Patent US6586761B2 successfully refreshed from Google Patents.
US6586761B2
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Phase change material memory device
Assignee: Micron Technology Inc
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Filing: 2001-09-07
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Granted: 2003-07-01
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Expires: 2021-09-07
Abstract
Abstract A phase change material memory cell may be formed with singulated, cup-shaped phase change material. The interior of the cup-shaped phase change material may be filled with a thermal insulating material. As a result, heat losses upwardly through the phase change material may be reduced and adhesion problems between the phase change material and the rest of the device may likewise be reduced in some embodiments. In addition, a barrier layer may be provided between the upper electrode and the remainder of the device that may reduce species incorporation from the top electrode into the phase change material, in some embodiments. Chemical mechanical planarization may be utilized to define the phase change material reducing the effects of phase change material dry etching in some embodiments.
Inventors
- 👤 Tyler A. Lowrey
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 11:11
CPC Classifications
H; H10; H10N; H10N70/00; H10N70/20; H10N70/231; H10B; H10B63/00; H10B63/80; H10N70/011; H10N70/061; H10N70/068; H10N70/801; H10N70/821; H10N70/826; H10N70/8265; H10N70/861; H10N70/8616; H10N70/881; H10N70/882; H10N70/8828
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
43 words
A memory comprising: a support structure; an insulator over said support structure, said insulator having an opening defined in said insulator; a cup-shaped phase change material in said opening, said cup-shaped phase change material arranged substantially entirely within said opening in said insulator.
Claim 2
Dependent Claim
43 words
A memory comprising: a support structure; an insulator over said support structure, said insulator having an opening defined in said insulator; a cup-shaped phase change material in said opening, said cup-shaped phase change material arranged substantially entirely within said opening in said insulator.
Claim 3
Dependent Claim
14 words
The memory of claim 1 including an insulator in said cup-shaped phase change material.
Claim 4
Dependent Claim
12 words
The memory of claim 1 wherein said phase change material is encapsulated.
Claim 5
Dependent Claim
12 words
The memory of claim 1 wherein said phase change material is singulated.
Claim 6
Dependent Claim
23 words
The memory of claim 1 wherein said cup-shaped phase change material includes a cup-shaped portion, said cup-shaped portion being filled with an insulator.
Claim 7
Dependent Claim
13 words
The memory of claim 1 including a side wall spacer in said opening.
Claim 8
Dependent Claim
59 words
A memory comprising: a support structure; an insulator over said support structure, said insulator having an opening defined in said insulator; and a cup-shaped phase change material in said opening, said phase change material including an upper surface and said insulator including an upper surface, said upper surfaces of said insulator and said phase change material being substantially coplanar.
Claim 9
Dependent Claim
59 words
A memory comprising: a support structure; an insulator over said support structure, said insulator having an opening defined in said insulator; and a cup-shaped phase change material in said opening, said phase change material including an upper surface and said insulator including an upper surface, said upper surfaces of said insulator and said phase change material being substantially coplanar.
Claim 10
Dependent Claim
23 words
The memory of claim 7 wherein said phase change material includes a cup-shaped portion and a filler insulator formed in said cup-shaped portion.
Claim 11
Dependent Claim
35 words
The memory of claim 7 wherein said filler insulator includes an upper surface, the upper surface of said insulator being substantially coplanar with the upper surfaces of said filler insulator and said phase change material.
Claim 12
Dependent Claim
12 words
The memory of claim 7 wherein said phase change material is singulated.
Claim 13
Dependent Claim
12 words
The memory of claim 7 wherein said phase change material is encapsulated.
Claim 14
Dependent Claim
13 words
The memory of claim 7 including a side wall spacer in said opening.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-06-30 | 2006-12-30 | 2007-07-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-06-30 | 2010-12-30 | 2011-07-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-06-30 | 2014-12-30 | 2015-07-01 | $7700.00 | Window Closed / Lapsed |