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US7029632B1 Expired / Lapsed US ⏱️ 0.0 years remaining

Radiation-heated fluidized-bed reactor

Assignee: Wacker Chemie AG
•
Filing: 2000-10-02
•
Granted: 2006-04-18
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Expires: 2020-10-02
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Abstract

Abstract A radiation-heated fluidized-bed reactor and a process for producing high-purity polycrystalline silicon by using this reactor are provided. In this reactor, a heater device ( 14 ) is a radiation source for thermal radiation which is arranged outside the inner reactor tube and as a cylinder around the heater zone, without being in direct contact with the inner reactor tube. The inner reactor tube is designed in such a manner that it uses thermal radiation to heat the silicon particles in the heating zone to a temperature which is such that the reaction temperature is established in the reaction zone.

Inventors

  • 👤 Dieter Weidhaus
  • 👤 Alexander Hayduk

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 19:58
CPC Classifications
B; B01; B01J; B01J8/00; B01J8/18; B01J8/1836; B01J8/1818; C; C01; C01B; C01B33/00; C01B33/02; C01B33/021; C01B33/027; B01J2208/00; B01J2208/00008; B01J2208/00017; B01J2208/00106; B01J2208/00115; B01J2208/00132; B01J2208/00433; B01J2208/00477; B01J2208/00495

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 348 words
A fluidized-bed reactor ( 1 ) comprising: a) a pressure-supporting enclosure ( 2 ); b) an inner reactor tube ( 3 ) within said enclosure ( 2 ) and made from a material which exhibits high transmission for thermal radiation; c) an inlet ( 4 ) at a top of said enclosure ( 2 ) for silicon particles ( 5 ); d) an inlet device ( 6 ) for supplying a reaction gas ( 7 ) which contains a silicon compound in gas or vapor form, the inlet device ( 6 ) being of tubular design and dividing the fluidized bed into zones consisting of a heating zone ( 17 ) and a separate reaction zone ( 18 ) situated above the heating zone, wherein the inlet device is positioned so that the reaction gas supplied by the inlet device does not enter the heating zone; e) a gas-distribution device ( 8 ) at a bottom of said enclosure ( 2 ) for feeding a fluidizing gas ( 9 ) into the heating zone; f) an outlet ( 10 ) at the top of said enclosure ( 2 ) for reaction gas which has not fully reacted, fluidizing gas and products of reaction ( 11 ) which are in gas or vapor form and collect above a fluidized-bed surface ( 19 ); g) an outlet ( 12 ) at the bottom of said enclosure ( 2 ) for a product ( 13 ); h) a heater device ( 14 ); i) an energy supply ( 15 ) for the heater device ( 14 ); and wherein the heater device ( 14 ) is a radiation source for thermal radiation which is arranged outside the inner reactor tube and as a cylinder around the heating zone ( 17 ), without being in direct contact with the inner reactor tube, and is designed in such a manner that it uses thermal radiation to heat the silicon particles in the heating zone to a temperature which is such that the reaction temperature is established in the reaction zone ( 18 ).
Claim 2
Dependent Claim 348 words
A fluidized-bed reactor ( 1 ) comprising: a) a pressure-supporting enclosure ( 2 ); b) an inner reactor tube ( 3 ) within said enclosure ( 2 ) and made from a material which exhibits high transmission for thermal radiation; c) an inlet ( 4 ) at a top of said enclosure ( 2 ) for silicon particles ( 5 ); d) an inlet device ( 6 ) for supplying a reaction gas ( 7 ) which contains a silicon compound in gas or vapor form, the inlet device ( 6 ) being of tubular design and dividing the fluidized bed into zones consisting of a heating zone ( 17 ) and a separate reaction zone ( 18 ) situated above the heating zone, wherein the inlet device is positioned so that the reaction gas supplied by the inlet device does not enter the heating zone; e) a gas-distribution device ( 8 ) at a bottom of said enclosure ( 2 ) for feeding a fluidizing gas ( 9 ) into the heating zone; f) an outlet ( 10 ) at the top of said enclosure ( 2 ) for reaction gas which has not fully reacted, fluidizing gas and products of reaction ( 11 ) which are in gas or vapor form and collect above a fluidized-bed surface ( 19 ); g) an outlet ( 12 ) at the bottom of said enclosure ( 2 ) for a product ( 13 ); h) a heater device ( 14 ); i) an energy supply ( 15 ) for the heater device ( 14 ); and wherein the heater device ( 14 ) is a radiation source for thermal radiation which is arranged outside the inner reactor tube and as a cylinder around the heating zone ( 17 ), without being in direct contact with the inner reactor tube, and is designed in such a manner that it uses thermal radiation to heat the silicon particles in the heating zone to a temperature which is such that the reaction temperature is established in the reaction zone ( 18 ).
Claim 3
Dependent Claim 35 words
The fluidized-bed reactor as claimed in claim 1 , wherein a space between said inner reactor tube ( 3 ) and said pressure-supporting enclosure ( 2 ) is provided with thermal insulation ( 16 ).
Claim 4
Dependent Claim 31 words
The fluidized-bed reactor as claimed in claim 1 , wherein the heater device is formed over a large area around the entire heating zone and thus forms a cylindrical radiation source.
Claim 5
Dependent Claim 26 words
The fluidized-bed reactor as claimed in claim 1 , wherein the heater device emits thermal radiation with a wavelength of from 0.4 μm to 900 μm.
Claim 6
Dependent Claim 26 words
The fluidized-bed reactor as claimed in claim 4 , wherein the heater device emits thermal radiation with a wavelength of from 0.4 μm to 300 μm.
Claim 7
Dependent Claim 51 words
The fluidized-bed reactor as claimed in claim 1 , wherein the heater device is selected from the group consisting of a heater element made from doped silicon, a heater element made from graphite, a heater element made from silicon carbide, a quartz tube radiator, a ceramic radiator and a wire radiator.
Claim 8
Dependent Claim 39 words
The fluidized-bed reactor as claimed in claim 1 , wherein all components of the reactor which come into contact with product are selected from the group consisting of an inert material and a component coated with an inert material.
Claim 9
Dependent Claim 355 words
A fluidized-bed reactor ( 1 ) comprising: (a) a pressure supporting enclosure ( 2 ); (b) an inner reactor tube ( 3 ) within said enclosure ( 2 ) and made from a material which exhibits high transmission for thermal radiation; (c) an inlet ( 4 ) at a top of said enclosure ( 2 ) for silicon particles ( 5 ) (d) an inlet device ( 6 ) for supplying a reaction gas ( 7 ) which contains a silicon compound in gas or vapor form, the inlet device ( 6 ) being of tubular design and dividing the fluidized bed into a heating zone ( 17 ) and a reaction zone ( 18 ) situated above the heating zone; (e) a gas-distribution device ( 8 ) at a bottom of said enclosure ( 2 ) for feeding a fluidizing gas ( 9 ) into the heating zone; (f) an outlet ( 10 ) at the top of said enclosure ( 2 ) for reaction gas which has not fully reacted, fluidizing gas and products of reaction ( 11 ) which are in gas or vapor form and collect above a fluidized-bed surface ( 19 ); (g) an outlet ( 12 ) at the bottom of said enclosure ( 2 ) for a product ( 13 ); (h) a heater device ( 14 ); (i) an energy supply ( 15 ) for the heater device ( 14 ); and wherein the heater device ( 14 ) is a radiation source for thermal radiation which is arranged outside the inner reactor tube and as a cylinder around the heating zone ( 17 ), without being in direct contact with the inner reactor tube, and is designed in such a manner that it uses thermal radiation to heat the silicon particles in the heating zone to a temperature which is such that the reaction temperature is established in the reaction zone ( 18 ) and wherein the heater device is a tube with meandering slots made from graphite with a SiC surface coating which is arranged in the reactor, standing on or hanging from electrode terminals.
Claim 10
Dependent Claim 355 words
A fluidized-bed reactor ( 1 ) comprising: (a) a pressure supporting enclosure ( 2 ); (b) an inner reactor tube ( 3 ) within said enclosure ( 2 ) and made from a material which exhibits high transmission for thermal radiation; (c) an inlet ( 4 ) at a top of said enclosure ( 2 ) for silicon particles ( 5 ) (d) an inlet device ( 6 ) for supplying a reaction gas ( 7 ) which contains a silicon compound in gas or vapor form, the inlet device ( 6 ) being of tubular design and dividing the fluidized bed into a heating zone ( 17 ) and a reaction zone ( 18 ) situated above the heating zone; (e) a gas-distribution device ( 8 ) at a bottom of said enclosure ( 2 ) for feeding a fluidizing gas ( 9 ) into the heating zone; (f) an outlet ( 10 ) at the top of said enclosure ( 2 ) for reaction gas which has not fully reacted, fluidizing gas and products of reaction ( 11 ) which are in gas or vapor form and collect above a fluidized-bed surface ( 19 ); (g) an outlet ( 12 ) at the bottom of said enclosure ( 2 ) for a product ( 13 ); (h) a heater device ( 14 ); (i) an energy supply ( 15 ) for the heater device ( 14 ); and wherein the heater device ( 14 ) is a radiation source for thermal radiation which is arranged outside the inner reactor tube and as a cylinder around the heating zone ( 17 ), without being in direct contact with the inner reactor tube, and is designed in such a manner that it uses thermal radiation to heat the silicon particles in the heating zone to a temperature which is such that the reaction temperature is established in the reaction zone ( 18 ) and wherein the heater device is a tube with meandering slots made from graphite with a SiC surface coating which is arranged in the reactor, standing on or hanging from electrode terminals.

References Cited (Backward Citations)

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JPH01208311A Cited
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US5382412A Cited
DE4327308A1 Cited
WO1996041036A2 Cited
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