US7093509B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Scanning probe microscopy apparatus and techniques
Assignee: University of Pennsylvania
•
Filing: 2005-03-18
•
Granted: 2006-08-22
•
Expires: 2025-03-18
Abstract
Abstract Scanning probe techniques based on the measurement of impedance spectroscopy using a conductive an SPM tip is provided and applied to the study of local transport properties, especially at a grain boundary. The contributions of the grain boundaries and tip-surface interaction can be distinguished based on the analysis of the equivalent circuit. The technique is applicable for both the spatially resolved study of transport mechanisms of polycrystalline semiconductors and the tip-surface contact quality. A piezoresponse force microscopy technique yields quantitative information about local non-linear dielectric properties and higher order electromechanical coupled of ferroelectrics.
Inventors
- 👤 Rui Shao
- 👤 Sergei V. Kalinin
- 👤 Dawn A. Bonnell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 07:44
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/24; G01Q60/30; B; B82; B82Y; B82Y35/00; G01Q60/36; G01Q60/363
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
78 words
A method of assessing properties of a sample's grain boundaries, comprising the steps of: (a) providing a scanning force microscope probe having a conductive probe tip on a cantilever, (b) disposing the tip on a point on a surface of the sample, (c) applying a modulated voltage to the probe tip; and (d) providing an electrode in contact with the sample to enable acquiring of impedance modulus and phase, whereby information relating to grain boundaries may be obtained.
Claim 2
Independent Claim
78 words
A method of assessing properties of a sample's grain boundaries, comprising the steps of: (a) providing a scanning force microscope probe having a conductive probe tip on a cantilever, (b) disposing the tip on a point on a surface of the sample, (c) applying a modulated voltage to the probe tip; and (d) providing an electrode in contact with the sample to enable acquiring of impedance modulus and phase, whereby information relating to grain boundaries may be obtained.
Claim 3
Dependent Claim
19 words
The method of claim 1 wherein the information includes electrical information about the transport properties across the grain boundaries.
Claim 4
Dependent Claim
33 words
The method of claim 2 wherein the probe tip is electrically isolated from the scanning force microscope's feedback mechanism, thereby enabling the measurement of mechanical surface properties at the point on the surface.
Claim 5
Dependent Claim
22 words
The method of claim 3 wherein the scanning force microscope is an atomic force microscope and the mechanical surface properties include topography.
Claim 6
Dependent Claim
24 words
The method of claim 3 further comprising the step of moving the probe tip to another point on the surface for measuring impedance spectra.
Claim 7
Dependent Claim
14 words
The method of claim 5 further comprising the step of measuring mechanical surface properties.
Claim 8
Dependent Claim
22 words
The method of claim 6 wherein the probe tip contacts the surface and the mechanical surface property measured corresponds to cantilever deflection.
Claim 9
Dependent Claim
15 words
The method of claim 3 wherein the electrode contacts the surface proximate the probe tip.
Claim 10
Dependent Claim
15 words
The method of claim 3 wherein the electrode contacts the sample opposite the probe tip.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2009-08-21 | 2010-02-20 | 2010-08-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2013-08-21 | 2014-02-20 | 2014-08-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2017-08-21 | 2018-02-20 | 2018-08-22 | $7700.00 | Window Closed / Lapsed |