US6563188B2
Expired / Lapsed
US
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Semiconductor device having multilayer passivation layer formed over memory cell fuse area
Assignee: Renesas Semiconductor Engineering Corp
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Filing: 2002-05-09
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Granted: 2003-05-13
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Expires: 2022-05-09
Abstract
Abstract A semiconductor device of the present invention is provided with a first metal wire formed above a semiconductor substrate with an interlayer insulating film intervened, a fuse formed on interlayer insulating film so as to be spaced at a distance away from first metal wire, an insulating film which covers first metal wire and which has an opening above fuse, a second metal wire formed on insulating film, a first passivation film which covers second metal wire and fuse, and a second passivation film formed on first passivation film, made of a material different from that of first passivation film and having an opening above fuse.
Inventors
- 👤 Hiroyuki Nagatani
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 00:43
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/01; H10B12/09; H10B12/50; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/493
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
116 words
A semiconductor device, comprising: a first metal wire formed above a semiconductor substrate with a first insulating film intervened; a fuse formed on said first insulating film so as to be spaced at a distance away from said first metal wire; a second insulating film that covers said first metal wire and that has a first opening above said fuse; a second metal wire formed on said second insulating film; a first passivation film that covers said second metal wire and completely covers said fuse; and a second passivation film formed on said first passivation film, made of a material different from that of said first passivation film and having a second opening above said fuse.
Claim 2
Dependent Claim
116 words
A semiconductor device, comprising: a first metal wire formed above a semiconductor substrate with a first insulating film intervened; a fuse formed on said first insulating film so as to be spaced at a distance away from said first metal wire; a second insulating film that covers said first metal wire and that has a first opening above said fuse; a second metal wire formed on said second insulating film; a first passivation film that covers said second metal wire and completely covers said fuse; and a second passivation film formed on said first passivation film, made of a material different from that of said first passivation film and having a second opening above said fuse.
Claim 3
Dependent Claim
49 words
The semiconductor device according to claim 1 , wherein said semiconductor device comprises a memory cell array portion in which memory cells are formed and a fuse portion in which said fuse is formed, and said first and second metal wires are formed in said memory cell array portion.
Claim 4
Dependent Claim
58 words
The semiconductor device according to claim 1 , wherein said first passivation film includes an oxide film of which the thickness is no less than 150 nm and no more than 300 nm, and said second passivation film includes a nitride film of which the thickness is no less than 500 nm and no more than 800 nm.
Claim 5
Dependent Claim
36 words
The semiconductor device according to claim 1 , further comprising a protective film which covers said fuse and said first metal wire, wherein said first passivation film is formed so as to cover said protective film.
Claim 6
Dependent Claim
41 words
The semiconductor device according to claim 4 , wherein said second insulating film includes an oxide film, and said protective film includes a nitride film of which the thickness is no less than 150 nm and no more than 300 nm.
Claim 7
Dependent Claim
40 words
The semiconductor device according to claim 1 , wherein said first passivation film extends within said first opening so as to have a recess above said fuse, and a sidewall insulating film is formed on the sidewalls of said recess.
Claim 8
Dependent Claim
134 words
A semiconductor device, comprising: a first metal wire formed above a semiconductor substrate with a first insulating film intervened; a metal pad layer formed on said first insulating film so as to be spaced at a distance away from said first metal wire; a second insulating film that covers said first metal wire and said metal pad layer; a second metal wire formed on said second insulating film; a fuse formed on said second insulating film so as to be spaced at a distance away from said second metal wire; a first passivation film that covers said second metal wire and completely covers said fuse; and second passivation film formed on said first passivation film, made of a material different from that of said first passivation film and having an opening above said fuse.
Claim 9
Dependent Claim
134 words
A semiconductor device, comprising: a first metal wire formed above a semiconductor substrate with a first insulating film intervened; a metal pad layer formed on said first insulating film so as to be spaced at a distance away from said first metal wire; a second insulating film that covers said first metal wire and said metal pad layer; a second metal wire formed on said second insulating film; a fuse formed on said second insulating film so as to be spaced at a distance away from said second metal wire; a first passivation film that covers said second metal wire and completely covers said fuse; and second passivation film formed on said first passivation film, made of a material different from that of said first passivation film and having an opening above said fuse.
Claim 10
Dependent Claim
59 words
The semiconductor device according to claim 7 , wherein said semiconductor device comprises a memory cell array portion in which memory cells are formed and a fuse portion in which said fuse is formed, said first and second metal wires are formed within said memory cell array portion, and said metal pad layer is formed within said fuse portion.
Claim 11
Dependent Claim
58 words
The semiconductor device according to claim 7 , wherein said first passivation film includes an oxide film of which the thickness is no less than 150 nm and no more than 300 nm, and said second passivation film includes a nitride film of which the thickness is no less than 500 nm and no more than 800 nm.
Claim 12
Dependent Claim
30 words
The semiconductor device according to claim 7 , wherein a sidewall insulating film is formed on a portion of said first passivation film that covers the sidewalls of said fuse.
Claim 13
Dependent Claim
140 words
A semiconductor device, comprising: a first metal wire formed above a semiconductor substrate with a first insulating film intervened; a metal pad layer formed on said first insulating film so as to be spaced at a distance away from said first metal wire; a second insulating film that covers said first metal wire and said metal pad layer; a second metal wire formed on said second insulating film; a fuse formed on said second insulating film so as to be spaced at a distance away from said second metal wire; a first passivation film that covers said second metal wire and completely covers said fuse; and a second passivation film formed on said first passivation film so as to cover said second metal wire and said fuse and made of a material different from that of said first passivation film.
Claim 14
Dependent Claim
140 words
A semiconductor device, comprising: a first metal wire formed above a semiconductor substrate with a first insulating film intervened; a metal pad layer formed on said first insulating film so as to be spaced at a distance away from said first metal wire; a second insulating film that covers said first metal wire and said metal pad layer; a second metal wire formed on said second insulating film; a fuse formed on said second insulating film so as to be spaced at a distance away from said second metal wire; a first passivation film that covers said second metal wire and completely covers said fuse; and a second passivation film formed on said first passivation film so as to cover said second metal wire and said fuse and made of a material different from that of said first passivation film.
References Cited (Backward Citations)
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