US6815360B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Silicon micro-machined projection with duct
Assignee: Hanger Solutions LLC
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Filing: 1999-07-22
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Granted: 2004-11-09
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Expires: 2019-07-22
Abstract
Abstract A method of providing a microprojection ( 180 ) on the surface of a first material, the microprojection having a base portion adjacent the first material and a remote, or a tip portion, and a duct ( 182 ) at least in a region of the tip portion and the method comprising micro-machining the first material to provide the micro-projection duct. Various uses of the microprojection are also disclosed including light guides and cuvettes from micro-analytical systems, microneedles for transdermal fluid delivery or the like.
Inventors
- 👤 Leigh T Canham
- 👤 Timothy I Cox
- 👤 Christopher L. Reeves
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 17:33
CPC Classifications
B; B81; B81C; B81C1/00; B81C1/00015; B81C1/00023; B81C1/00111; A; A61; A61B; A61B5/00; A61B5/145; A61B5/14507; A61B5/1451; A61B5/14514; A61B5/15; A61B5/150007; A61B5/150015; A61B5/150022; A61B5/150206; A61B5/150274; A61B5/150282; A61B5/150374; A61B5/150381; A61B5/150389; A61B5/150396; A61B5/150969; A61B5/150977; A61B5/150984; B81C1/00087; B81B; B81B2201/00; B81B2201/05; B81B2201/055
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
62 words
A method of providing a silicon micro-needle, the micro-needle having a base adjoining a silicon substrate, a tip remote from said base, and a duct passing from said base to said tip, the method comprising: a. providing a duct in said silicon substrate; and subsequently b. selectively removing the substrate from around the duct to provide a micro-needle coincident with the duct.
Claim 2
Independent Claim
62 words
A method of providing a silicon micro-needle, the micro-needle having a base adjoining a silicon substrate, a tip remote from said base, and a duct passing from said base to said tip, the method comprising: a. providing a duct in said silicon substrate; and subsequently b. selectively removing the substrate from around the duct to provide a micro-needle coincident with the duct.
Claim 3
Dependent Claim
26 words
A method according to claim 1 wherein a mask is lithographically provided on a substrate of the first material prior to the formation of the duct.
Claim 4
Dependent Claim
40 words
A method according to claim 2 wherein the mask is used to provide the duct which is fabricated by any one of the following techniques: plasma enhanced etching, laser ablation, light assisted anodisation, ion beam milling, focused ion beam milling.
Claim 5
Dependent Claim
23 words
A method according to claim 1 wherein the micro-needle is bounded by planes of the first material which have a low etch rate.
Claim 6
Dependent Claim
18 words
A method according to claim 4 wherein an anisotropic etch is used to selectively remove the first material.
Claim 7
Dependent Claim
30 words
A method according to claim 1 wherein the first material is removed by any one of the following methods: focused ion beam milling, etching combined with a domed resist mask.
Claim 8
Dependent Claim
35 words
A method according to claim 1 wherein the method is arranged to provide a micro-needle whose outer walls are inclined to a plane that is perpendicular to the substrate to which the micro-needles are adjacent.
Claim 9
Dependent Claim
24 words
A method according to claim 1 in which once the micro-needle has been created the method further includes linking the duct to a reservoir.
Claim 10
Dependent Claim
32 words
A method according to claim 8 in which a portion of the first material is removed from a side opposite a side of the first material where the micro-needle has been fabricated.
Claim 11
Dependent Claim
19 words
A method according to claim 8 in which the first material is attached to a second piece of material.
Claim 12
Dependent Claim
28 words
A method according to claim 10 in which the second piece of material has a channel which connects to the duct and links the duct to a reservoir.
Claim 13
Dependent Claim
26 words
A method according to claim 10 in which the first material has a channel which connects to the duct and links the duct to a reservoir.
Claim 14
Dependent Claim
18 words
A method according to claim 10 in which the two pieces of material are fabricated from same material.
Claim 15
Dependent Claim
21 words
A method according to claim 1 in which the micro-projection is fabricated substantially normal to the surface of the first material.
Claim 16
Dependent Claim
21 words
A method according to claim 1 wherein a surface region of the micro-needle is porosified after the needle has been fabricated.
Claim 17
Dependent Claim
28 words
A method according to claim 15 wherein the porosification is provided by one of the following techniques: electrochemical anodisation, or immersing the structure is a stain etching solution.
Claim 18
Independent Claim
55 words
A method of providing a silicon micro-needle, the micro-needle having a base adjoining a silicon substrate, a tip remote from said base, and a duct passing from said base to said tip, the method comprising: a. selectively removing the silicon substrate to provide a micro-needle; and subsequently b. providing a duct coincident with the micro-needle.
Claim 19
Independent Claim
55 words
A method of providing a silicon micro-needle, the micro-needle having a base adjoining a silicon substrate, a tip remote from said base, and a duct passing from said base to said tip, the method comprising: a. selectively removing the silicon substrate to provide a micro-needle; and subsequently b. providing a duct coincident with the micro-needle.
Claim 20
Dependent Claim
23 words
A method according to claim 17 wherein the micro-needle is bounded by planes of the first material which have a low etch rate.
Claim 21
Dependent Claim
18 words
A method according to claim 18 wherein an anisotropic etch is used to selectively remove the first material.
Claim 22
Dependent Claim
29 words
A method according to claim 17 wherein said micro-needle is formed by any one of the following techniques: focused ion beam milling, etching combined with a domed resist mask.
Claim 23
Dependent Claim
21 words
A method according to claim 17 wherein once the micro-needle has been formed a planar surface is provide covering the micro-needle.
Claim 24
Dependent Claim
19 words
A method according to claim 21 wherein the duct is provided by lithographic processes performed on the planar surface.
Claim 25
Dependent Claim
18 words
A method according to claim 22 wherein once the duct has been provided the planar surface is removed.
Claim 26
Independent Claim
84 words
A method of providing a micro-needle on the surface of a first material, the micro-needle having a base adjoining the first material, a tip remote from said base, and a duct passing from said base to said tip, the method comprising: a. providing a duct in said first material, b. lining said duct with a second material, and c. removing said first material from around said second material leaving a micro-needle fabricated from said second material attached to said first material and upstanding therefrom.
Claim 27
Independent Claim
84 words
A method of providing a micro-needle on the surface of a first material, the micro-needle having a base adjoining the first material, a tip remote from said base, and a duct passing from said base to said tip, the method comprising: a. providing a duct in said first material, b. lining said duct with a second material, and c. removing said first material from around said second material leaving a micro-needle fabricated from said second material attached to said first material and upstanding therefrom.
Claim 28
Dependent Claim
28 words
A method according to claim 24 , wherein the second material is any one of the following materials: SiO 2 , a metal, ceramic, a polymer, a semi-conductor.
Claim 29
Dependent Claim
35 words
A method according to claim 24 wherein a portion of the second material covering the inside surface of the duct is removed before or whilst the first material is removed from around the second material.
Claim 30
Dependent Claim
14 words
A method according to claim 24 wherein the first material is removed by etching.
Claim 31
Dependent Claim
26 words
A method according to claim 24 wherein a mask is lithographically provided on a substrate of the first material prior to the formation of the duct.
Claim 32
Dependent Claim
19 words
A method according to claim 28 wherein the mask is subsequently u used to control fabrication of the duct.
Claim 33
Dependent Claim
32 words
A method according to claim 24 wherein the duct is fabricated using any one of the following processes: plasma based etching, laser ablation, focused ion beam milling, light assisted anodisation of silicon.
Claim 34
Dependent Claim
21 words
A method according to claim 24 wherein the second material is provided by any one of the following processes: oxidiation, deposition.
Claim 35
Dependent Claim
19 words
A method according to claim 24 wherein the micro-needle is shaped by removing a portion of the second material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-11-09 | 2008-05-10 | 2008-11-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-11-09 | 2012-05-10 | 2012-11-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-11-09 | 2016-05-10 | 2016-11-09 | $7700.00 | Window Closed / Lapsed |