Patent US6208030B1 successfully refreshed from Google Patents.
Patent US6752869B2 successfully refreshed from Google Patents.
US6752869B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Atomic layer deposition using organometallic complex with β-diketone ligand
Assignee: Samsung Electronics Co Ltd
•
Filing: 2002-06-04
•
Granted: 2004-06-22
•
Expires: 2022-06-04
Abstract
Abstract An atomic layer deposition (ALD) method, whereby an organometallic complex with a beta-diketone ligand is chemically adsorbed onto a substrate and oxidized by activated oxygen radicals to deposit an atomic metal oxide layer on the substrate, uses reactive oxygen radicals generated using plasma and an organometallic complex having a beta-diketone ligand as a precursor, which could not be used in a thermal ALD method using oxygen or water as an oxidizing agent, to address and solve the problem of the removal of organic substances using organometallic complexes with beta-diketone ligands, thereby enabling diversification of the precursors for ALD and formation of excellent oxide films at low temperatures.
Inventors
- 👤 Jung-hyun Lee
- 👤 Dae-sig Kim
- 👤 Yo-sep Min
- 👤 Young-Jin Cho
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:16
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45523; C23C16/45525; C23C16/45527; C23C16/45536; C23C16/45542; H; H10; H10P; H10P14/00; H10P14/20; C23C16/22; C23C16/30; C23C16/40; C23C16/405; C23C16/45553; C23C16/50; C23C16/505; C23C16/509; C23C16/5096
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
40 words
An atomic layer deposition (ALD) method comprising chemically adsorbing an organometallic complex with a β-diketone ligand onto a substrate and oxidizing the chemically adsorbed organometallic complex using activated oxygen radicals to deposit an atomic metal oxide layer on the substrate.
Claim 2
Dependent Claim
40 words
An atomic layer deposition (ALD) method comprising chemically adsorbing an organometallic complex with a β-diketone ligand onto a substrate and oxidizing the chemically adsorbed organometallic complex using activated oxygen radicals to deposit an atomic metal oxide layer on the substrate.
Claim 3
Dependent Claim
41 words
The method as claimed in claim 1 , wherein the activated oxygen radicals are generated by reacting plasma as an energy source with at least one oxygen-containing gas selected from the group consisting of oxygen, ozone, nitrogen monoxide, and water vapor.
Claim 4
Dependent Claim
33 words
The method as claimed in claim 2 , wherein the at least one oxygen containing gas is irradiated with ultraviolet (UV) light during reaction with the plasma to generate the activated oxygen radicals.
Claim 5
Dependent Claim
147 words
The method as claimed in claim 1 , wherein the organometallic complex with a β-diketone ligand has formula (1) below: wherein is a metal ion with a valence number of 1 to 6; X is O, NH, or S; Y is O, N, or S; and R 1 , R 2 , and R 3 are independently a hydrogen atom, a linear or branched unsubstituted alkyl group having 2 to 10 carbon atoms, a linear or branched alkoxy group-substituted alkyl group having 2 to 10 carbon atoms, a linear or branched alkoxyalkyleneoxy group-substituted alkyl group having 2 to 10 carbon atoms, or an alkylamine group having 2 to 10 carbon atoms; I is 1 or 2; L is an anionic ligand coordinated to metal M; m is an integer from 0 to 5; A is a neutral ligand; and n is an integer from 0 to 4.
Claim 6
Dependent Claim
50 words
The method as claimed in claim 4 , wherein; in formula (1), L is an alkoxy group having 1 to 10 carbon atoms, an alkyl group having 1 to 5 carbon atoms or an alkylamine or alkylsulfide group having 1 to 10 carbon atoms, and A is oligoether or amine.
Claim 7
Dependent Claim
52 words
The method as claimed in claim 1 , wherein the organometallic complex with a β-diketone ligand is selected from the group consisting of compounds having formulae (2) through (13) below: where, i-OPr stand for isopropyl mthd stands for methoxytetraethylheptanedionate metmhd stands for methoxyethoxytetramethylheptanedionate dmpd stands for dimethylpentadiol, and depd stands for diethylpentadiol.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-06-22 | 2007-12-22 | 2008-06-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-06-22 | 2011-12-22 | 2012-06-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-06-22 | 2015-12-22 | 2016-06-22 | $7700.00 | Window Closed / Lapsed |