an error signal as a result of the comparison, and transmits the error signal to the one of a feedback gain control operator and a phase lock loop so as to make the monitored oscillation parameter at least approach the setpoint.
Claim 30
Dependent Claim
24 words
The instrument as recited in claim 27 , wherein the setpoint parameter is one of an oscillation amplitude setpoint and an oscillation phase setpoint.
Claim 31
Dependent Claim
41 words
The instrument as recited in claim 27 , wherein the instrument is configured to operate in the absence of a sample external to the cantilever to obtain information regarding a characteristic of at least one of the probe and the environment.
Claim 32
Dependent Claim
78 words
The instrument as recited in claim 20 , wherein the signal source further comprises a low frequency modulation signal source that is configured to supply the modulation signal, and a mixer that is configured to (1) receive the carrier signal and the modulation signal from the carrier signal source and the modulation signal source, respectively, (2) produce the AC signal from the carrier signal and the modulation signal, and (3) transmit the AC signal to the electromagnetic actuator.
Claim 33
Dependent Claim
73 words
The instrument as recited in claim 20 , wherein the signal source further comprises a variable gain amplifier that is configured to amplify the AC signal after the AC signal is output from the mixer, an impedance matching circuit that is configured to match the impedance of the AC signal to the impedance of the electromagnetic actuator, and an LC resonator that is configured to enhance a drive efficiency of the electromagnetic actuator.
Claim 34
Independent Claim
70 words
A method comprising: (A) transmitting an AC signal to an electromagnetic actuator of an instrument, the AC signal having a frequency that is substantially higher than a resonant frequency of a cantilever of a probe of the instrument, (B) in response to the transmission of the AC signal to the electromagnetic actuator, imposing a force on the cantilever, wherein the AC signal has a frequency of over about 10 MHz.
Claim 35
Independent Claim
70 words
A method comprising: (A) transmitting an AC signal to an electromagnetic actuator of an instrument, the AC signal having a frequency that is substantially higher than a resonant frequency of a cantilever of a probe of the instrument, (B) in response to the transmission of the AC signal to the electromagnetic actuator, imposing a force on the cantilever, wherein the AC signal has a frequency of over about 10 MHz.
Claim 36
Independent Claim
102 words
A method comprising: (A) transmitting an AC signal to an electromagnetic actuator of an instrument, the AC signal having a frequency that is substantially higher than a resonant frequency of a cantilever of a probe of the instrument, (B) in response to the transmission of the AC signal to the electromagnetic actuator, imposing a force on the cantilever, wherein the AC signal is a radio frequency signal formed by modulating a radio frequency carrier signal with a relatively low frequency modulation signal, and wherein the electromagnetic actuator drives the cantilever to oscillate in response to the transmission of the AC signal thereto.
Claim 37
Independent Claim
102 words
A method comprising: (A) transmitting an AC signal to an electromagnetic actuator of an instrument, the AC signal having a frequency that is substantially higher than a resonant frequency of a cantilever of a probe of the instrument, (B) in response to the transmission of the AC signal to the electromagnetic actuator, imposing a force on the cantilever, wherein the AC signal is a radio frequency signal formed by modulating a radio frequency carrier signal with a relatively low frequency modulation signal, and wherein the electromagnetic actuator drives the cantilever to oscillate in response to the transmission of the AC signal thereto.
Claim 38
Dependent Claim
22 words
The method as recited in claim 33 , wherein the carrier signal has a frequency between about 100 MHz and 300 MHz.
Claim 39
Dependent Claim
24 words
The method as recited in claim 33 , wherein the modulation signal has a frequency of between about 100 Hz and about 5 MHz.
Claim 40
Dependent Claim
38 words
The method as recited in claim 33 , further comprising monitoring a characteristic of cantilever oscillation while the cantilever interacts with a sample and obtaining an indication of a characteristic of the sample based on the monitoring step.
Claim 41
Dependent Claim
48 words
The method as recited in claim 33 , further comprising monitoring a characteristic of cantilever oscillation in the absence of an external sample and obtaining an indication of a characteristic of at least one of the cantilever or cantilever arrays and the environment based on the monitoring step.
Claim 42
Dependent Claim
48 words
The method as recited in claim 33 , wherein the AC signal is a radio frequency signal formed from a radio frequency carrier signal without modulating the carrier signal with a relatively low frequency modulation signal, and wherein the imposing step imposes a quasistatic force on the cantilever.
Claim 43
Dependent Claim
24 words
The method as recited in claim 38 , further comprising obtaining elasticicity measurements of a sample while imposing the quasistatic force on the cantilever.
Claim 44
Dependent Claim
105 words
An instrument comprising: (A) a probe including an electrically conductive cantilever; (B) actuator means for imposing a force on the cantilever; and (C) means for transmitting an AC signal to the actuator means to energize the actuator means, the AC signal having a frequency that is substantially higher than a resonant frequency of the cantilever, wherein the AC signal is a radio frequency signal, and further comprising means for forming the AC signal by modulating a radio frequency carrier signal with a relatively low frequency modulation signal, and wherein the actuator means is responsive to the means for transmitting to drive the cantilever to oscillate.
Claim 45
Dependent Claim
105 words
An instrument comprising: (A) a probe including an electrically conductive cantilever; (B) actuator means for imposing a force on the cantilever; and (C) means for transmitting an AC signal to the actuator means to energize the actuator means, the AC signal having a frequency that is substantially higher than a resonant frequency of the cantilever, wherein the AC signal is a radio frequency signal, and further comprising means for forming the AC signal by modulating a radio frequency carrier signal with a relatively low frequency modulation signal, and wherein the actuator means is responsive to the means for transmitting to drive the cantilever to oscillate.
Claim 46
Dependent Claim
105 words
The instrument as recited in claim 40 , wherein the means for forming comprises a signal source that includes a radio frequency carrier signal source that is configured to supply the carrier signal, a low frequency modulation signal source that is configured to supply the modulation signal, and a mixer that is configured to (1) receive the carrier signal and the modulation signal from the carrier signal source and the modulation signal source, respectively, (2) produce the modulated carrier signal from the carrier signal and the modulation signal, and (3) transmit the modulated carrier signal to the actuator means to drive the cantilever to oscillate.
References Cited (Backward Citations)
US4079460A
Cited
US6006593A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2009-09-18 | 2010-03-20 | 2010-09-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2013-09-18 | 2014-03-20 | 2014-09-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2017-09-18 | 2018-03-20 | 2018-09-19 | $7700.00 | Window Closed / Lapsed |