US6562639B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Utilizing electrical performance data to predict CD variations across stepper field
Assignee: Advanced Micro Devices Inc
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Filing: 2001-11-06
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Granted: 2003-05-13
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Expires: 2021-11-06
Abstract
Abstract In order to determine an amount of critical dimension variation to expect across a surface of a final production wafer, a plurality of test structures are formed on a test wafer. The test structures are preferably of a type commonly found on the final production wafer and may for example, include transistors, ring oscillators, resistors and/or diodes. Electrical parameter testing of the test structures is next conducted in order to obtain one or more electrical performance values for each test structure. For example, the electrical performance values may correspond to processing speed, drive current, and/or off-state current of the test structures. A correlation between the electrical performance values and expected critical dimension variations is then performed and a report is generated providing the expected critical dimension variations across the surface of the wafer. Expected critical dimension variations may be accounted for by varying characteristics of devices used during a photolithographic transfer process to the final production wafers.
Inventors
- 👤 Anna Minvielle
- 👤 Luigi Capodieci
- 👤 Christopher Spence
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 04:01
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70605; G03F7/70616; G03F7/70625; G03F7/70653; G03F7/70658; H; H10; H10P; H10P74/00; H10P74/27; H10P74/277
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
101 words
A method of estimating an amount of critical dimension variation to expect at a selected point on a semiconductor wafer following a photolithographic pattern transfer process, the method comprising the steps of: forming a test structure at the selected point on the wafer during the photolithographic pattern transfer process; measuring at least one electrical performance value of the test structure, wherein the electrical performance value is at least one of processing speed, drive current, and off-state current of the test structure; and estimating the amount of critical dimension variation to expect based on the measured at least one electrical performance value.
Claim 2
Independent Claim
101 words
A method of estimating an amount of critical dimension variation to expect at a selected point on a semiconductor wafer following a photolithographic pattern transfer process, the method comprising the steps of: forming a test structure at the selected point on the wafer during the photolithographic pattern transfer process; measuring at least one electrical performance value of the test structure, wherein the electrical performance value is at least one of processing speed, drive current, and off-state current of the test structure; and estimating the amount of critical dimension variation to expect based on the measured at least one electrical performance value.
Claim 3
Dependent Claim
44 words
The method of claim 1 , further comprising preparing a wafer of a size and configuration typically used in making plural integrated circuit die, and said forming a test structure comprising preparing test structures distributed over the entire wafer to form a test wafer.
Claim 4
Dependent Claim
22 words
The method of claim 1 , wherein the test structure is at least one of a transistor, ring oscillator, resistor and diode.
Claim 5
Dependent Claim
30 words
The method of claim 1 , wherein the step of estimating includes the step of correlating the measured at least one electrical performance value to a predetermined critical dimension variation.
Claim 6
Dependent Claim
30 words
The method of claim 1 , wherein the step of estimating is based on a comparison between a measured electric performance value of two test structures formed on the wafer.
Claim 7
Dependent Claim
38 words
The method of claim 1 , wherein the method further includes the step of adjusting an optical parameter of an optical system used during the photolithographic pattern transfer process to substantially account for the estimated critical dimension variation.
Claim 8
Dependent Claim
46 words
The method of claim 1 , wherein the method further includes the step of adjusting at least one of a mask dimension and another optical parameter of an optical system used during the photolithographic pattern transfer process to substantially account for the estimated critical dimension variation.
Claim 9
Dependent Claim
29 words
The method of claim 1 , wherein the estimated critical dimension variation corresponds to at least one of an estimated line width variation and an estimated line length variation.
Claim 10
Independent Claim
112 words
A method of estimating an amount of critical dimension variation to expect across a wafer following a photolithographic pattern transfer process, the method comprising the steps of: forming a plurality of test structures at predetermined locations on the wafer during the photolithographic pattern transfer process; measuring at least one electrical performance value of at least a portion of the plurality of test structures, wherein the electrical performance value is at least one of processing speed, drive current, and off-state current; and estimating the amount of critical dimension variation to expect based on the measured at least one electrical performance value of the at least a portion of the plurality of test structures.
Claim 11
Independent Claim
112 words
A method of estimating an amount of critical dimension variation to expect across a wafer following a photolithographic pattern transfer process, the method comprising the steps of: forming a plurality of test structures at predetermined locations on the wafer during the photolithographic pattern transfer process; measuring at least one electrical performance value of at least a portion of the plurality of test structures, wherein the electrical performance value is at least one of processing speed, drive current, and off-state current; and estimating the amount of critical dimension variation to expect based on the measured at least one electrical performance value of the at least a portion of the plurality of test structures.
Claim 12
Dependent Claim
44 words
The method of claim 9 , further comprising preparing a wafer of a size and configuration typically used in making plural integrated circuit die, and said forming a test structure comprising preparing test structures distributed over the entire wafer to form a test wafer.
Claim 13
Dependent Claim
24 words
The method of claim 9 , wherein the plurality of test structures are at least one of a transistor, ring oscillator, resistor and diode.
Claim 14
Dependent Claim
15 words
The method of claim 9 , wherein the plurality of test structures are substantially identical.
Claim 15
Dependent Claim
33 words
The method of claim 9 , wherein the step of estimating includes the step of correlating each of the measured at least one electrical performance value to a respective predetermined critical dimension variation.
Claim 16
Independent Claim
162 words
A method of estimating an amount of critical dimension variation to expect at a selected point on a semiconductor wafer following a photolithographic pattern transfer process, the method comprising the steps of: forming a plurality of test structures at predetermined locations on the wafer during the photolithographic pattern transfer process; measuring at least one electrical performance value of at least a portion of the plurality of test structures, wherein the electrical performance value is at least one of processing speed, drive current, and off-state current; estimating the amount of critical dimension variation to expect based on the measured at least one electrical performance value of the at least a portion of the plurality of test structures; wherein the step of estimating includes the step of correlating each of the measured at least one electrical performance value to a respective predetermined critical dimension variation; and creating a report of critical dimension variations across the wafer based on the respective predetermined critical dimension variation.
Claim 17
Independent Claim
162 words
A method of estimating an amount of critical dimension variation to expect at a selected point on a semiconductor wafer following a photolithographic pattern transfer process, the method comprising the steps of: forming a plurality of test structures at predetermined locations on the wafer during the photolithographic pattern transfer process; measuring at least one electrical performance value of at least a portion of the plurality of test structures, wherein the electrical performance value is at least one of processing speed, drive current, and off-state current; estimating the amount of critical dimension variation to expect based on the measured at least one electrical performance value of the at least a portion of the plurality of test structures; wherein the step of estimating includes the step of correlating each of the measured at least one electrical performance value to a respective predetermined critical dimension variation; and creating a report of critical dimension variations across the wafer based on the respective predetermined critical dimension variation.
Claim 18
Dependent Claim
14 words
The method of claim 14 , wherein the report is in a table format.
Claim 19
Dependent Claim
14 words
The method of claim 14 , wherein the report is in a graphical format.
Claim 20
Independent Claim
103 words
A method of estimating an amount of critical dimension variation to expect at a selected point on a semiconductor water following a photolithographic pattern transfer process, the method comprising the steps of: forming a test structure at the selected point on the wafer during the photolithographic pattern transfer process, wherein the test structure is a transistor; measuring at least one electrical performance value of the test structure selected from at least one of a drive current, an off-state current and a threshold voltage; and estimating the amount of critical dimension variation to expect based on the measured at least one electrical performance value.
Claim 21
Independent Claim
103 words
A method of estimating an amount of critical dimension variation to expect at a selected point on a semiconductor water following a photolithographic pattern transfer process, the method comprising the steps of: forming a test structure at the selected point on the wafer during the photolithographic pattern transfer process, wherein the test structure is a transistor; measuring at least one electrical performance value of the test structure selected from at least one of a drive current, an off-state current and a threshold voltage; and estimating the amount of critical dimension variation to expect based on the measured at least one electrical performance value.
Claim 22
Dependent Claim
34 words
The method of claim 17 , further consisting of forming a plurality of test structures at predetermined locations on the wafer during the photolithographic pattern transfer process, wherein each test structure is a transistor.
Claim 23
Dependent Claim
32 words
The method of claim 18 , wherein the step of estimating is based on a comparison between a measured electric performance value of the plurality of test structures formed on the wafer.
Claim 24
Dependent Claim
29 words
The method of claim 19 , further comprising the step of, creating a report of critical dimension variations across the wafer based on the respective predetermined critical dimension variation.
Claim 25
Dependent Claim
18 words
The method of claim 17 , wherein the electrical performance value of the test structure is drive current.
Claim 26
Dependent Claim
18 words
The method of claim 17 , wherein the electrical performance value of the test structure is off-state current.
Claim 27
Dependent Claim
18 words
The method of claim 17 , wherein the electrical performance value of the test structure is threshold voltage.
Claim 28
Dependent Claim
30 words
The method of claim 17 , wherein the step of estimating includes the step of correlating the measured at least one electrical performance value to a predetermined critical dimension variation.
Claim 29
Dependent Claim
38 words
The method of claim 17 , wherein the method further includes the step of adjusting an optical parameter of an optical system used during the photolithographic pattern transfer process to substantially account for the estimated critical dimension variation.
Claim 30
Dependent Claim
46 words
The method of claim 17 , wherein the method further includes the step of adjusting at least one of a mask dimension and another optical parameter of an optical system used during the photolithographic pattern transfer process to substantially account for the estimated critical dimension variation.
Claim 31
Dependent Claim
29 words
The method of claim 17 , wherein the estimated critical dimension variation corresponds to at least one of an estimated line width variation and an estimated line length variation.
References Cited (Backward Citations)
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