US5381753A
Expired / Lapsed
US
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Fabrication method of fine structures
Assignee: Panasonic Holdings Corp
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Filing: 1993-04-30
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Granted: 1995-01-17
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Expires: 2013-04-30
Abstract
Abstract A fabrication method provides fine structures which have few carrier trap centers and light absorption levels and find applications in quantum wires and quantum boxes having arbitrary configurations at least within a two-dimensional plane. The fabrication method comprises the steps of having a sharp tip held in close proximity to the surface of a substrate 1 and having a metal constituting the tip evaporated from the top. Alternatively, a metal contained in ambient vapor or a solution decomposed by a tunnel current or the like is provided. The metal is deposited locally on the substrate surface. A finely structured crystal is grown on the locally deposited region by a vapor phase-liquid phase-solid phase reaction.
Inventors
- 👤 Michio Okajima
- 👤 Osamu Kusumoto
- 👤 Takao Tohda
- 👤 Kazuo Yokoyama
- 👤 Motoshi Shibata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 04:19
CPC Classifications
C; C30; C30B; C30B11/00; B; B82; B82Y; B82Y10/00; B82Y30/00; C30B11/04; C30B11/08; C30B11/12; C30B29/00; C30B29/60
Claims Analysis
Total Claims: 42
Claim 1
Independent Claim
195 words
A method for fabricating fine structures, comprising the steps of: (a) providing a substrate formed from a substrate material and a sharp electro-conducting tip positioned close to a surface of the substrate, the tip containing a metal that is capable of being in eutectic phase equilibrium with the substrate material; (b) applying a specified electric field between the tip and the substrate, to evaporate the metal from the tip and deposit the metal as a micro mound or micro ridge in a region on the surface of the substrate; (c) heating the surface of the substrate to a temperature that is above a eutectic temperature of the metal and the substrate, the temperature of the surface being below the respective melting points of the metal and the substrate, so that the metal and substrate material in the region on the surface of the substrate where the micro mound or micro ridge of metal is deposited combine to form an alloy liquid drop; and (d) initiating a vapor phase-liquid phase-solid phase reaction to form a separate crystal from the alloy at the site of said liquid drop in the region on the surface of the substrate.
Claim 2
Independent Claim
195 words
A method for fabricating fine structures, comprising the steps of: (a) providing a substrate formed from a substrate material and a sharp electro-conducting tip positioned close to a surface of the substrate, the tip containing a metal that is capable of being in eutectic phase equilibrium with the substrate material; (b) applying a specified electric field between the tip and the substrate, to evaporate the metal from the tip and deposit the metal as a micro mound or micro ridge in a region on the surface of the substrate; (c) heating the surface of the substrate to a temperature that is above a eutectic temperature of the metal and the substrate, the temperature of the surface being below the respective melting points of the metal and the substrate, so that the metal and substrate material in the region on the surface of the substrate where the micro mound or micro ridge of metal is deposited combine to form an alloy liquid drop; and (d) initiating a vapor phase-liquid phase-solid phase reaction to form a separate crystal from the alloy at the site of said liquid drop in the region on the surface of the substrate.
Claim 3
Dependent Claim
62 words
A method according to claim 1, wherein step (d) includes the steps of: (1) providing a vapor comprising at lease one material selected from the group consisting of a halogenide, an organometallic compound and a hydride which contains at least a specified element; (2) exposing the surface of the substrate to the vapor; and (3) dissolving the specified element into the alloy.
Claim 4
Dependent Claim
27 words
A method according to claim 2, wherein step (d) includes, between steps (1) and (2), the step of adding energy to the vapor to decompose the vapor.
Claim 5
Dependent Claim
45 words
A method according to claim 2, wherein the substrate has a crystal growth speed in the region on the surface of the substrate and a surface growth speed outside of the region, the crystal growth speed being twice as fast as the surface growth speed.
Claim 6
Dependent Claim
31 words
A method according to claim 2, wherein step (d) includes the step of replacing the vapor with a further vapor while forming the crystal, the further vapor differing from the vapor.
Claim 7
Dependent Claim
36 words
A method according to claim 1, wherein step (b) includes moving the tip over the surface of the substrate while depositing the metal, to form a micro ridge of metal on the surface of the substrate.
Claim 8
Dependent Claim
31 words
A method according to claim 1, further comprising, after step (d), forming a further crystal at least on a remaining portion of the surface of the substrate outside of the region.
Claim 9
Dependent Claim
36 words
A method according to claim 1, wherein the metal comprises at least one material selected from the group consisting of gold, silver, copper, platinum, palladium, nickel, iridium, rhodium, cobalt, osmium, ruthenium, iron, mercury, cadmium and zinc.
Claim 10
Dependent Claim
21 words
A method according to claim 1, wherein the metal has a segregation coefficient in the crystal that is less than 1.
Claim 11
Dependent Claim
22 words
A method according to claim 1, wherein the crystal is formed from one of a single element semiconductor and a compound semiconductor.
Claim 12
Dependent Claim
22 words
A method according to claim 1, wherein the substrate is formed from one of a single element semiconductor and a compound semiconductor.
Claim 13
Dependent Claim
32 words
A method according to claim 1, wherein a portion of the surface of the substrate that is in the region on the surface of the substrate is formed from a single crystal.
Claim 14
Dependent Claim
43 words
A method according to claim 1, wherein step (a) includes the step of selecting a substrate having a crystalline orientation, such that in step (d) the separate crystal is formed at an angle that is not perpendicular to the surface of the substrate.
Claim 15
Independent Claim
220 words
A method for fabricating fine structures, comprising the steps of: (a) placing a substrate formed from a substrate material and a sharp electro-conducting tip in a vapor, the vapor including a metal that is capable of being in eutectic phase equilibrium with the substrate material; (b) positioning the tip close to a surface of the substrate; (c) applying a specified electric field between the tip and the substrate so that a current passes between the substrate and the tip to deposit the metal as a micro mound or micro ridge in a region on the surface of the substrate, the current being selected from the group consisting of a tunnel current and a field emission current; (d) heating the surface of the substrate to a temperature that is above a eutectic temperature of the metal and the substrate, the temperature of the surface being below the respective melting points of the metal and the substrate, so that the metal and substrate material in the region on the surface of the substrate where the micro mound or micro ridge is deposited combine to form an alloy liquid drop; and (e) initiating a vapor phase-liquid phase-solid phase reaction to form a separate crystal from the alloy at the site of said liquid drop in the region on the surface of the substrate.
Claim 16
Independent Claim
220 words
A method for fabricating fine structures, comprising the steps of: (a) placing a substrate formed from a substrate material and a sharp electro-conducting tip in a vapor, the vapor including a metal that is capable of being in eutectic phase equilibrium with the substrate material; (b) positioning the tip close to a surface of the substrate; (c) applying a specified electric field between the tip and the substrate so that a current passes between the substrate and the tip to deposit the metal as a micro mound or micro ridge in a region on the surface of the substrate, the current being selected from the group consisting of a tunnel current and a field emission current; (d) heating the surface of the substrate to a temperature that is above a eutectic temperature of the metal and the substrate, the temperature of the surface being below the respective melting points of the metal and the substrate, so that the metal and substrate material in the region on the surface of the substrate where the micro mound or micro ridge is deposited combine to form an alloy liquid drop; and (e) initiating a vapor phase-liquid phase-solid phase reaction to form a separate crystal from the alloy at the site of said liquid drop in the region on the surface of the substrate.
Claim 17
Dependent Claim
46 words
A method according to claim 14, wherein: the vapor includes at least one material selected from the group consisting of a halogenide, an organometallic compound and a hydride which contains at least a specified element; and step (e) includes dissolving the specified element into the alloy.
Claim 18
Dependent Claim
13 words
A method according to claim 15, wherein step (c) includes decomposing the vapor.
Claim 19
Dependent Claim
45 words
A method according to claim 15, wherein the substrate has a crystal growth speed in the region on the surface of the substrate and a surface growth speed outside of the region, the crystal growth speed being twice as fast as the surface growth speed.
Claim 20
Dependent Claim
32 words
A method according to claim 14, wherein step (e) includes the step of replacing the vapor with a further vapor while forming the separate crystal, the further vapor differing from the vapor.
Claim 21
Dependent Claim
36 words
A method according to claim 14, wherein step (c) includes moving the tip over the surface of the substrate while depositing the metal, to form a micro ridge of metal on the surface of the substrate.
Claim 22
Dependent Claim
37 words
A method according to claim 14, further comprising, after step (e), forming a further crystal at least on a remaining portion of the surface of the substrate outside of the region on the surface of the substrate.
Claim 23
Dependent Claim
36 words
A method according to claim 14, wherein the metal comprises at least one material selected from the group consisting of gold, silver, copper, platinum, palladium, nickel, iridium, rhodium, cobalt, osmium, ruthenium, iron, mercury, cadmium and zinc.
Claim 24
Dependent Claim
21 words
A method according to claim 14, wherein the metal has a segregation coefficient in the crystal that is less than 1.
Claim 25
Dependent Claim
22 words
A method according to claim 14, wherein the crystal is formed from one of a single element semiconductor and a compound semiconductor.
Claim 26
Dependent Claim
22 words
A method according to claim 14, wherein the substrate is formed from one of a single element semiconductor and a compound semiconductor.
Claim 27
Dependent Claim
32 words
A method according to claim 14, wherein a portion of the surface of the substrate that is in the region on the surface of the substrate is formed from a single crystal.
Claim 28
Dependent Claim
40 words
A method according to claim 14, wherein step (a) includes a step of selecting a substrate having a crystalline orientation, such that in step (e) the separate crystal is formed at an angle that is not perpendicular to the surface.
Claim 29
Independent Claim
223 words
A method for fabricating fine structures, comprising the steps of: (a) placing a substrate formed from a substrate material and a sharp electro-conducting tip in a solution, the solution including a metal that is capable of being in eutectic phase equilibrium with the substrate material; (b) positioning the tip close to a surface of the substrate; (c) applying a specified electric field between the tip and the substrate so that a current passes between the substrate and the tip to deposit the metal as a micro mound or micro ridge in a region on the surface of the substrate, the current being selected from the group consisting of a tunnel current, a field emission current and an ion current; (d) heating the surface of the substrate to a temperature that is above a eutectic temperature of the metal and the substrate, the temperature of the surface being below the respective melting points of the metal and the substrate, so that the metal and substrate material in the region on the surface of the substrate where the micro mound or micro ridge is deposited combine to form an alloy liquid drop; and (e) initiating a vapor phase-liquid phase-solid phase reaction to form a separate crystal from the alloy at the site of said liquid drop in the region on the surface of the substrate.
Claim 30
Independent Claim
223 words
A method for fabricating fine structures, comprising the steps of: (a) placing a substrate formed from a substrate material and a sharp electro-conducting tip in a solution, the solution including a metal that is capable of being in eutectic phase equilibrium with the substrate material; (b) positioning the tip close to a surface of the substrate; (c) applying a specified electric field between the tip and the substrate so that a current passes between the substrate and the tip to deposit the metal as a micro mound or micro ridge in a region on the surface of the substrate, the current being selected from the group consisting of a tunnel current, a field emission current and an ion current; (d) heating the surface of the substrate to a temperature that is above a eutectic temperature of the metal and the substrate, the temperature of the surface being below the respective melting points of the metal and the substrate, so that the metal and substrate material in the region on the surface of the substrate where the micro mound or micro ridge is deposited combine to form an alloy liquid drop; and (e) initiating a vapor phase-liquid phase-solid phase reaction to form a separate crystal from the alloy at the site of said liquid drop in the region on the surface of the substrate.
Claim 31
Dependent Claim
62 words
A method according to claim 27, wherein step (e) includes the steps of: (1) providing a vapor comprising at least one material selected from the group consisting of a halogenides an organometallic compound and a hydride which contains at least a specified element; (2) exposing the surface of the substrate to the vapor; and (3) dissolving the specified element into the alloy.
Claim 32
Dependent Claim
27 words
A method according to claim 28, wherein step (e) includes, between steps (1) and (2), the step of adding energy to the vapor to decompose the vapor.
Claim 33
Dependent Claim
45 words
A method according to claim 28, wherein the substrate has a crystal growth speed in the region on the surface of the substrate and a surface growth speed outside of the region, the crystal growth speed being twice as fast as the surface growth speed.
Claim 34
Dependent Claim
31 words
A method according to claim 28, wherein step (e) includes the step of replacing the vapor with a further vapor while forming the crystal, the further vapor differing from the vapor.
Claim 35
Dependent Claim
36 words
A method according to claim 27, wherein step (c) includes moving the tip over the surface of the substrate while depositing the metal, to form a micro ridge of metal on the surface of the substrate.
Claim 36
Dependent Claim
31 words
A method according to claim 27, further comprising, after step (e), forming a further crystal at least on a remaining portion of the surface of the substrate outside of the region.
Claim 37
Dependent Claim
36 words
A method according to claim 27, wherein the metal comprises at least one material selected from the group consisting of gold, silver, copper, platinum, palladium, nickel, iridium, rhodium, cobalt, osmium, ruthenium, iron, mercury, cadmium and zinc.
Claim 38
Dependent Claim
21 words
A method according to claim 27, wherein the metal has a segregation coefficient in the crystal that is less than 1.
Claim 39
Dependent Claim
22 words
A method according to claim 27, wherein the crystal is formed from one of a single element semiconductor and a compound semiconductor.
Claim 40
Dependent Claim
22 words
A method according to claim 27, wherein the substrate is formed from one of a single element semiconductor and a compound semiconductor.
Claim 41
Dependent Claim
32 words
A method according to claim 27, wherein a portion of the surface of the substrate that is in the region on the surface of the substrate is formed from a single crystal.
Claim 42
Dependent Claim
40 words
A method according to claim 27, wherein step (a) includes the step of selecting a substrate having a crystalline orientation, such that in step (e) the separate crystal is formed at an angle than is not perpendicular to the surface.
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