US6735745B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and system for detecting defects
Assignee: Applied Materials Inc
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Filing: 2002-02-07
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Granted: 2004-05-11
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Expires: 2022-02-07
Abstract
Abstract Method for detecting defects, the method comprising the procedures of identifying theoretically-symmetrical windows in an object-image; analyzing the theoretically-symmetrical windows according to expected symmetry of the theoretically-symmetrical windows; and determining the presence of defects according to a deviation from the expected symmetry.
Inventors
- 👤 Nimrod Sarig
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 17:07
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/68; G03F1/82; G03F1/84; G06; G06T; G06T7/00; G06T7/0002; G06T7/0004; G06T7/0006; G06T7/60; G06T7/68; G06T2207/00; G06T2207/30; G06T2207/30108; G06T2207/30148
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
42 words
Method for detecting defects, the method comprising the procedures of: identifying theoretically-symmetrical windows in an object-image; analyzing said theoretically-symmetrical windows according to expected symmetry of said theoretically-symmetrical windows; and determining the presence of defects according to a deviation from said expected symmetry.
Claim 2
Dependent Claim
42 words
Method for detecting defects, the method comprising the procedures of: identifying theoretically-symmetrical windows in an object-image; analyzing said theoretically-symmetrical windows according to expected symmetry of said theoretically-symmetrical windows; and determining the presence of defects according to a deviation from said expected symmetry.
Claim 3
Dependent Claim
21 words
The method according to claim 1 , further comprising a preliminary procedure of scanning a physical object, thereby producing said object-image.
Claim 4
Dependent Claim
34 words
The method according to claim 2 , further comprising a preliminary procedure of analyzing a database-image thereby identifying symmetrical database-image windows therein, wherein said theoretically-symmetrical windows are identified according to said symmetrical database-image windows.
Claim 5
Dependent Claim
15 words
The method according to claim 2 , wherein said physical object is a photographic mask.
Claim 6
Dependent Claim
14 words
The method according to claim 2 , wherein said physical object is a reticle.
Claim 7
Dependent Claim
15 words
The method according to claim 2 , wherein said physical object is a printed material.
Claim 8
Dependent Claim
15 words
The method according to claim 2 , wherein said physical object is a fabricated material.
Claim 9
Dependent Claim
34 words
The method according to claim 1 , further comprising a preliminary procedure of analyzing a database-image thereby identifying symmetrical database-image windows therein, wherein said theoretically-symmetrical windows are identified according to said symmetrical database-image windows.
Claim 10
Dependent Claim
39 words
The method according to claim 8 , wherein said procedure of analyzing said database-image comprises the procedures of: identifying at least one database-image element; and determining a symmetrical database-image window for each of said at least one database-image element.
Claim 11
Dependent Claim
26 words
The method according to claim 9 , wherein said procedure of analyzing a database-image further comprises a procedure of determining symmetry properties of said database-image element.
Claim 12
Dependent Claim
25 words
The method according to claim 10 , wherein said procedure of analyzing said database-image further comprises a procedure of determining dimensions of said database-image element.
Claim 13
Dependent Claim
25 words
The method according to claim 9 , wherein said procedure of analyzing a database-image further comprises a procedure of determining dimensions of said database-image element.
Claim 14
Dependent Claim
43 words
The method according to claim 8 , wherein said procedure of identifying theoretically-symmetrical windows in an object-image, comprises procedures of: registering a symmetrical database-image window in said object-image, thereby identifying an initial symmetry-testing window; and identifying said symmetry-testing window as a theoretically-symmetrical window.
Claim 15
Dependent Claim
16 words
The method according to claim 13 , further comprising a procedure of refining said symmetry-testing window.
Claim 16
Dependent Claim
22 words
The method according to claim 14 , wherein said procedure of refining said symmetry-testing window is performed according to a symmetry-based optimization.
Claim 17
Dependent Claim
24 words
The method according to claim 15 , further comprising a procedure of refining said symmetry-testing window by interpolating results calculated in said symmetry-based optimization.
Claim 18
Dependent Claim
37 words
The method according to claim 15 , wherein said procedure of refining said symmetry-testing window, comprises procedures of: producing a symmetry-assessment value for said symmetry-testing window according to a symmetry-assessment function; and identifying an optimal symmetry-testing window.
Claim 19
Dependent Claim
64 words
The method according to claim 17 , further comprising the procedure identifying another symmetry-testing window in said object-image, after said procedure of producing a symmetry-assessment value, wherein a sequence of said procedure of identifying another symmetry-testing window and said procedure of producing a symmetry-assessment value, is repeated for at least one iteration, each of said at least one iteration involving a different symmetry-testing window.
Claim 20
Dependent Claim
25 words
The method according to claim 17 , wherein said procedure of refining said symmetry-testing window, further comprises a preliminary procedure of defining said symmetry-assessment function.
Claim 21
Dependent Claim
82 words
The method according to claim 13 , wherein said procedure of registering a symmetrical database-image window in said object-image, comprises procedures of: identifying an object-image window; producing an alignment-assessment value for said object-image window according to an alignment-assessment function; and identifying an optimal object-image window; wherein a sequence of said procedure of identifying an object-image window and said procedure of producing an alignment-assessment value, is repeated for a plurality of iterations, each of said plurality of iterations involving a different object-image window.
Claim 22
Dependent Claim
29 words
The method according to claim 20 , wherein said procedure of registering a symmetrical database-image window in said object-image, further comprises a preliminary procedure of defining said alignment-assessment function.
Claim 23
Dependent Claim
58 words
The method according to claim 1 , wherein said procedure of analyzing theoretically-symmetrical windows comprises procedures of: identifying theoretically symmetrically-similar windows and a manipulation associated therewith, from said theoretically-symmetrical window; manipulating at least one of said theoretically symmetrically-similar windows thereby producing a plurality of theoretically-identical windows; and comparing said theoretically-identical windows there between, thereby producing a comparison result.
Claim 24
Dependent Claim
14 words
The method according to claim 1 , wherein said procedures are performed in real-time.
Claim 25
Dependent Claim
13 words
The method according to claim 1 , wherein said expected symmetry is axial.
Claim 26
Dependent Claim
13 words
The method according to claim 1 , wherein said expected symmetry is rotational.
Claim 27
Dependent Claim
13 words
The method according to claim 1 , wherein said expected symmetry is axial-rotational.
Claim 28
Dependent Claim
90 words
System for detecting defects in an object-image, the system comprising: a storage unit, at least storing at least a portion of said object-image; and a processor coupled with said storage unit, a database and a human interface, wherein said processor identifies theoretically-symmetrical windows in said at least a portion of said object-image, according to an analysis of at least a portion of a database-image retrieved from said database; and wherein said processor detects defects in said theoretically-symmetrical windows according to a deviation from expected symmetry properties of said theoretically-symmetrical windows.
Claim 29
Dependent Claim
90 words
System for detecting defects in an object-image, the system comprising: a storage unit, at least storing at least a portion of said object-image; and a processor coupled with said storage unit, a database and a human interface, wherein said processor identifies theoretically-symmetrical windows in said at least a portion of said object-image, according to an analysis of at least a portion of a database-image retrieved from said database; and wherein said processor detects defects in said theoretically-symmetrical windows according to a deviation from expected symmetry properties of said theoretically-symmetrical windows.
Claim 30
Dependent Claim
14 words
The system according to claim 27 , further comprising a scanner, producing said object-image.
Claim 31
Dependent Claim
43 words
The system according to claim 27 , wherein said processor further identifies at least one database-image element in said database-image; and wherein said processor further determines a symmetrical database-image window respective of said at least one database-image element, when said database-image is symmetrical.
Claim 32
Dependent Claim
20 words
The system according to claim 29 , wherein said processor further determines dimensions and symmetry properties of said database-image element.
Claim 33
Dependent Claim
36 words
The system of according to claim 30 , wherein said processor registers a symmetrical database-image window in said object-image, thereby identifying a symmetry-testing window; and wherein said processor identifies said symmetry-testing window as a theoretically-symmetrical window.
Claim 34
Dependent Claim
15 words
The system according to claim 31 , wherein said processor further refines said symmetry-testing window.
Claim 35
Dependent Claim
22 words
The system according to claim 32 , wherein said processor performs said refining of said symmetry-testing window according to a symmetry-based optimization.
Claim 36
Dependent Claim
23 words
The system according to claim 33 , wherein said processor further refines said symmetry-testing window by interpolating results calculated in said symmetry-based optimization.
Claim 37
Dependent Claim
23 words
The system according to claim 33 , wherein said processor further refines said symmetry-testing window by interpolating results calculated in said symmetry-based optimization.
Claim 38
Dependent Claim
15 words
The system according to claim 27 , wherein said storage unit further stores said database.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-05-11 | 2007-11-10 | 2008-05-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-05-11 | 2011-11-10 | 2012-05-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-05-11 | 2015-11-10 | 2016-05-11 | $7700.00 | Window Closed / Lapsed |