US6607945B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser-assisted silicide fuse programming
Assignee: Advanced Micro Devices Inc
•
Filing: 2001-05-24
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Granted: 2003-08-19
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Expires: 2021-05-24
Abstract
Abstract A method is provided, the method comprising programming a silicide fuse by passing a current through the silicide fuse while substantially simultaneously irradiating the silicide fuse with a laser.
Inventors
- 👤 Ting Yiu Tsui
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 17:05
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/493; H10W20/494
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
25 words
A method comprising: programming a silicide fuse by passing a current through the silicide fuse while substantially simultaneously irradiating the silicide fuse with a laser.
Claim 2
Independent Claim
25 words
A method comprising: programming a silicide fuse by passing a current through the silicide fuse while substantially simultaneously irradiating the silicide fuse with a laser.
Claim 3
Dependent Claim
29 words
The method of claim 1 , wherein passing the current through the silicide fuse comprises subjecting the silicide fuse to a voltage of no more than about 2 V.
Claim 4
Dependent Claim
32 words
The method of claim 1 , wherein irradiating the suicide fuse with the laser comprises irradiating the suicide fuse with a laser energy substantially equal to or greater than about 0.475 microJoules.
Claim 5
Dependent Claim
32 words
The method of claim 2 , wherein irradiating the suicide fuse with the laser comprises irradiating the silicide fuse with a laser energy substantially equal to or greater than about 0.475 microJoules.
Claim 6
Dependent Claim
23 words
The method of claim 1 , wherein irradiating the silicide fuse with the laser comprises irradiating the silicide fuse with a pulsed laser.
Claim 7
Dependent Claim
39 words
The method of claim 5 , wherein irradiating the silicide fuse with the pulsed laser comprises irradiating the silicide fuse with the pulsed laser for a time period in a range of about 1 microsecond to about 2 seconds.
Claim 8
Dependent Claim
23 words
The method of claim 2 , wherein irradiating the silicide fuse with the laser comprises irradiating the silicide fuse with a pulsed laser.
Claim 9
Dependent Claim
39 words
The method of claim 7 , wherein irradiating the silicide fuse with the pulsed laser comprises irradiating the silicide fuse with the pulsed laser for a time period in a range of about 1 microsecond to about 2 seconds.
Claim 10
Dependent Claim
48 words
The method of claim 3 , wherein irradiating the silicide fuse with the laser energy substantially equal to or greater than about 0.475 microJoules comprises irradiating the silicide fuse with a pulsed laser capable of providing a laser energy substantially equal to or greater than about 0.475 microJoules.
Claim 11
Dependent Claim
54 words
The method of claim 9 , wherein irradiating the silicide fuse with the pulsed laser comprises irradiating the silicide fuse with the pulsed laser capable of providing the laser energy substantially equal to or greater than about 0.475 microJoules for a time period in a range of about 1 microsecond to about 2 seconds.
Claim 12
Independent Claim
40 words
A method comprising: programming a plurality of silicide fuses by passing a current through at least one of the plurality of silicide fuses while substantially simultaneously irradiating the at least one of the plurality of silicide fuses with a laser.
Claim 13
Independent Claim
40 words
A method comprising: programming a plurality of silicide fuses by passing a current through at least one of the plurality of silicide fuses while substantially simultaneously irradiating the at least one of the plurality of silicide fuses with a laser.
Claim 14
Dependent Claim
43 words
The method of claim 11 , wherein passing the current through the at least one of the plurality of silicide fuses comprises subjecting the at least one of the plurality of silicide fuses to a voltage of no more than about 2 V.
Claim 15
Dependent Claim
55 words
The method of claim 11 , wherein irradiating the at least one of the plurality of silicide fuses with the laser comprises irradiating the at least one of the plurality of suicide fuses with a laser energy substantially equal to or greater than about 0.475 microJoules and substantially equal to or less than 1.6 microJoules.
Claim 16
Dependent Claim
55 words
The method of claim 12 , wherein irradiating the at least one of the plurality of silicide fuses with the laser comprises irradiating the at least one of the plurality of silicide fuses with a laser energy substantially equal to or greater than about 0.475 microJoules and substantially equal to or less than 1.6 microJoules.
Claim 17
Dependent Claim
37 words
The method of claim 11 , wherein irradiating the at least one of the plurality of silicide fuses with the laser comprises irradiating the at least one of the plurality of silicide fuses with a pulsed laser.
Claim 18
Dependent Claim
53 words
The method of claim 15 , wherein irradiating the at least one of the plurality of silicide fuses with the pulsed laser comprises irradiating the at least one of the plurality of silicide fuses with the pulsed laser for a time period in a range of about 1 microsecond to about 2 seconds.
Claim 19
Dependent Claim
37 words
The method of claim 12 , wherein irradiating the at least one of the plurality of silicide fuses with the laser comprises irradiating the at least one of the plurality of silicide fuses with a pulsed laser.
Claim 20
Dependent Claim
53 words
The method of claim 17 , wherein irradiating the at least one of the plurality of silicide fuses with the pulsed laser comprises irradiating the at least one of the plurality of silicide fuses with the pulsed laser for a time period in a range of about 1 microsecond to about 2 seconds.
Claim 21
Dependent Claim
80 words
The method of claim 13 , wherein irradiating the at least one of the plurality of silicide fuses with the laser energy substantially equal to or greater than about 0.475 microJoules and substantially equal to or less than 1.6 microJoules comprises irradiating the at least one of the plurality of silicide fuses with a pulsed laser capable of providing a laser energy substantially equal to or greater than about 0.475 microJoules and substantially equal to or less than 1.6 microJoules.
Claim 22
Dependent Claim
53 words
The method of claim 19 , wherein irradiating the at least one of the plurality of silicide fuses with the pulsed laser comprises irradiating the at least one of the plurality of silicide fuses with the pulsed laser for a time period in a range of about 1 microsecond to about 2 seconds.
Claim 23
Independent Claim
63 words
A method comprising: forming a plurality of semiconductor devices; forming a plurality of silicide fuses between at least some of the plurality of semiconductor devices; and programming the plurality of silicide fuses by passing a current through at least one of the plurality of silicide fuses while substantially simultaneously irradiating the at least one of the plurality of silicide fuses with a laser.
Claim 24
Independent Claim
63 words
A method comprising: forming a plurality of semiconductor devices; forming a plurality of silicide fuses between at least some of the plurality of semiconductor devices; and programming the plurality of silicide fuses by passing a current through at least one of the plurality of silicide fuses while substantially simultaneously irradiating the at least one of the plurality of silicide fuses with a laser.
Claim 25
Dependent Claim
43 words
The method of claim 21 , wherein passing the current through the at least one of the plurality of silicide fuses comprises subjecting the at least one of the plurality of silicide fuses to a voltage of no more than about 2 V.
Claim 26
Dependent Claim
55 words
The method of claim 21 , wherein irradiating the at least one of the plurality of suicide fuses with the laser comprises irradiating the at least one of the plurality of suicide fuses with a laser energy substantially equal to or greater than about 0.475 microJoules and substantially equal to or less than 1.6 microJoules.
Claim 27
Dependent Claim
55 words
The method of claim 22 , wherein irradiating the at least one of the plurality of suicide fuses with the laser comprises irradiating the at least one of the plurality of silicide fuses with a laser energy substantially equal to or greater than about 0.475 microJoules and substantially equal to or less than 1.6 microJoules.
Claim 28
Dependent Claim
37 words
The method of claim 21 , wherein irradiating the at least one of the plurality of silicide fuses with the laser comprises irradiating the at least one of the plurality of silicide fuses with a pulsed laser.
Claim 29
Dependent Claim
53 words
The method of claim 25 , wherein irradiating the at least one of the plurality of silicide fuses with the pulsed laser comprises irradiating the at least one of the plurality of silicide fuses with the pulsed laser for a time period in a range of about 1 microsecond to about 2 seconds.
Claim 30
Dependent Claim
37 words
The method of claim 22 , wherein irradiating the at least one of the plurality of silicide fuses with the laser comprises irradiating the at least one of the plurality of silicide fuses with a pulsed laser.
Claim 31
Dependent Claim
53 words
The method of claim 27 , wherein irradiating the at least one of the plurality of silicide fuses with the pulsed laser comprises irradiating the at least one of the plurality of silicide fuses with the pulsed laser for a time period in a range of about 1 microsecond to about 2 seconds.
Claim 32
Dependent Claim
61 words
The method of claim 23 , wherein irradiating the at least one of the plurality of silicide fuses with the laser comprises irradiating the at least one of the plurality of silicide fuses with a pulsed laser capable of providing a laser energy substantially equal to or greater than about 0.475 microJoules and substantially equal to or less than 1.6 microJoules.
Claim 33
Dependent Claim
53 words
The method of claim 29 , wherein irradiating the at least one of the plurality of suicide fuses with the pulsed laser comprises irradiating the at least one of the plurality of silicide fuses with the pulsed laser for a time period in a range of about 1 microsecond to about 2 seconds.
Claim 34
Dependent Claim
42 words
The method of claim 3 , wherein irradiating the silicide fuse with the laser energy substantially equal to or greater than about 0.475 microJoules further comprises irradiating the silicide fuse with the laser energy substantially equal to or less than 1.6 microJoules.
Claim 35
Dependent Claim
42 words
The method of claim 4 , wherein irradiating the suicide fuse with the laser energy substantially equal to or greater than about 0.475 microJoules further comprises irradiating the silicide fuse with the laser energy substantially equal to or less than 1.6 microJoules.
Claim 36
Dependent Claim
54 words
The method of claim 9 , wherein irradiating the silicide fuse with a pulsed laser capable of providing the laser energy substantially equal to or greater than about 0.475 microJoules further comprises irradiating the silicide fuse with a pulsed laser capable of providing the laser energy substantially equal to or less than 1.6 microJoules.
Claim 37
Dependent Claim
84 words
The method of claim 10 , wherein irradiating the silicide fuse with the pulsed laser capable of providing the laser energy substantially equal to or greater than about 0.475 microJoules for a time period in a range of about 1 microsecond to about 2 seconds further comprises irradiating the silicide fuse with the pulsed laser capable of providing the laser energy substantially equal to or less than 1.6 microJoules for a time period in a range of about 1 microsecond to about 2 seconds.
References Cited (Backward Citations)
US4535219A
Cited
US5389814A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2006-08-18 | 2007-02-17 | 2007-08-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-08-18 | 2011-02-17 | 2011-08-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-08-18 | 2015-02-17 | 2015-08-19 | $7700.00 | Window Closed / Lapsed |