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Electropolishing solution and methods for its use and recovery

Assignee: General Electric Co
•
Filing: 2002-09-13
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Granted: 2004-12-28
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Expires: 2022-09-13
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Abstract

Abstract An electrolyte solution containing an alkylene glycol and a chloride salt is useful for electropolishing metal substrates. An electropolishing method using the electrolyte solution is effective for polishing a varied of metals, including titanium and noble metals. The method avoids the handling and disposal challenges associated with previous methods using etching solutions containing hydrofluoric acid. A method of recycling the spent electrolyte solution is also described.

Inventors

  • 👤 Joseph Shoulian Zhu
  • 👤 Bang Mo Kim
  • 👤 Jeffery L. Schworm
  • 👤 Kevin C. Green
  • 👤 Paul Guilmette

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 11:15
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/04; B24B37/042; B23; B23H; B23H3/00; B23H3/08; C; C25; C25F; C25F3/00; C25F3/16; C25F7/00; C25F7/02

Claims Analysis

Total Claims: 17
Claim 1
Independent Claim 52 words
An electropolishing solution, comprising: about 75 to about 99 weight percent of an alkylene glycol; about 1 to about 25 weight percent of a chloride salt selected from the group consisting of alkali metal chlorides, alkaline earth metal chlorides, and combinations thereof; and less than or equal to 5 weight percent water.
Claim 2
Dependent Claim 52 words
An electropolishing solution, comprising: about 75 to about 99 weight percent of an alkylene glycol; about 1 to about 25 weight percent of a chloride salt selected from the group consisting of alkali metal chlorides, alkaline earth metal chlorides, and combinations thereof; and less than or equal to 5 weight percent water.
Claim 3
Dependent Claim 60 words
The electropolishing solution of claim 1 , wherein the alkylene glycol is selected from the group consisting of ethylene glycol, 1,2-propylene glycol, 1,3-propylene glycol, glycerol, 1,3-butylene glycol, 1,4-butylene glycol, 2,3-butylene glycol, 1,5-pentanediol, 1,6-hexanediol, 1,8-octanediol, 1,9-nonanediol, 1,10-decanediol, neopentyl glycol, 1,4-cyclohexanedimethanol, 2-methyl-1,3-propanediol, 2,2,4-trimethyl-1,3-pentanediol, diethylene glycol, dipropylene glycol, triethylene glycol, tripropylene glycol, dibutylene glycol, polyethylene glycol, polypropylene glycol, polytetramethylene glycol, and combinations thereof.
Claim 4
Dependent Claim 17 words
The electropolishing solution of claim 1 , wherein the alkylene glycol comprises ethylene glycol or propylene glycol.
Claim 5
Dependent Claim 31 words
The electropolishing solution of claim 1 , wherein the chloride salt is selected from the group consisting of lithium chloride, sodium chloride, potassium chloride, magnesium chloride, calcium chloride, and combinations thereof.
Claim 6
Dependent Claim 14 words
The electropolishing solution of claim 1 , wherein the chloride salt comprises potassium chloride.
Claim 7
Dependent Claim 15 words
The electropolishing solution of claim 1 , comprising less than 0.5 weight percent fluoride ion.
Claim 8
Dependent Claim 34 words
An electropolishing solution, comprising: about 75 to about 99 weight percent of ethylene glycol; about 1 to about 25 weight percent of potassium chloride; and less than or equal to 5 weight percent water.
Claim 9
Dependent Claim 34 words
An electropolishing solution, comprising: about 75 to about 99 weight percent of ethylene glycol; about 1 to about 25 weight percent of potassium chloride; and less than or equal to 5 weight percent water.
Claim 10
Dependent Claim 36 words
An electropolishing solution, consisting essentially of: about 75 to about 99 weight percent of ethylene glycol; about 1 to about 25 weight percent of potassium chloride; and less than or equal to 5 weight percent water.
Claim 11
Dependent Claim 36 words
An electropolishing solution, consisting essentially of: about 75 to about 99 weight percent of ethylene glycol; about 1 to about 25 weight percent of potassium chloride; and less than or equal to 5 weight percent water.
Claim 12
Dependent Claim 94 words
An electropolishing method, comprising: disposing a metallic substrate and at least one electrode in an electrolyte solution; wherein the electrolyte solution comprises about 75 to about 99 weight percent of an alkylene glycol; about 1 to about 25 weight percent of a chloride salt selected from the group consisting of alkali metal chlorides, alkaline earth metal chlorides, and combinations thereof; and less than or equal to 5 weight percent water, applying a current from a power source between the at least one electrode and the metallic substrate to remove metal from the metallic substrate.
Claim 13
Dependent Claim 94 words
An electropolishing method, comprising: disposing a metallic substrate and at least one electrode in an electrolyte solution; wherein the electrolyte solution comprises about 75 to about 99 weight percent of an alkylene glycol; about 1 to about 25 weight percent of a chloride salt selected from the group consisting of alkali metal chlorides, alkaline earth metal chlorides, and combinations thereof; and less than or equal to 5 weight percent water, applying a current from a power source between the at least one electrode and the metallic substrate to remove metal from the metallic substrate.
Claim 14
Dependent Claim 22 words
The electropolishing method of claim 9 , wherein the current is applied using a voltage of about 3 to about 100 volts.
Claim 15
Dependent Claim 25 words
The electropolishing method of claim 9 , wherein the current is applied at a current density of about 0.1 to about 20 amperes per square-centimeter.
Claim 16
Dependent Claim 21 words
The electropolishing method of claim 9 , wherein the electrolyte solution has a temperature of about 50 to about 200° C.
Claim 17
Dependent Claim 26 words
The electropolishing method of claim 9 , wherein metal is removed from the metallic substrate at a rate of about 1 to 200 micrometers per minute.

References Cited (Backward Citations)

US2687345A Cited
US3856636A Cited
US3841978A Cited
US4189357A Cited
US4269677A Cited
US6352636B1 Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2007-12-28 2008-06-28 2008-12-28 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2011-12-28 2012-06-28 2012-12-28 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2015-12-28 2016-06-28 2016-12-28 $7700.00 Window Closed / Lapsed

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