US6878611B2
Expired / Lapsed
US
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Patterned strained silicon for high performance circuits
Assignee: International Business Machines Corp
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Filing: 2003-01-02
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Granted: 2005-04-12
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Expires: 2023-01-02
Abstract
Abstract In the preferred embodiment of this invention a method is described to convert patterned SOI regions into patterned SGOI (silicon-germanium on oxide) by the SiGe/SOI thermal mixing process to further enhance performance of the logic circuit in an embedded DRAM. The SGOI region acts as a template for subsequent Si growth such that the Si is strained, and electron and holes in the Si have higher mobility.
Inventors
- 👤 Devendra K. Sadana
- 👤 Stephen W. Bedell
- 👤 Tze-Chiang Chen
- 👤 Kwang Su Choe
- 👤 Keith E. Fogel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 05:04
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/90; H10D; H10D84/00; H10D84/01; H10D84/0123; H10D84/0126; H10D84/0165; H10D84/0167; H10D84/02; H10D84/03; H10D84/038; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/32; H10P14/3202; H10P14/3204; H10P14/3211; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P14/36; H10P14/38; H10P14/3822; Y; Y10; Y10S; Y10S438/00; Y10S438/96
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
136 words
A method of forming regions of strained silicon in a wafer with a set of compressive regions comprising a layer of silicon under compressive stress and a set of tensile regions comprising a layer of silicon under tensile stress comprising the steps of: providing a silicon wafer containing a set of buried oxide regions and a set of silicon device regions, a first subset of which are disposed over said set of buried oxide regions; introducing Ge into said first subset; forming a set of porous areas of silicon in a second subset of said device regions separate from said first subset; forming a layer of strained silicon above at least said device regions, thereby forming said set of tensile regions over said first subset and forming said set of compressive regions over said second subset.
Claim 2
Independent Claim
136 words
A method of forming regions of strained silicon in a wafer with a set of compressive regions comprising a layer of silicon under compressive stress and a set of tensile regions comprising a layer of silicon under tensile stress comprising the steps of: providing a silicon wafer containing a set of buried oxide regions and a set of silicon device regions, a first subset of which are disposed over said set of buried oxide regions; introducing Ge into said first subset; forming a set of porous areas of silicon in a second subset of said device regions separate from said first subset; forming a layer of strained silicon above at least said device regions, thereby forming said set of tensile regions over said first subset and forming said set of compressive regions over said second subset.
Claim 3
Dependent Claim
39 words
A method according to claim 1 , in which said step of introducing Ge is effected by: forming a layer of SiGe on said wafer; and mixing Ge from said SiGe into said device regions by heating said wafer.
Claim 4
Dependent Claim
37 words
A method according to claim 2 , in which said layer of silicon is formed uniformly across said first subset and intervening areas and after said steps of forming porous silicon and said step of mixing Ge.
Claim 5
Dependent Claim
17 words
A method according to claim 2 , in which said second subset is formed by anodic etching.
Claim 6
Dependent Claim
25 words
A method according to claim 4 , further comprising an implant of a selected ion species in second subset before said step of anodic etching.
Claim 7
Dependent Claim
37 words
A method according to claim 5 , in which said layer of silicon is formed uniformly across said first subset and intervening areas and after said steps of forming porous silicon and said step of mixing Ge.
Claim 8
Dependent Claim
24 words
A method according to claim 2 , further comprising a step of forming a set of STI members defining said set of device islands.
Claim 9
Dependent Claim
23 words
A method according to claim 7 , in which said step of forming STI members is performed before said step of mixing Ge.
Claim 10
Dependent Claim
17 words
A method according to claim 1 , in which said second subset is formed by anodic etching.
Claim 11
Dependent Claim
25 words
A method according to claim 9 , further comprising an implant of a selected ion species in second subset before said step of anodic etching.
Claim 12
Dependent Claim
37 words
A method according to claim 10 , in which said layer of silicon is formed uniformly across said first subset and intervening areas and after said steps of forming porous silicon and said step of introducing Ge.
Claim 13
Dependent Claim
37 words
A method according to claim 1 , in which said layer of silicon is formed uniformly across said first subset and intervening areas and after said steps of forming porous silicon and said step of introducing Ge.
Claim 14
Dependent Claim
24 words
A method according to claim 1 , further comprising a step of forming a set of STI members defining said set of device islands.
Claim 15
Dependent Claim
23 words
A method according to claim 13 , in which said step of forming STI members is performed before said step of mixing Ge.
Claim 16
Dependent Claim
29 words
A method according to claim 14 , in which said step of forming a layer of silicon comprises forming a self-aligned layer of epitaxial silicon over said device regions.
Claim 17
Dependent Claim
29 words
A method according to claim 13 , in which said step of forming a layer of silicon comprises forming a self-aligned layer of epitaxial silicon over said device regions.
Claim 18
Independent Claim
136 words
A method of forming regions of strained silicon in a wafer with a set of compressive regions comprising a layer of silicon under compressive stress and a set of tensile regions comprising a layer of silicon under tensile stress comprising the steps of: providing a silicon on insulator wafer containing a uniform buried oxide region and a set of silicon device regions, a first subset of which are disposed over said set of buried oxide regions; introducing Ge into said first subset; forming a set of porous areas of silicon in a second subset of said device regions separate from said first subset; forming a layer of Si above at least said device regions, thereby forming said set of tensile regions over said first subset and forming said set of compressive regions over said second subset.
Claim 19
Independent Claim
136 words
A method of forming regions of strained silicon in a wafer with a set of compressive regions comprising a layer of silicon under compressive stress and a set of tensile regions comprising a layer of silicon under tensile stress comprising the steps of: providing a silicon on insulator wafer containing a uniform buried oxide region and a set of silicon device regions, a first subset of which are disposed over said set of buried oxide regions; introducing Ge into said first subset; forming a set of porous areas of silicon in a second subset of said device regions separate from said first subset; forming a layer of Si above at least said device regions, thereby forming said set of tensile regions over said first subset and forming said set of compressive regions over said second subset.
Claim 20
Dependent Claim
39 words
A method according to claim 17 , in which said step of introducing Ge is effected by: forming a layer of SiGe on said wafer; and mixing Ge from said SiGe into said device regions by heating said wafer.
Claim 21
Dependent Claim
17 words
A method according to claim 18 , in which said second subset is formed by anodic etching.
Claim 22
Dependent Claim
25 words
A method according to claim 19 , further comprising an implant of a selected ion species in second subset before said step of anodic etching.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2008-04-11 | 2008-10-11 | 2009-04-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2012-04-11 | 2012-10-11 | 2013-04-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2016-04-11 | 2016-10-11 | 2017-04-12 | $7700.00 | Window Closed / Lapsed |